3D and 2D silicon photonic crystals for microphotonic circuits

Research output: Contribution to journalConference article

Abstract

Photonic crystals might offer a unique solution for building ultradense photonic integrated circuits. Recent achievements in fabrication of silicon photonic crystals compatible with microelectronics processing will be reported.

Original languageEnglish (US)
Number of pages1
JournalOSA Trends in Optics and Photonics Series
Volume88
StatePublished - Jan 1 2003
Externally publishedYes
EventConference on Lasers and Electro-Optics (CLEO); Postconference Digest - Baltimore, MD, United States
Duration: Jun 1 2003Jun 6 2003

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ASJC Scopus subject areas

  • Engineering(all)

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