μ-Porous Silicon (μPS) gas sensor based on interdigitated μ-electrodes (IDμE's)

Enrique Valera, Olga Casais, Michael Vetter, Ángel Rodríguez

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A μ-porous silicon (μPS) gas sensor based on interdigitated μ-electrodes (IDuE's) has been designed and developed. μPS obtained by means of electrochemical anodization of a p-type silicon (c-Si) wafer was used as active layer. The μPS layers are supported by the bulk of the c-Si wafer. Interdigitated μ-electrodes, which work as transducers, were deposited on the uPS surface by means of gold evaporation using shadow mask technique. Different IDμE's, with different geometries and dimensions have been deposited. Additionally, different conditions of μPS formation, as i.e. electrolyte concentration, current density and anodization time, were used in order to obtain different actives layers with different absorption capabilities. Clear responses to organic vapors such us ethanol have been obtained.

Original languageEnglish (US)
Title of host publication2007 Spanish Conference on Electron Devices, Proceedings
Pages197-200
Number of pages4
DOIs
StatePublished - Oct 15 2007
Externally publishedYes
Event2007 Spanish Conference on Electron Devices, SCED - Madrid, Spain
Duration: Jan 31 2007Feb 2 2007

Publication series

Name2007 Spanish Conference on Electron Devices, Proceedings

Conference

Conference2007 Spanish Conference on Electron Devices, SCED
Country/TerritorySpain
CityMadrid
Period1/31/072/2/07

Keywords

  • μ-porous silicon
  • Gas sensors
  • Interdigitated μ-electrodes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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