10-60-GHz Electromechanical Resonators Using Thin-Film Lithium Niobate

Yansong Yang, Ruochen Lu, Liuqing Gao, Songbin Gong

Research output: Contribution to journalArticlepeer-review


This work presents a new class of microelectromechanical system (MEMS) resonator toward 60 GHz for the fifth-generation (5G) wireless communications. The wide range of the operating frequencies is achieved by resorting to different orders of the antisymmetric Lamb wave modes in a 400-nm-thick Z-cut lithium niobate thin film. The resonance of 55 GHz demonstrated in this work marks the highest operating frequency for piezoelectric electromechanical devices. The fabricated device shows an extracted mechanical $Q$ of 340 and an $f\times Q$ product of $1.87\times 10^{13}$ in a footprint of $2 \times 10^{-3}$ mm2. The performance has shown the strong potential of LiNbO3 antisymmetric mode devices for front-end applications in 5G high-band.

Original languageEnglish (US)
Article number9218937
Pages (from-to)5211-5220
Number of pages10
JournalIEEE Transactions on Microwave Theory and Techniques
Issue number12
StatePublished - Dec 2020


  • 5G wireless communications
  • Acoustic filters
  • Internet of Things
  • acoustic resonators
  • antisymmetric Lamb waves
  • frequency synthesizer
  • lithium niobate
  • microelectromechanical systems (MEMS)

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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