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100 nanometer scale resistive heater-thermometer on a silicon cantilever
Zhenting Dai, Keunhan Park, William Paul King
- Mechanical Science and Engineering
- Grainger College of Engineering
- Materials Science and Engineering
- Materials Research Lab
- Information Trust Institute
- Micro and Nanotechnology Lab
- Electrical and Computer Engineering
- Beckman Institute for Advanced Science and Technology
- Biomedical and Translational Sciences
Research output: Contribution to journal › Conference article › peer-review