1.7 GHz Y-Cut Lithium Niobate MEMS Resonators with FoM of336 andfQ of9.15×1012

Yansong Yang; Ruochen Lu; Tomás Manzaneque; Songbin Gong

doi:10.1109/MWSYM.2018.8439516

1.7 GHz Y-Cut Lithium Niobate MEMS Resonators with FoM of336 andfQ of9.15×10¹²

Yansong Yang, Ruochen Lu, Tomás Manzaneque, Songbin Gong

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This work presents a new class of microelectromechanical system (MEMS) resonators enabled by Y -cut lithium niobate (LiNb03) thin films. In operation, the devices are excited into the first order antisymmetric (A1) mode vibration. The fabricated MEMS resonator has demonstrated a large effective electromechanical coupling (k t2) of 6.3% and a high quality factor (Q) of 5341, hence resulting in an extremely high figure of merit (FoM= k t2· Q) of 336 at 1.7 GHz. Additionally, this work also marks the highest experimental/Q product of 9.15× 10 12 Hz for state-of-the-art MEMS resonators based on transferred lithium niobate thin films.

Original language	English (US)
Title of host publication	Proceedings of the 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	563-566
Number of pages	4
ISBN (Print)	9781538650677
DOIs	https://doi.org/10.1109/MWSYM.2018.8439516
State	Published - Aug 17 2018
Event	2018 IEEE/MTT-S International Microwave Symposium, IMS 2018 - Philadelphia, United States Duration: Jun 10 2018 → Jun 15 2018

Publication series

Name	IEEE MTT-S International Microwave Symposium Digest
Volume	2018-June
ISSN (Print)	0149-645X

Other

Other	2018 IEEE/MTT-S International Microwave Symposium, IMS 2018
Country/Territory	United States
City	Philadelphia
Period	6/10/18 → 6/15/18

Keywords

5G
FoM/Q product
MEMS
lithium niobate
piezoelectric resonator

ASJC Scopus subject areas

Radiation
Condensed Matter Physics
Electrical and Electronic Engineering

Online availability

10.1109/MWSYM.2018.8439516

Library availability

Discover UIUC Full Text

Cite this

Yang, Y., Lu, R., Manzaneque, T., & Gong, S. (2018). 1.7 GHz Y-Cut Lithium Niobate MEMS Resonators with FoM of336 andfQ of9.15×10¹² In Proceedings of the 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018 (pp. 563-566). Article 8439516 (IEEE MTT-S International Microwave Symposium Digest; Vol. 2018-June). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MWSYM.2018.8439516

1.7 GHz Y-Cut Lithium Niobate MEMS Resonators with FoM of336 andfQ of9.15×10¹² . / Yang, Yansong; Lu, Ruochen; Manzaneque, Tomás et al.
Proceedings of the 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 563-566 8439516 (IEEE MTT-S International Microwave Symposium Digest; Vol. 2018-June).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yang, Y, Lu, R, Manzaneque, T & Gong, S 2018, 1.7 GHz Y-Cut Lithium Niobate MEMS Resonators with FoM of336 andfQ of9.15×10¹² in Proceedings of the 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018., 8439516, IEEE MTT-S International Microwave Symposium Digest, vol. 2018-June, Institute of Electrical and Electronics Engineers Inc., pp. 563-566, 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018, Philadelphia, United States, 6/10/18. https://doi.org/10.1109/MWSYM.2018.8439516

Yang Y, Lu R, Manzaneque T, Gong S. 1.7 GHz Y-Cut Lithium Niobate MEMS Resonators with FoM of336 andfQ of9.15×10¹² In Proceedings of the 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 563-566. 8439516. (IEEE MTT-S International Microwave Symposium Digest). doi: 10.1109/MWSYM.2018.8439516

@inproceedings{e42b741950be4ea0bf16ece193fb27ca,

title = "1.7 GHz Y-Cut Lithium Niobate MEMS Resonators with FoM of336 andfQ of9.15×1012 ",

abstract = "This work presents a new class of microelectromechanical system (MEMS) resonators enabled by Y -cut lithium niobate (LiNb03) thin films. In operation, the devices are excited into the first order antisymmetric (A1) mode vibration. The fabricated MEMS resonator has demonstrated a large effective electromechanical coupling (k t2) of 6.3% and a high quality factor (Q) of 5341, hence resulting in an extremely high figure of merit (FoM= k t2· Q) of 336 at 1.7 GHz. Additionally, this work also marks the highest experimental/Q product of 9.15× 10 12 Hz for state-of-the-art MEMS resonators based on transferred lithium niobate thin films.",

keywords = "5G, FoM/Q product, MEMS, lithium niobate, piezoelectric resonator",

author = "Yansong Yang and Ruochen Lu and Tom{\'a}s Manzaneque and Songbin Gong",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018 ; Conference date: 10-06-2018 Through 15-06-2018",

year = "2018",

month = aug,

day = "17",

doi = "10.1109/MWSYM.2018.8439516",

language = "English (US)",

isbn = "9781538650677",

series = "IEEE MTT-S International Microwave Symposium Digest",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "563--566",

booktitle = "Proceedings of the 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018",

address = "United States",

}

TY - GEN

T1 - 1.7 GHz Y-Cut Lithium Niobate MEMS Resonators with FoM of336 andfQ of9.15×1012

AU - Yang, Yansong

AU - Lu, Ruochen

AU - Manzaneque, Tomás

AU - Gong, Songbin

PY - 2018/8/17

Y1 - 2018/8/17

N2 - This work presents a new class of microelectromechanical system (MEMS) resonators enabled by Y -cut lithium niobate (LiNb03) thin films. In operation, the devices are excited into the first order antisymmetric (A1) mode vibration. The fabricated MEMS resonator has demonstrated a large effective electromechanical coupling (k t2) of 6.3% and a high quality factor (Q) of 5341, hence resulting in an extremely high figure of merit (FoM= k t2· Q) of 336 at 1.7 GHz. Additionally, this work also marks the highest experimental/Q product of 9.15× 10 12 Hz for state-of-the-art MEMS resonators based on transferred lithium niobate thin films.

AB - This work presents a new class of microelectromechanical system (MEMS) resonators enabled by Y -cut lithium niobate (LiNb03) thin films. In operation, the devices are excited into the first order antisymmetric (A1) mode vibration. The fabricated MEMS resonator has demonstrated a large effective electromechanical coupling (k t2) of 6.3% and a high quality factor (Q) of 5341, hence resulting in an extremely high figure of merit (FoM= k t2· Q) of 336 at 1.7 GHz. Additionally, this work also marks the highest experimental/Q product of 9.15× 10 12 Hz for state-of-the-art MEMS resonators based on transferred lithium niobate thin films.

KW - 5G

KW - FoM/Q product

KW - MEMS

KW - lithium niobate

KW - piezoelectric resonator

UR - http://www.scopus.com/inward/record.url?scp=85053049418&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85053049418&partnerID=8YFLogxK

U2 - 10.1109/MWSYM.2018.8439516

DO - 10.1109/MWSYM.2018.8439516

M3 - Conference contribution

AN - SCOPUS:85053049418

SN - 9781538650677

T3 - IEEE MTT-S International Microwave Symposium Digest

SP - 563

EP - 566

BT - Proceedings of the 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018

Y2 - 10 June 2018 through 15 June 2018

ER -