Abstract
This work presents a new class of microelectromechanical system (MEMS) resonator toward 60 GHz for the fifth-generation (5G) wireless communications. The wide range of the operating frequencies is achieved by resorting to different orders of the antisymmetric Lamb wave modes in a 400-nm-thick Z-cut lithium niobate thin film. The resonance of 55 GHz demonstrated in this work marks the highest operating frequency for piezoelectric electromechanical devices. The fabricated device shows an extracted mechanical $Q$ of 340 and an $f\times Q$ product of $1.87\times 10^{13}$ in a footprint of $2 \times 10^{-3}$ mm2. The performance has shown the strong potential of LiNbO3 antisymmetric mode devices for front-end applications in 5G high-band.
Original language | English (US) |
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Article number | 9218937 |
Pages (from-to) | 5211-5220 |
Number of pages | 10 |
Journal | IEEE Transactions on Microwave Theory and Techniques |
Volume | 68 |
Issue number | 12 |
DOIs | |
State | Published - Dec 2020 |
Keywords
- 5G wireless communications
- Acoustic filters
- Internet of Things
- acoustic resonators
- antisymmetric Lamb waves
- frequency synthesizer
- lithium niobate
- microelectromechanical systems (MEMS)
ASJC Scopus subject areas
- Radiation
- Condensed Matter Physics
- Electrical and Electronic Engineering