100 nanometer scale resistive heater-thermometer on a silicon cantilever
- Zhenting Dai
- , Keunhan Park
- , William Paul King
- Mechanical Science and Engineering
- Grainger College of Engineering
- Materials Science and Engineering
- Materials Research Lab
- Information Trust Institute
- Micro and Nanotechnology Lab
- Electrical and Computer Engineering
- Beckman Institute for Advanced Science and Technology
- Biomedical and Translational Sciences
Research output: Contribution to journal › Conference article › peer-review