TY - CHAP
T1 - 2DOF control design for nanopositioning
AU - Lee, Chibum
AU - Mohan, Gayathri
AU - Salapaka, Srinivasa
PY - 2011
Y1 - 2011
N2 - This chapter will focus on control systems theoretic analysis and synthesis that significantly expand the range of performance specifications and positioning capabilities of scanning probe microscopes (SPMs).We will present a systems theory framework to study fundamental limitations on the performance of one and two degree-of-freedom (DOF) control designs for nanopositioning systems. In particular, this chapter will present, compare, and analyze optimal-control methods for designing two-degree-of-freedom (2DOF) control laws for nanopositioning. The different methods are motivated by various practical scenarios and difficulty in achieving simultaneously multiple performance objectives of resolution, bandwidth, and robustness by tuning-based or shaping of open-loop-plants based designs. The analysis shows that the primary role of feedback is providing robustness to the closed-loop device whereas the feedforward component is mainly effective in overcoming fundamental algebraic constraints that limit the feedback-only designs. Experimental results indicate substantial improvements (over 200% in bandwidth) when compared to optimal feedback-only controllers.
AB - This chapter will focus on control systems theoretic analysis and synthesis that significantly expand the range of performance specifications and positioning capabilities of scanning probe microscopes (SPMs).We will present a systems theory framework to study fundamental limitations on the performance of one and two degree-of-freedom (DOF) control designs for nanopositioning systems. In particular, this chapter will present, compare, and analyze optimal-control methods for designing two-degree-of-freedom (2DOF) control laws for nanopositioning. The different methods are motivated by various practical scenarios and difficulty in achieving simultaneously multiple performance objectives of resolution, bandwidth, and robustness by tuning-based or shaping of open-loop-plants based designs. The analysis shows that the primary role of feedback is providing robustness to the closed-loop device whereas the feedforward component is mainly effective in overcoming fundamental algebraic constraints that limit the feedback-only designs. Experimental results indicate substantial improvements (over 200% in bandwidth) when compared to optimal feedback-only controllers.
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U2 - 10.1007/978-3-642-22173-6_4
DO - 10.1007/978-3-642-22173-6_4
M3 - Chapter
AN - SCOPUS:79960945043
SN - 9783642221729
T3 - Lecture Notes in Control and Information Sciences
SP - 67
EP - 82
BT - Control Technologies for Emerging Micro and Nanoscale Systems
A2 - Eleftheriou, Evangelos
A2 - Moheimani, Reza
ER -