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Research Output 2000 2019

2015

Fabrication of gray-scale semiconductor structures with dynamic digital projection photochemical etching

Wang, K., Edwards, C., Srivastava, S. N. & Goddard, L. L., May 4 2015, CLEO: Science and Innovations, CLEO-SI 2015. Optical Society of America (OSA), 1 p. (CLEO: Science and Innovations, CLEO-SI 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

gray scale
pyramids
Etching
projection
etching

Fabrication of gray-scale semiconductor structures with dynamic digital projection photochemical etching

Wang, K., Edwards, C., Srivastava, S. N. & Goddard, L. L., Aug 10 2015, 2015 Conference on Lasers and Electro-Optics, CLEO 2015. Institute of Electrical and Electronics Engineers Inc., 7184024. (Conference on Lasers and Electro-Optics Europe - Technical Digest; vol. 2015-August).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

gray scale
pyramids
Etching
projection
etching

Grating integrated single mode microring laser

Arbabi, A., Kamali, S. M., Arbabi, E., Griffin, B. G. & Goddard, L. L., Feb 23 2015, In : Optics Express. 23, 4, p. 5335-5347 13 p.

Research output: Contribution to journalArticle

laser modes
lasing
gratings
lasers
footprints

Halo-free quantitative phase imaging with partially coherent light

Nguyen, T. H., Majeed, H., Edwards, C. A., Do, M. N., Goddard, L. L. & Popescu, G., Jan 1 2015, Quantitative Phase Imaging. Park, Y. & Popescu, G. (eds.). SPIE, 93360N. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; vol. 9336).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Epidemiologic Effect Modifiers
coherent light
Lighting
halos
Imaging techniques

Hydrogen detection using a single palladium nano-aperture on a fiber tip

McKeown, S. J. & Goddard, L. L., Jan 1 2015, In : Springer Series in Surface Sciences. 56, p. 181-208 28 p.

Research output: Contribution to journalArticle

Palladium
Hydrogen
Fibers
Sensors
Fiber optics

In-situ measurements of nanoscale phenomena using diffraction phase microscopy

Edwards, C., McKeown, S. J., Hwang, S. W., Froeter, P. J., Li, X., Rogers, J. A., Popescu, G. & Goddard, L. L., Jan 1 2015, Quantitative Phase Imaging. Park, Y. & Popescu, G. (eds.). SPIE, 93361K. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; vol. 9336).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Semiconductors
Palladium
in situ measurement
Noise
Microscopy

Measuring the Nonuniform Evaporation Dynamics of Sprayed Sessile Microdroplets with Quantitative Phase Imaging

Edwards, C., Arbabi, A., Bhaduri, B., Wang, X., Ganti, R., Yunker, P. J., Yodh, A. G., Popescu, G. & Goddard, L. L., Oct 13 2015, In : Langmuir. 31, 40, p. 11020-11032 13 p.

Research output: Contribution to journalArticle

Evaporation
evaporation
Imaging techniques
evaporation rate
liquid-solid interfaces

Microfluidic device fabrication utilizing virtual masks and photochemical etching

Edwards, L. D., Wang, K., Edwards, C., Yu, X., Srivastava, S. N., Liu, G. L. & Goddard, L. L., Jan 1 2015, Proceedings of Frontiers in Optics 2015, FIO 2015. OSA - The Optical Society, (Proceedings of Frontiers in Optics 2015, FIO 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

microfluidic devices
Microfluidics
Masks
Etching
masks

Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration

Yu, X., Arbabi, E., Goddard, L. L., Li, X. & Chen, X., Jul 20 2015, In : Applied Physics Letters. 107, 3, 031102.

Research output: Contribution to journalArticle

couplers
ridges
photonics
waveguides
extinction

Monolithically integrated self-rolled-up tube based vertical coupler with planar waveguide - a new 3D photonic integration scheme

Yu, X., Arbabi, E., Goddard, L. L., Li, X. & Chen, X., Jan 1 2015, Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2015. Optical Society of America (OSA), p. 371p IT2A.5. (Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

couplers
ridges
photonics
tubes
waveguides

Monolithic integration of the self-rolled-up vertical SiNx ring resonator and the ridge waveguide

Yu, X., Arbabi, E., Goddard, L. L., Li, X. & Chen, X., Nov 9 2015, 2015 IEEE Photonics Conference, IPC 2015. Institute of Electrical and Electronics Engineers Inc., p. 486-487 2 p. 7323688. (2015 IEEE Photonics Conference, IPC 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ridge waveguides
Resonators

Phase correction in low coherence diffraction phase microscopy using the optical transfer function

Edwards, C., Popescu, G. & Goddard, L. L., Jan 1 2015, Quantitative Phase Imaging. Park, Y. & Popescu, G. (eds.). SPIE, 933610. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; vol. 9336).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

optical transfer function
Optical transfer function
Lighting
transfer functions
Transfer functions

Quantitative phase imaging with programmable illumination

Kim, T., Edwards, C., Goddard, L. L. & Popescu, G., Jan 1 2015, Quantitative Phase Imaging. Park, Y. & Popescu, G. (eds.). SPIE, 93361F. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; vol. 9336).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lighting
Microscopic examination
illumination
Light sources
microscopy

Quantitative phase-shifting DIC using programmable spatial light modulators

Nguyen, T. H., Edwards, C., Goddard, L. L. & Popescu, G., Jan 1 2015, Quantitative Phase Imaging. Park, Y. & Popescu, G. (eds.). SPIE, 93360P. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; vol. 9336).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Polystyrenes
light modulators
Lighting
beads
halos

Semiconductor defect metrology using laser-based quantitative phase imaging

Zhou, R., Edwards, C., Popescu, G. & Goddard, L. L., Jan 1 2015, Quantitative Phase Imaging. Park, Y. & Popescu, G. (eds.). SPIE, 93361I. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; vol. 9336).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Semiconductors
Crystal defects
Silicon
Silicon wafers
metrology

White-light interferometric microscopy for wafer defect inspection

Zhou, R., Edwards, C., Bryniarski, C., Dallmann, M. F., Popescu, G. & Goddard, L. L., Jan 1 2015, Quantitative Phase Imaging. Park, Y. & Popescu, G. (eds.). SPIE, 93362P. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; vol. 9336).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Optical microscopy
inspection
Microscopy
Inspection
wafers
2014

9nm node wafer defect inspection using visible light

Zhou, R., Edwards, C., Popescu, G. & Goddard, L. L., Jan 1 2014, Metrology, Inspection, and Process Control for Microlithography XXVIII. SPIE, 905017. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9050).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Defect Inspection
Wafer
inspection
Defects
Inspection

Breakthroughs in Photonics 2013: Quantitative Phase Imaging: Metrology Meets Biology

Kim, T., Zhou, R., Goddard, L. L. & Popescu, G., Apr 1 2014, In : IEEE Photonics Journal. 6, 2, 0700909.

Research output: Contribution to journalReview article

biology
Photonics
metrology
photonics
Imaging techniques

Characterizing microdroplet evaporation using diffraction phase microscopy

Edwards, C., Arbabi, A., Bhaduri, B., Ganti, R., Yunker, P. J., Yodh, A. G., Popescu, G. & Goddard, L. L., Dec 22 2014, 2014 IEEE Photonics Conference, IPC 2014. Institute of Electrical and Electronics Engineers Inc., p. 178-179 2 p. 6995306. (2014 IEEE Photonics Conference, IPC 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Topography
Microscopic examination
topography
Evaporation
Diffraction

Diffraction phase microscopy: Principles and applications in materials and life sciences

Bhaduri, B., Edwards, C., Pham, H., Zhou, R., Nguyen, T. H., Goddard, L. L. & Popescu, G., 2014, In : Advances in Optics and Photonics. 6, 1, p. 57-119 63 p.

Research output: Contribution to journalArticle

life sciences
materials science
microscopy
diffraction
etching

Diffraction phase microscopy: Monitoring nanoscale dynamics in materials science [invited]

Edwards, C., Zhou, R., Hwang, S. W., McKeown, S. J., Wang, K., Bhaduri, B., Ganti, R., Yunker, P. J., Yodh, A. G., Rogers, J. A., Goddard, L. L. & Popescu, G., Sep 20 2014, In : Applied Optics. 53, 27, p. G33-G43

Research output: Contribution to journalArticle

Materials science
materials science
imaging techniques
Microscopic examination
Diffraction

Dissolution chemistry and biocompatibility of single-crystalline silicon nanomembranes and associated materials for transient electronics

Hwang, S. W., Park, G., Edwards, C., Corbin, E. A., Kang, S. K., Cheng, H., Song, J. K., Kim, J. H., Yu, S., Ng, J., Lee, J. E., Kim, J., Yee, C., Bhaduri, B., Omennetto, F. G., Huang, Y., Bashir, R., Goddard, L., Popescu, G., Lee, K. M. & 1 others, Rogers, J. A., Jun 24 2014, In : ACS Nano. 8, 6, p. 5843-5851 9 p.

Research output: Contribution to journalArticle

biocompatibility
Silicon
Biocompatibility
dissolving
Dissolution

Effects of spatial coherence in diffraction phase microscopy

Edwards, C., Bhaduri, B., Nguyen, T., Griffin, B. G., Pham, H., Kim, T., Popescu, G. & Goddard, L. L., Mar 10 2014, In : Optics Express. 22, 5, p. 5133-5146 14 p.

Research output: Contribution to journalArticle

artifacts
spatial filtering
microscopy
halos
diffraction

Epi-illumination diffraction phase microscopy with white light

Edwards, C., Bhaduri, B., Griffin, B. G., Goddard, L. L. & Popescu, G., Jan 1 2014, In : Optics Letters. 39, 21, p. 6162-6165 4 p.

Research output: Contribution to journalArticle

illumination
microscopy
tradeoffs
diffraction
shot

Fabrication of diffractive optical elements with digital projection photochemical etching

Edwards, C., Wang, K., Griffin, B. G., Zhou, R., Bhaduri, B., Popescu, G. & Goddard, L. L., Jan 1 2014, CLEO: Science and Innovations, CLEO_SI 2014. Optical Society of American (OSA), (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

digital techniques
Diffractive optical elements
gray scale
Diffraction gratings
Etching

Fabrication of diffractive optical elements with digital projection photochemical etching

Edwards, C., Wang, K., Griffin, B. G., Zhou, R., Bhaduri, B., Popescu, G. & Goddard, L. L., Jan 1 2014.

Research output: Contribution to conferencePaper

digital techniques
Diffractive optical elements
gray scale
Diffraction gratings
Etching

Fast and accurate finite element analysis of large-scale three-dimensional photonic devices with a robust domain decomposition method

Xue, M. F., Kang, Y. M., Arbabi, A., McKeown, S. J., Goddard, L. L. & Jin, J. M., Feb 24 2014, In : Optics Express. 22, 4, p. 4437-4452 16 p.

Research output: Contribution to journalArticle

photonics
decomposition
simulation
distributed memory
memory (computers)

Hybrid whispering gallery mode/plasmonic chain ring resonators for biosensing

Arbabi, E., Kamali, S. M., Arnold, S. & Goddard, L. L., Dec 8 2014, In : Applied Physics Letters. 105, 23, 231107.

Research output: Contribution to journalArticle

whispering gallery modes
resonators
rings
antinodes
silicon dioxide

Image formation and halo removal in diffraction phase microscopy with partially coherent illumination

Edwards, C., Nguyen, T. H., Popescu, G. & Goddard, L. L., Oct 14 2014, Frontiers in Optics, FiO 2014. Optical Society of America (OSA), (Frontiers in Optics, FiO 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Imaging systems
Topography
halos
Microscopic examination
Image processing

In situ measurements of the axial expansion of palladium microdisks during hydrogen exposure using diffraction phase microscopy

Edwards, C., McKeown, S. J., Zhou, J., Popescu, G. & Goddard, L. L., Jan 1 2014, In : Optical Materials Express. 4, 12, p. 2559-2564 6 p.

Research output: Contribution to journalArticle

Palladium
Hydrogen
Microscopic examination
Diffraction
Lighting

Inverse scattering solutions using holographic data

Zhou, R., Kim, T., Goddard, L. L. & Popescu, G., Jan 1 2014, Imaging and Applied Optics - Digital Holography and Three-Dimensional Imaging, DH 2014. Optical Society of American (OSA), (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

inverse scattering
Lighting
illumination
Scattering
Imaging techniques

Inverse scattering solutions using low-coherence light

Zhou, R., Kim, T., Goddard, L. L. & Popescu, G., Aug 1 2014, In : Optics Letters. 39, 15, p. 4494-4497 4 p.

Research output: Contribution to journalArticle

inverse scattering
tomography
vector spaces
diffraction
interferometry

Modal expansion approach for accurately computing resonant modes in a high-Q optical resonator

Kang, Y. M., Xue, M., Arbabi, A., Jin, J. & Goddard, L. L., Feb 1 2014, In : Microwave and Optical Technology Letters. 56, 2, p. 278-284 7 p.

Research output: Contribution to journalArticle

Optical resonators
optical resonators
linear systems
Linear systems
Q factors

Nanoscale topography and spatial light modulator characterization using wide-field quantitative phase imaging

Rajshekhar, G., Bhaduri, B., Edwards, C., Zhou, R., Goddard, L. L. & Popescu, G., Feb 10 2014, In : Optics Express. 22, 3, p. 3432-3438 7 p.

Research output: Contribution to journalArticle

light modulators
topography
shot
field of view
stabilization

Quantitative phase imaging with partially coherent illumination

Nguyen, T. H., Edwards, C., Goddard, L. L. & Popescu, G., Oct 1 2014, In : Optics Letters. 39, 19, p. 5511-5514 4 p.

Research output: Contribution to journalArticle

illumination
halos
phase contrast
illuminating
artifacts

Reflection-based diffraction phase microscopy using broadband illumination

Edwards, C., Bhaduri, B., Popescu, G. & Goddard, L. L., Oct 14 2014, Frontiers in Optics, FiO 2014. Optical Society of America (OSA), (Frontiers in Optics, FiO 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

imaging techniques
halos
Microscopic examination
Diffraction
Lighting

The unperturbed structure in the coupled mode theory of waveguide gratings

Kamali, S. M., Arbabi, E. & Goddard, L. L., Dec 22 2014, 2014 IEEE Photonics Conference, IPC 2014. Institute of Electrical and Electronics Engineers Inc., p. 611-612 2 p. 6995288. (2014 IEEE Photonics Conference, IPC 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

coupled modes
Waveguides
gratings
waveguides
Distributed Bragg reflectors

White-light diffraction tomography of unlabelled live cells

Kim, T., Zhou, R., Mir, M., Babacan, S. D., Carney, P. S., Goddard, L. L. & Popescu, G., Mar 1 2014, In : Nature Photonics. 8, 3, p. 256-263 8 p.

Research output: Contribution to journalArticle

Tomography
tomography
Diffraction
cells
diffraction

Wide-field diffraction phase microscope for precision metrology

Rajshekhar, G., Bhaduri, B., Edwards, C., Zhou, R., Goddard, L. L. & Popescu, G., Jan 1 2014, Imaging and Applied Optics - Digital Holography and Three-Dimensional Imaging, DH 2014. Optical Society of American (OSA)

Research output: Chapter in Book/Report/Conference proceedingConference contribution

metrology
shot
field of view
Microscopes
Diffraction
2013

22 nm node wafer inspection using diffraction phase microscopy and image post-processing

Zhou, R., Popescu, G. & Goddard, L. L., Jun 10 2013, Metrology, Inspection, and Process Control for Microlithography XXVII. 86810G. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8681).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Post-processing
Microscopy
Wafer
Inspection
Diffraction

An active-passive monolithic integration platform with low loss passive section

Arbabi, A., Griffin, B. G. & Goddard, L. L., Dec 1 2013, 2013 IEEE Photonics Conference, IPC 2013. p. 111-112 2 p. 6656396. (2013 IEEE Photonics Conference, IPC 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Semiconductor quantum wells
reflectors
platforms
quantum wells
Lasers

Demonstration of enhanced side-mode suppression in metal-filled photonic crystal vertical cavity lasers

Griffin, B. G., Arbabi, A., Tan, M. P., Kasten, A. M., Choquette, K. D. & Goddard, L. L., Jun 1 2013, In : Optics Letters. 38, 11, p. 1936-1938 3 p.

Research output: Contribution to journalArticle

laser cavities
retarding
photonics
surface emitting lasers
metals

Detecting 20 nm wide defects in large area nanopatterns using optical interferometric microscopy

Zhou, R., Edwards, C., Arbabi, A., Popescu, G. & Goddard, L. L., Aug 14 2013, In : Nano Letters. 13, 8, p. 3716-3721 6 p.

Research output: Contribution to journalArticle

Optical microscopy
microscopy
Defects
defects
Lasers

Deterministic signal associated with a random field

Kim, T., Zhu, R., Nguyen, T. H., Zhou, R., Edwards, C., Goddard, L. L. & Popescu, G., Sep 9 2013, In : Optics Express. 21, 18, p. 20806-20820 15 p.

Research output: Contribution to journalArticle

statistics
wave equations
power spectra
plane waves
wolves

Digital projection photochemical etching defines gray-scale features

Edwards, C., Wang, K., Zhou, R., Bhaduri, B., Popescu, G. & Goddard, L. L., Jun 3 2013, In : Optics Express. 21, 11, p. 13547-13554 8 p.

Research output: Contribution to journalArticle

gray scale
projection
etching
projectors
irradiance

Engineering the sensitivity and response time of edge-emitting laser hydrogen sensors

Griffin, B. G., Arbabi, A. & Goddard, L. L., Jul 31 2013, In : IEEE Sensors Journal. 13, 8, p. 3098-3105 8 p., 6509439.

Research output: Contribution to journalArticle

Ridge waveguides
Palladium
palladium
ridges
engineering

Fast phase reconstruction in white light diffraction phase microscopy

Pham, H. V., Edwards, C., Goddard, L. L. & Popescu, G., Jan 1 2013, In : Applied Optics. 52, 1, p. A97-A101

Research output: Contribution to journalArticle

Interferometry
Microscopic examination
interferometry
Diffraction
microscopy

Finding defects in a 22 nm node wafer with visible light

Zhou, R., Popescu, G. & Goddard, L. L., Nov 18 2013, CLEO: Science and Innovations, CLEO_SI 2013. (CLEO: Science and Innovations, CLEO_SI 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Diffraction
wafers
Defects
defects
diffraction

Finding defects in a 22 nm node wafer with visible light

Zhou, R., Popescu, G. & Goddard, L. L., Jan 1 2013, 2013 Conference on Lasers and Electro-Optics, CLEO 2013. IEEE Computer Society, 6832945. (2013 Conference on Lasers and Electro-Optics, CLEO 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Diffraction
Defects
Microscopic examination

Functionalized distributed feedback lasers for hydrogen sensing applications

Griffin, B. G., Arbabi, A. & Goddard, L. L., Dec 1 2013, 2013 IEEE Photonics Conference, IPC 2013. p. 610-611 2 p. 6656442. (2013 IEEE Photonics Conference, IPC 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Distributed feedback lasers
distributed feedback lasers
Palladium
palladium
Hydrogen