1.7 GHz Y-Cut Lithium Niobate MEMS Resonators with FoM of336 andfQ of9.15×1012

Yansong Yang, Ruochen Lu, Tomás Manzaneque, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work presents a new class of microelectromechanical system (MEMS) resonators enabled by Y -cut lithium niobate (LiNb03) thin films. In operation, the devices are excited into the first order antisymmetric (A1) mode vibration. The fabricated MEMS resonator has demonstrated a large effective electromechanical coupling (k t2) of 6.3% and a high quality factor (Q) of 5341, hence resulting in an extremely high figure of merit (FoM= k t2· Q) of 336 at 1.7 GHz. Additionally, this work also marks the highest experimental/Q product of 9.15× 10 12 Hz for state-of-the-art MEMS resonators based on transferred lithium niobate thin films.

Original languageEnglish (US)
Title of host publicationProceedings of the 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages563-566
Number of pages4
ISBN (Print)9781538650677
DOIs
StatePublished - Aug 17 2018
Event2018 IEEE/MTT-S International Microwave Symposium, IMS 2018 - Philadelphia, United States
Duration: Jun 10 2018Jun 15 2018

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
Volume2018-June
ISSN (Print)0149-645X

Other

Other2018 IEEE/MTT-S International Microwave Symposium, IMS 2018
CountryUnited States
CityPhiladelphia
Period6/10/186/15/18

Keywords

  • 5G
  • FoM/Q product
  • MEMS
  • lithium niobate
  • piezoelectric resonator

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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