3D and 2D silicon photonic crystals for microphotonic circuits

Research output: Contribution to conferencePaper

Abstract

Photonic crystals might offer a unique solution for building ultradense photonic integrated circuits. Recent achievements in fabrication of silicon photonic crystals compatible with microelectronics processing will be reported.

Original languageEnglish (US)
StatePublished - Dec 1 2003
Externally publishedYes
EventTrends in Optics and Photonics Series: Quantum electronics and Laser Science (QELS) - Baltimore, MD., United States
Duration: Jun 1 2003Jun 6 2003

Other

OtherTrends in Optics and Photonics Series: Quantum electronics and Laser Science (QELS)
CountryUnited States
CityBaltimore, MD.
Period6/1/036/6/03

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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  • Cite this

    Vlasov, Y. (2003). 3D and 2D silicon photonic crystals for microphotonic circuits. Paper presented at Trends in Optics and Photonics Series: Quantum electronics and Laser Science (QELS), Baltimore, MD., United States.