Abstract

This article describes temperature measurement of a heated atomic force microscope cantilever using the 2ω and 3ω harmonics of the cantilever temperature signal. When the cantilever is periodically heated, large temperature oscillations lead to large changes in the cantilever electrical resistance and also lead to nonconstant temperature coefficient of resistance. We model the cantilever heating to account for these sources of nonlinearity, and compare models with experiment. When the heating voltage amplitude is 17.9 V over the driving frequency range 10 Hz-34 kHz, the cantilever temperature oscillation is between 5 °C and 200 °C. Over this range, the corrected 2ω method predicts cantilever temperature to within 16 and the corrected 3ω method predicts the cantilever temperature within 3. We show a general method for predicting the periodic cantilever temperature, sources of errors, and corrections for these errors.

Original languageEnglish (US)
Article number074902
JournalReview of Scientific Instruments
Volume83
Issue number7
DOIs
StatePublished - Jul 1 2012

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Temperature measurement
temperature measurement
Temperature
temperature
Heating
oscillations
heating
Acoustic impedance
Error correction
electrical resistance
Microscopes
frequency ranges
nonlinearity
microscopes
harmonics
Electric potential
electric potential
coefficients
Experiments

ASJC Scopus subject areas

  • Instrumentation

Cite this

2-ω and 3-ω temperature measurement of a heated microcantilever. / Lee, Byeonghee; King, William Paul.

In: Review of Scientific Instruments, Vol. 83, No. 7, 074902, 01.07.2012.

Research output: Contribution to journalReview article

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