3-D granular Monte Carlo simulation of silicon n-MOSFETs

Engineering & Materials Science

• Electrons 95%
• Ions 86%
• Silicon 74%
• Semiconductor doping 71%
• Monte Carlo methods 50%
• Electric fields 43%
• Oxides 40%

Physics & Astronomy

• field effect transistors 74%
• silicon 50%
• inversions 38%
• simulation 36%
• mesh 22%
• ions 22%
• Monte Carlo method 21%
• electrons 19%
• oxides 14%
• electric fields 13%
• profiles 12%
• interactions 9%

Chemical Compounds

• Simulation 59%
• Statistical Ensemble 31%
• Electric Field 28%
• Velocity 26%
• Length 18%
• Electron Particle 17%