β-Ga2O3FinFETs by MacEtch: temperature dependent I-V characteristics

Zhongjie Ren, Hsien Chih Huang, Hanwool Lee, Clarence Chan, Henry C. Roberts, Xihang Wu, Aadil Wassem, Wenjuan Zhu, Xiuling Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The high temperature performance of electronic devices using the emerging material, \beta-Ga2O3, is important for the high-power applications under extreme environments. In this work, the high aspect-ratio \beta-Ga2O3 FinFETs were tested above room temperature up to 298°C in vacuum for the first time. The hysteresis remained relatively stable (0.1 ∼ 0.35 V) for the 50°C to 150 °C measurements while it was exponentially increased when the temperature exceeded 150 °C and eventually reached 4.59V at 298°C. In addition, the specific on-resistance (R{on, sp}) and subthreshold swing (SS) increased gradually with high temperature. This high temperature studies performed here can contribute to the future development of high performance 3-dimensional \beta-Ga2O3 electron devices.

Original languageEnglish (US)
Title of host publication2023 Device Research Conference, DRC 2023
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350323108
DOIs
StatePublished - 2023
Event2023 Device Research Conference, DRC 2023 - Santa Barbara, United States
Duration: Jun 25 2023Jun 28 2023

Publication series

NameDevice Research Conference - Conference Digest, DRC
Volume2023-June
ISSN (Print)1548-3770

Conference

Conference2023 Device Research Conference, DRC 2023
Country/TerritoryUnited States
CitySanta Barbara
Period6/25/236/28/23

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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