Abstract
Quarter-micrometer gated ion-implanted GaAs MESFETs which demonstrate device performance comparable to AlGaAs/InGaAs pseudomorphic HEMTs (high-electron mobility transistors) have been successfully fabricated on 3-in-diameter GaAs substrates. The MESFETs show a peak extrinsic transconductance of 480 mS/mm with a high channel current of 720 mA/nm. From S-parameter measurements, the MESFETs show a peak current-gain cutoff frequency ft of 68 GHz with an average ft of 62 GHz across the wafer. The 0.25-μm gate MESFETs also exhibit a maximum-available-gain cutoff frequency ft greater than 100 GHz. These results are the first demonstration of potential volume production of high-performance ion-implanted MESFETs for millimeter-wave application.
Original language | English (US) |
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Pages (from-to) | 186-188 |
Number of pages | 3 |
Journal | Electron device letters |
Volume | v |
Issue number | n |
State | Published - 1992 |
Externally published | Yes |
ASJC Scopus subject areas
- General Engineering