2DOF control design for nanopositioning

Keyphrases

• Control Design 100%
• Two-degree-of-freedom Control 100%
• Nanopositioning 100%
• Control System 33%
• Controller 33%
• Optimal Control Strategy 33%
• Theoretic Analysis 33%
• Performance Specifications 33%
• Performance Objectives 33%
• Fundamental Limitations 33%
• Scanning Probe Microscope 33%
• Optimal Feedback 33%
• Control Law 33%
• Plant-based 33%
• Nanopositioning System 33%
• Resolution Bandwidth 33%
• Multiple Performance 33%
• Algebraic Constraints 33%
• Closed-loop Devices 33%
• Systems Theory Framework 33%

Engineering

• Control Design 100%
• Two Degree of Freedom 100%
• Control System 33%
• Limitations 33%
• Experimental Result 33%
• Open Loop 33%
• Feedforward 33%
• Closed Loop 33%
• Optimal Control 33%
• Scanning Probe Microscope 33%
• Control Law 33%
• Resolution Bandwidth 33%