3D hierarchical architectures based on self-rolled-up silicon nitride membranes

Paul Froeter, Xin Yu, Wen Huang, Frank Du, Moyang Li, Iksu Chun, Seung Hyun Kim, Kuen J. Hsia, John A. Rogers, Xiuling Li

Research output: Contribution to journalArticle

Abstract

This study presents the superior structural versatility of strained silicon nitride (SiNx) membranes as a platform for three-dimensional (3D) hierarchical tubular architectures. The effects of compressive and tensile stressed SiNx layer thickness on the self-rolled-up tube curvature, the sacrificial layer etching anisotropy on rolling direction and chirality, and stress engineering by localized thickness control or thermal treatment, are explored systematically. Using strained SiNx membranes as an electrically insulating and optically transparent mechanical support, compact 3D hierarchical architectures involving carbon nanotube arrays and passive electronic components are demonstrated by releasing the functional structures deposited and patterned in 2D. These examples highlight the uniqueness of this platform that exploits 2D processing and self-assembly to achieve highly functional 3D structures.

Original languageEnglish (US)
Article number475301
JournalNanotechnology
Volume24
Issue number47
DOIs
StatePublished - Nov 29 2013

Fingerprint

Silicon nitride
Thickness control
Membranes
Carbon Nanotubes
Chirality
Self assembly
Etching
Carbon nanotubes
Anisotropy
Heat treatment
Processing
silicon nitride
Strained silicon
Direction compound

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

3D hierarchical architectures based on self-rolled-up silicon nitride membranes. / Froeter, Paul; Yu, Xin; Huang, Wen; Du, Frank; Li, Moyang; Chun, Iksu; Kim, Seung Hyun; Hsia, Kuen J.; Rogers, John A.; Li, Xiuling.

In: Nanotechnology, Vol. 24, No. 47, 475301, 29.11.2013.

Research output: Contribution to journalArticle

Froeter, P, Yu, X, Huang, W, Du, F, Li, M, Chun, I, Kim, SH, Hsia, KJ, Rogers, JA & Li, X 2013, '3D hierarchical architectures based on self-rolled-up silicon nitride membranes', Nanotechnology, vol. 24, no. 47, 475301. https://doi.org/10.1088/0957-4484/24/47/475301
Froeter, Paul ; Yu, Xin ; Huang, Wen ; Du, Frank ; Li, Moyang ; Chun, Iksu ; Kim, Seung Hyun ; Hsia, Kuen J. ; Rogers, John A. ; Li, Xiuling. / 3D hierarchical architectures based on self-rolled-up silicon nitride membranes. In: Nanotechnology. 2013 ; Vol. 24, No. 47.
@article{1354a71156e3410ebd0c86f22703017c,
title = "3D hierarchical architectures based on self-rolled-up silicon nitride membranes",
abstract = "This study presents the superior structural versatility of strained silicon nitride (SiNx) membranes as a platform for three-dimensional (3D) hierarchical tubular architectures. The effects of compressive and tensile stressed SiNx layer thickness on the self-rolled-up tube curvature, the sacrificial layer etching anisotropy on rolling direction and chirality, and stress engineering by localized thickness control or thermal treatment, are explored systematically. Using strained SiNx membranes as an electrically insulating and optically transparent mechanical support, compact 3D hierarchical architectures involving carbon nanotube arrays and passive electronic components are demonstrated by releasing the functional structures deposited and patterned in 2D. These examples highlight the uniqueness of this platform that exploits 2D processing and self-assembly to achieve highly functional 3D structures.",
author = "Paul Froeter and Xin Yu and Wen Huang and Frank Du and Moyang Li and Iksu Chun and Kim, {Seung Hyun} and Hsia, {Kuen J.} and Rogers, {John A.} and Xiuling Li",
year = "2013",
month = "11",
day = "29",
doi = "10.1088/0957-4484/24/47/475301",
language = "English (US)",
volume = "24",
journal = "Nanotechnology",
issn = "0957-4484",
publisher = "IOP Publishing Ltd.",
number = "47",

}

TY - JOUR

T1 - 3D hierarchical architectures based on self-rolled-up silicon nitride membranes

AU - Froeter, Paul

AU - Yu, Xin

AU - Huang, Wen

AU - Du, Frank

AU - Li, Moyang

AU - Chun, Iksu

AU - Kim, Seung Hyun

AU - Hsia, Kuen J.

AU - Rogers, John A.

AU - Li, Xiuling

PY - 2013/11/29

Y1 - 2013/11/29

N2 - This study presents the superior structural versatility of strained silicon nitride (SiNx) membranes as a platform for three-dimensional (3D) hierarchical tubular architectures. The effects of compressive and tensile stressed SiNx layer thickness on the self-rolled-up tube curvature, the sacrificial layer etching anisotropy on rolling direction and chirality, and stress engineering by localized thickness control or thermal treatment, are explored systematically. Using strained SiNx membranes as an electrically insulating and optically transparent mechanical support, compact 3D hierarchical architectures involving carbon nanotube arrays and passive electronic components are demonstrated by releasing the functional structures deposited and patterned in 2D. These examples highlight the uniqueness of this platform that exploits 2D processing and self-assembly to achieve highly functional 3D structures.

AB - This study presents the superior structural versatility of strained silicon nitride (SiNx) membranes as a platform for three-dimensional (3D) hierarchical tubular architectures. The effects of compressive and tensile stressed SiNx layer thickness on the self-rolled-up tube curvature, the sacrificial layer etching anisotropy on rolling direction and chirality, and stress engineering by localized thickness control or thermal treatment, are explored systematically. Using strained SiNx membranes as an electrically insulating and optically transparent mechanical support, compact 3D hierarchical architectures involving carbon nanotube arrays and passive electronic components are demonstrated by releasing the functional structures deposited and patterned in 2D. These examples highlight the uniqueness of this platform that exploits 2D processing and self-assembly to achieve highly functional 3D structures.

UR - http://www.scopus.com/inward/record.url?scp=84887586868&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84887586868&partnerID=8YFLogxK

U2 - 10.1088/0957-4484/24/47/475301

DO - 10.1088/0957-4484/24/47/475301

M3 - Article

C2 - 24177590

AN - SCOPUS:84887586868

VL - 24

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

IS - 47

M1 - 475301

ER -