20002020

Research output per year

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Research Output

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Conference contribution
2019

Efficient numerical modeling of scattering by electrically large objects in a stratified medium for imaging applications

Zhang, K., Goddard, L. L. & Jin, J. M., Sep 2019, Proceedings of the 2019 21st International Conference on Electromagnetics in Advanced Applications, ICEAA 2019. Institute of Electrical and Electronics Engineers Inc., 1 p. 8879405. (Proceedings of the 2019 21st International Conference on Electromagnetics in Advanced Applications, ICEAA 2019).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

High-performance integrated photonics in thin film lithium niobate platform

Bahadori, M., Kar, A., Yang, Y., Lavasani, A., Goddard, L. L. & Gong, S., Jan 1 2019, CLEO: Applications and Technology, CLEO_AT 2019. OSA - The Optical Society, (Optics InfoBase Conference Papers; vol. Part F127-CLEO_AT 2019).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

High-Performance Integrated Photonics in Thin Film Lithium Niobate Platform

Bahadori, M., Kar, A., Yang, Y., Lavasani, A., Goddard, L. L. & Gong, S., May 2019, 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 8750640. (2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Regularized phase reconstruction for sensing deep subwavelength perturbations on large-scale wafers

Zhu, J. & Goddard, L. L., Jan 1 2019, CLEO: Applications and Technology, CLEO_AT 2019. OSA - The Optical Society, (Optics InfoBase Conference Papers; vol. Part F127-CLEO_AT 2019).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Regularized Phase Reconstruction for Sensing Deep Subwavelength Perturbations on Large-Scale Wafers

Zhu, J. & Goddard, L. L., May 2019, 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 8749878. (2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2018

Defect inspection using a time-domain mode decomposition technique

Zhu, J. & Goddard, L. L., Jan 1 2018, Metrology, Inspection, and Process Control for Microlithography XXXII. Ukraintsev, V. A. & Adan, O. (eds.). SPIE, 1058508. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10585).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Large-Scale Scattering Analysis of Arbitrary Objects in a Stratified Medium

Zhang, K., Goddard, L. L. & Jin, J., Jan 1 2018, 2018 IEEE Antennas and Propagation Society International Symposium and USNC/URSI National Radio Science Meeting, APSURSI 2018 - Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 1313-1314 2 p. 8608687. (2018 IEEE Antennas and Propagation Society International Symposium and USNC/URSI National Radio Science Meeting, APSURSI 2018 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2017

A computational study of a hybrid plasmonic-microring for label-free detection

Braswell, S., Wenner, B., Allen, M., Allen, J., Ephrem, A. & Goddard, L. L., Jan 23 2017, 2016 IEEE Photonics Conference, IPC 2016. Institute of Electrical and Electronics Engineers Inc., 7831148. (2016 IEEE Photonics Conference, IPC 2016).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Characterization of lithium niobate microdisk resonators with grating couplers

Kar, A., Gao, A., Goddard, L. L. & Gong, S., Nov 20 2017, 30th Annual Conference of the IEEE Photonics Society, IPC 2017. Institute of Electrical and Electronics Engineers Inc., p. 221-222 2 p. (30th Annual Conference of the IEEE Photonics Society, IPC 2017; vol. 2017-January).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Enhanced parallel bridge defect inspection using a metalens assisted off-focus scanning imaging

Zhu, J., Purandare, S. & Goddard, L. L., Oct 25 2017, 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 1-2 2 p. (2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings; vol. 2017-January).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Focusing properties of a cascaded asymmetric microstructure under Gaussian beam illumination

Zhu, J. & Goddard, L. L., Oct 25 2017, 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 1-2 2 p. (2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings; vol. 2017-January).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Low-cost electroluminescence imaging for automated defect characterization in photovoltaic modules

Bazzoli, M., Silverman, T. J. & Goddard, L. L., Nov 20 2017, 30th Annual Conference of the IEEE Photonics Society, IPC 2017. Institute of Electrical and Electronics Engineers Inc., p. 481-482 2 p. (30th Annual Conference of the IEEE Photonics Society, IPC 2017; vol. 2017-January).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Monolithic integration of vertical SiNx microrings on a ridge waveguide to achieve multi-channel photonic coupling

Yu, X., Goddard, L. L., Li, X. & Chen, X., Oct 25 2017, 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 1-2 2 p. (2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings; vol. 2017-January).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Monolithic integration of vertical SiNx microrings on a ridge waveguide to achieve multi-channel photonic coupling

Yu, X., Goddard, L. L., Li, X. & Chen, X., Jan 1 2017, CLEO: Science and Innovations, CLEO_SI 2017. OSA - The Optical Society, (Optics InfoBase Conference Papers; vol. Part F41-CLEO_SI 2017).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2016

Axial confinement in the monolithic integrated self-rolled-up vertical SiNx microring resonator on a ridge waveguide

Yu, X., Goddard, L. L., Li, X. & Chen, X., Dec 16 2016, 2016 Conference on Lasers and Electro-Optics, CLEO 2016. Institute of Electrical and Electronics Engineers Inc., 7788687. (2016 Conference on Lasers and Electro-Optics, CLEO 2016).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Electromagnetic field modeling for defect detection in 7 nm node patterned wafers

Zhu, J., Zhang, K., Davoudzadeh, N., Wang, X. & Goddard, L. L., Jan 1 2016, Metrology, Inspection, and Process Control for Microlithography XXX. Sanchez, M. I. & Ukraintsev, V. A. (eds.). SPIE, 97780P. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9778).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Far-field light scattering from sub-wavelength wafer patterns using a parallel FETI-DP algorithm

Zhang, K., Zhu, J., Goddard, L. L. & Jin, J. M., Oct 25 2016, 2016 IEEE Antennas and Propagation Society International Symposium, APSURSI 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 2009-2010 2 p. 7696711. (2016 IEEE Antennas and Propagation Society International Symposium, APSURSI 2016 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Generalized measurement configuration optimization for accurate reconstruction of periodic nanostructures using optical scatterometry

Zhu, J., Shi, Y., Liu, S. & Goddard, L. L., Jan 1 2016, Metrology, Inspection, and Process Control for Microlithography XXX. Sanchez, M. I. & Ukraintsev, V. A. (eds.). SPIE, 977823. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9778).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Optical clock pulse generation using thermal nonlinearity in microring resonators

Davoudzadeh, N., Arbabi, A., Zhu, J. & Goddard, L. L., Dec 16 2016, 2016 Conference on Lasers and Electro-Optics, CLEO 2016. Institute of Electrical and Electronics Engineers Inc., 7788305. (2016 Conference on Lasers and Electro-Optics, CLEO 2016).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Parallel FETI-DP algorithm for defect detection in large-area nanopatterned wafers

Zhang, K., Goddard, L. L. & Jin, J., May 4 2016, 2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 7465398. (2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2015

9nm node wafer defect inspection using three-dimensional scanning, a 405nm diode laser, and a broadband source

Zhou, R., Edwards, C., Bryniarski, C. A., Popescu, G. & Goddard, L. L., Jan 1 2015, Metrology, Inspection, and Process Control for Microlithography XXIX. Sanchez, M. I. & Cain, J. P. (eds.). SPIE, 942416. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9424).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Demonstration of the first monolithically integrated selfrolled-up tube based vertical photonic coupler

Yu, X., Arbabi, E., Goddard, L. L., Li, X. & Chen, X., May 4 2015, CLEO: Science and Innovations, CLEO-SI 2015. Optical Society of America (OSA), 1 p. (CLEO: Science and Innovations, CLEO-SI 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Demonstration of the first monolithically integrated self-rolled-up tube based vertical photonic coupler

Yu, X., Arbabi, E., Goddard, L. L., Li, X. & Chen, X., Aug 10 2015, 2015 Conference on Lasers and Electro-Optics, CLEO 2015. Institute of Electrical and Electronics Engineers Inc., 7183720. (Conference on Lasers and Electro-Optics Europe - Technical Digest; vol. 2015-August).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fabrication of gray-scale semiconductor structures with dynamic digital projection photochemical etching

Wang, K., Edwards, C., Srivastava, S. N. & Goddard, L. L., May 4 2015, CLEO: Science and Innovations, CLEO-SI 2015. Optical Society of America (OSA), 1 p. (CLEO: Science and Innovations, CLEO-SI 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fabrication of gray-scale semiconductor structures with dynamic digital projection photochemical etching

Wang, K., Edwards, C., Srivastava, S. N. & Goddard, L. L., Aug 10 2015, 2015 Conference on Lasers and Electro-Optics, CLEO 2015. Institute of Electrical and Electronics Engineers Inc., 7184024. (Conference on Lasers and Electro-Optics Europe - Technical Digest; vol. 2015-August).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Halo-free quantitative phase imaging with partially coherent light

Nguyen, T. H., Majeed, H., Edwards, C. A., Do, M. N., Goddard, L. L. & Popescu, G., Jan 1 2015, Quantitative Phase Imaging. Park, Y. & Popescu, G. (eds.). SPIE, 93360N. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; vol. 9336).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

In-situ measurements of nanoscale phenomena using diffraction phase microscopy

Edwards, C., McKeown, S. J., Hwang, S. W., Froeter, P. J., Li, X., Rogers, J. A., Popescu, G. & Goddard, L. L., Jan 1 2015, Quantitative Phase Imaging. Park, Y. & Popescu, G. (eds.). SPIE, 93361K. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; vol. 9336).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Microfluidic device fabrication utilizing virtual masks and photochemical etching

Edwards, L. D., Wang, K., Edwards, C., Yu, X., Srivastava, S. N., Liu, G. L. & Goddard, L. L., Jan 1 2015, Proceedings of Frontiers in Optics 2015, FIO 2015. OSA - The Optical Society, (Proceedings of Frontiers in Optics 2015, FIO 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Monolithically integrated self-rolled-up tube based vertical coupler with planar waveguide - a new 3D photonic integration scheme

Yu, X., Arbabi, E., Goddard, L. L., Li, X. & Chen, X., Jan 1 2015, Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2015. Optical Society of America (OSA), p. 371p IT2A.5. (Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Monolithic integration of the self-rolled-up vertical SiNx ring resonator and the ridge waveguide

Yu, X., Arbabi, E., Goddard, L. L., Li, X. & Chen, X., Nov 9 2015, 2015 IEEE Photonics Conference, IPC 2015. Institute of Electrical and Electronics Engineers Inc., p. 486-487 2 p. 7323688. (2015 IEEE Photonics Conference, IPC 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Phase correction in low coherence diffraction phase microscopy using the optical transfer function

Edwards, C., Popescu, G. & Goddard, L. L., Jan 1 2015, Quantitative Phase Imaging. Park, Y. & Popescu, G. (eds.). SPIE, 933610. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; vol. 9336).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Quantitative phase imaging with programmable illumination

Kim, T., Edwards, C., Goddard, L. L. & Popescu, G., Jan 1 2015, Quantitative Phase Imaging. Park, Y. & Popescu, G. (eds.). SPIE, 93361F. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; vol. 9336).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Quantitative phase-shifting DIC using programmable spatial light modulators

Nguyen, T. H., Edwards, C., Goddard, L. L. & Popescu, G., Jan 1 2015, Quantitative Phase Imaging. Park, Y. & Popescu, G. (eds.). SPIE, 93360P. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; vol. 9336).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Semiconductor defect metrology using laser-based quantitative phase imaging

Zhou, R., Edwards, C., Popescu, G. & Goddard, L. L., Jan 1 2015, Quantitative Phase Imaging. Park, Y. & Popescu, G. (eds.). SPIE, 93361I. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; vol. 9336).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

White-light interferometric microscopy for wafer defect inspection

Zhou, R., Edwards, C., Bryniarski, C., Dallmann, M. F., Popescu, G. & Goddard, L. L., Jan 1 2015, Quantitative Phase Imaging. Park, Y. & Popescu, G. (eds.). SPIE, 93362P. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; vol. 9336).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2014

9nm node wafer defect inspection using visible light

Zhou, R., Edwards, C., Popescu, G. & Goddard, L. L., Jan 1 2014, Metrology, Inspection, and Process Control for Microlithography XXVIII. SPIE, 905017. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9050).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Characterizing microdroplet evaporation using diffraction phase microscopy

Edwards, C., Arbabi, A., Bhaduri, B., Ganti, R., Yunker, P. J., Yodh, A. G., Popescu, G. & Goddard, L. L., Dec 22 2014, 2014 IEEE Photonics Conference, IPC 2014. Institute of Electrical and Electronics Engineers Inc., p. 178-179 2 p. 6995306. (2014 IEEE Photonics Conference, IPC 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fabrication of diffractive optical elements with digital projection photochemical etching

Edwards, C., Wang, K., Griffin, B. G., Zhou, R., Bhaduri, B., Popescu, G. & Goddard, L. L., Jan 1 2014, CLEO: Science and Innovations, CLEO_SI 2014. Optical Society of American (OSA), (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Image formation and halo removal in diffraction phase microscopy with partially coherent illumination

Edwards, C., Nguyen, T. H., Popescu, G. & Goddard, L. L., Oct 14 2014, Frontiers in Optics, FiO 2014. Optical Society of America (OSA), (Frontiers in Optics, FiO 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Inverse scattering solutions using holographic data

Zhou, R., Kim, T., Goddard, L. L. & Popescu, G., Jan 1 2014, Imaging and Applied Optics - Digital Holography and Three-Dimensional Imaging, DH 2014. Optical Society of American (OSA), (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Reflection-based diffraction phase microscopy using broadband illumination

Edwards, C., Bhaduri, B., Popescu, G. & Goddard, L. L., Oct 14 2014, Frontiers in Optics, FiO 2014. Optical Society of America (OSA), (Frontiers in Optics, FiO 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

The unperturbed structure in the coupled mode theory of waveguide gratings

Kamali, S. M., Arbabi, E. & Goddard, L. L., Dec 22 2014, 2014 IEEE Photonics Conference, IPC 2014. Institute of Electrical and Electronics Engineers Inc., p. 611-612 2 p. 6995288. (2014 IEEE Photonics Conference, IPC 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Wide-field diffraction phase microscope for precision metrology

Rajshekhar, G., Bhaduri, B., Edwards, C., Zhou, R., Goddard, L. L. & Popescu, G., Jan 1 2014, Imaging and Applied Optics - Digital Holography and Three-Dimensional Imaging, DH 2014. Optical Society of American (OSA)

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2013

22 nm node wafer inspection using diffraction phase microscopy and image post-processing

Zhou, R., Popescu, G. & Goddard, L. L., Jun 10 2013, Metrology, Inspection, and Process Control for Microlithography XXVII. 86810G. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8681).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

An active-passive monolithic integration platform with low loss passive section

Arbabi, A., Griffin, B. G. & Goddard, L. L., Dec 1 2013, 2013 IEEE Photonics Conference, IPC 2013. p. 111-112 2 p. 6656396. (2013 IEEE Photonics Conference, IPC 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Finding defects in a 22 nm node wafer with visible light

Zhou, R., Popescu, G. & Goddard, L. L., Nov 18 2013, CLEO: Science and Innovations, CLEO_SI 2013. (CLEO: Science and Innovations, CLEO_SI 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Finding defects in a 22 nm node wafer with visible light

Zhou, R., Popescu, G. & Goddard, L. L., Jan 1 2013, 2013 Conference on Lasers and Electro-Optics, CLEO 2013. IEEE Computer Society, 6832945. (2013 Conference on Lasers and Electro-Optics, CLEO 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Functionalized distributed feedback lasers for hydrogen sensing applications

Griffin, B. G., Arbabi, A. & Goddard, L. L., Dec 1 2013, 2013 IEEE Photonics Conference, IPC 2013. p. 610-611 2 p. 6656442. (2013 IEEE Photonics Conference, IPC 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Grating assisted mode coupling in microring resonators

Arbabi, A. & Goddard, L. L., Dec 1 2013, 2013 IEEE Photonics Conference, IPC 2013. p. 434-435 2 p. 6656623. (2013 IEEE Photonics Conference, IPC 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Observing hydrogen induced deformations in palladium thin-films

Edwards, C., McKeown, S. J., Zhou, J., Popescu, G. & Goddard, L. L., Dec 1 2013, 2013 IEEE Photonics Conference, IPC 2013. p. 612-613 2 p. 6656443. (2013 IEEE Photonics Conference, IPC 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution