10-60-GHz Electromechanical Resonators Using Thin-Film Lithium Niobate

Yansong Yang; Ruochen Lu; Liuqing Gao; Songbin Gong

doi:10.1109/TMTT.2020.3027694

10-60-GHz Electromechanical Resonators Using Thin-Film Lithium Niobate

Yansong Yang
, Ruochen Lu
, Liuqing Gao
, Songbin Gong

Research output: Contribution to journal › Article › peer-review

Abstract

This work presents a new class of microelectromechanical system (MEMS) resonator toward 60 GHz for the fifth-generation (5G) wireless communications. The wide range of the operating frequencies is achieved by resorting to different orders of the antisymmetric Lamb wave modes in a 400-nm-thick Z-cut lithium niobate thin film. The resonance of 55 GHz demonstrated in this work marks the highest operating frequency for piezoelectric electromechanical devices. The fabricated device shows an extracted mechanical $Q$ of 340 and an $f\times Q$ product of $1.87\times 10^{13}$ in a footprint of $2 \times 10^{-3}$ mm2. The performance has shown the strong potential of LiNbO3 antisymmetric mode devices for front-end applications in 5G high-band.

Original language	English (US)
Article number	9218937
Pages (from-to)	5211-5220
Number of pages	10
Journal	IEEE Transactions on Microwave Theory and Techniques
Volume	68
Issue number	12
DOIs	https://doi.org/10.1109/TMTT.2020.3027694
State	Published - Dec 2020

Keywords

5G wireless communications
Acoustic filters
Internet of Things
acoustic resonators
antisymmetric Lamb waves
frequency synthesizer
lithium niobate
microelectromechanical systems (MEMS)

ASJC Scopus subject areas

Radiation
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1109/TMTT.2020.3027694License: CC BY

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title = "10-60-GHz Electromechanical Resonators Using Thin-Film Lithium Niobate",

abstract = "This work presents a new class of microelectromechanical system (MEMS) resonator toward 60 GHz for the fifth-generation (5G) wireless communications. The wide range of the operating frequencies is achieved by resorting to different orders of the antisymmetric Lamb wave modes in a 400-nm-thick Z-cut lithium niobate thin film. The resonance of 55 GHz demonstrated in this work marks the highest operating frequency for piezoelectric electromechanical devices. The fabricated device shows an extracted mechanical \$Q\$ of 340 and an \$f\textbackslash{}times Q\$ product of \$1.87\textbackslash{}times 10\textasciicircum{}\{13\}\$ in a footprint of \$2 \textbackslash{}times 10\textasciicircum{}\{-3\}\$ mm2. The performance has shown the strong potential of LiNbO3 antisymmetric mode devices for front-end applications in 5G high-band.",

keywords = "5G wireless communications, Acoustic filters, Internet of Things, acoustic resonators, antisymmetric Lamb waves, frequency synthesizer, lithium niobate, microelectromechanical systems (MEMS)",

author = "Yansong Yang and Ruochen Lu and Liuqing Gao and Songbin Gong",

note = "Manuscript received June 18, 2020; revised September 20, 2020; accepted September 22, 2020. Date of publication October 9, 2020; date of current version December 3, 2020. This work was supported by the U.S. Defense Advanced Research Projects Agency—Microsystem Technology Office (DARPA-MTO) Near Zero Power RF and Sensor Operations (NZERO) Program (Corresponding author: Yansong Yang.) The authors are with the Department of Electrical and Computing Engineering, University of Illinois at Urbana–Champaign, Urbana, IL 61801 USA (e-mail: [email protected]).",

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N1 - Manuscript received June 18, 2020; revised September 20, 2020; accepted September 22, 2020. Date of publication October 9, 2020; date of current version December 3, 2020. This work was supported by the U.S. Defense Advanced Research Projects Agency—Microsystem Technology Office (DARPA-MTO) Near Zero Power RF and Sensor Operations (NZERO) Program (Corresponding author: Yansong Yang.) The authors are with the Department of Electrical and Computing Engineering, University of Illinois at Urbana–Champaign, Urbana, IL 61801 USA (e-mail: [email protected]).

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10-60-GHz Electromechanical Resonators Using Thin-Film Lithium Niobate

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