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Research Output 2000 2019

2019
Scattering
Distributed computer systems
Computational efficiency
Boundary conditions
Finite element method

Efficient numerical modeling of scattering by electrically large objects in a stratified medium for imaging applications

Zhang, K., Goddard, L. L. & Jin, J. M., Sep 2019, Proceedings of the 2019 21st International Conference on Electromagnetics in Advanced Applications, ICEAA 2019. Institute of Electrical and Electronics Engineers Inc., 1 p. 8879405. (Proceedings of the 2019 21st International Conference on Electromagnetics in Advanced Applications, ICEAA 2019).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Numerical Modeling
scattering
Imaging
Scattering
Green function

Enhanced Environmental Scanning Electron Microscopy Using Phase Reconstruction and Its Application in Condensation

Zhang, L., Zhu, J., Wilke, K. L., Xu, Z., Zhao, L., Lu, Z., Goddard, L. L. & Wang, E. N., Feb 26 2019, In : ACS Nano. 13, 2, p. 1953-1960 8 p.

Research output: Contribution to journalArticle

Condensation
condensation
Scanning electron microscopy
scanning electron microscopy
Imaging techniques

High performance fully etched isotropic microring resonators in thin-film lithium niobate on insulator platform

Bahadori, M., Yang, Y., Goddard, L. L. & Gong, S., Jul 22 2019, In : Optics Express. 27, 15, p. 22025-22039 15 p.

Research output: Contribution to journalArticle

lithium niobates
extinction
platforms
resonators
insulators

High-performance integrated photonics in thin film lithium niobate platform

Bahadori, M., Kar, A., Yang, Y., Lavasani, A., Goddard, L. L. & Gong, S., Jan 1 2019, CLEO: Applications and Technology, CLEO_AT 2019. OSA - The Optical Society, (Optics InfoBase Conference Papers; vol. Part F127-CLEO_AT 2019).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photonic devices
Photonics
Lithium
Thin films
lithium niobate

High-Performance Integrated Photonics in Thin Film Lithium Niobate Platform

Bahadori, M., Kar, A., Yang, Y., Lavasani, A., Goddard, L. L. & Gong, S., May 2019, 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 8750640. (2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Optics and Photonics
Q factor
Photonic devices
lithium niobates
lithium

Optical inspection of nanoscale structures using a novel machine learning based synthetic image generation algorithm

Purandare, S., Zhu, J., Zhou, R., Popescu, G., Schwing, A. G. & Goddard, L. L., Jan 1 2019, In : Optics Express. 27, 13, p. 17743-17762 20 p.

Research output: Contribution to journalArticle

machine learning
inspection
defects
education
wafers

Realization of alignment-tolerant grating couplers for z-cut thin-film lithium niobate

Kar, A., Bahadori, M., Gong, S. & Goddard, L. L., Jan 1 2019, In : Optics Express. 27, 11, p. 15856-15867 12 p.

Research output: Contribution to journalArticle

lithium niobates
misalignment
couplers
alignment
gratings

Regularized phase reconstruction for sensing deep subwavelength perturbations on large-scale wafers

Zhu, J. & Goddard, L. L., Jan 1 2019, CLEO: Applications and Technology, CLEO_AT 2019. OSA - The Optical Society, (Optics InfoBase Conference Papers; vol. Part F127-CLEO_AT 2019).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nanostructures
Inspection
Defects

Regularized Phase Reconstruction for Sensing Deep Subwavelength Perturbations on Large-Scale Wafers

Zhu, J. & Goddard, L. L., May 2019, 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 8749878. (2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nanostructures
advanced technology
defect
Inspection
perturbation

Regularized pseudo-phase imaging for inspecting and sensing nanoscale features

Zhu, J., Zhou, R., Zhang, L., Ge, B., Luo, C. & Goddard, L. L., Jan 1 2019, In : Optics Express. 27, 5, p. 6719-6733 15 p.

Research output: Contribution to journalArticle

signal to noise ratios
Rayleigh scattering
hardware
microscopes
microscopy

Sensing Sub-10 nm Wide Perturbations in Background Nanopatterns Using Optical Pseudoelectrodynamics Microscopy (OPEM)

Zhu, J., Liu, Y., Yu, X., Zhou, R., Jin, J. M. & Goddard, L. L., Aug 14 2019, In : Nano letters. 19, 8, p. 5347-5355 9 p.

Research output: Contribution to journalArticle

Optical microscopy
microscopy
perturbation
Rayleigh scattering
Electrodynamics

Voxelized topology optimization for fabrication-compatible inverse design of 3D photonic devices

Udupa, A., Zhu, J. & Goddard, L. L., Jul 22 2019, In : Optics Express. 27, 15, p. 21988-21998 11 p.

Research output: Contribution to journalArticle

topology
photonics
fabrication
optimization
lithography
2018

Controlling photonic nanojets: From the standpoint of eigenmodes

Zhu, J. & Goddard, L. L., Jan 2018, In : IEEE Photonics Technology Letters. 30, 1, p. 75-78 4 p.

Research output: Contribution to journalArticle

Photonics
photonics
matrix theory
Photolithography
engineers

Defect inspection using a time-domain mode decomposition technique

Zhu, J. & Goddard, L. L., Jan 1 2018, Metrology, Inspection, and Process Control for Microlithography XXXII. Ukraintsev, V. A. & Adan, O. (eds.). SPIE, 1058508. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10585).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Defect Inspection
Decomposition Techniques
Time Domain
inspection
Defects

Large-Scale Scattering Analysis of Arbitrary Objects in a Stratified Medium

Zhang, K., Goddard, L. L. & Jin, J., Jan 1 2018, 2018 IEEE Antennas and Propagation Society International Symposium and USNC/URSI National Radio Science Meeting, APSURSI 2018 - Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 1313-1314 2 p. 8608687. (2018 IEEE Antennas and Propagation Society International Symposium and USNC/URSI National Radio Science Meeting, APSURSI 2018 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Boundary conditions
Scattering
boundary conditions
tearing
scattering
ridges
tuning
photonics
waveguides
wavelengths

Plasmonic Metal-Insulator-Metal Capped Polymer Nanopillars for SERS Analysis of Protein-Protein Interactions

Hackett, L. P., Li, W., Ameen, A., Goddard, L. L. & Liu, G. L., Mar 22 2018, In : Journal of Physical Chemistry C. 122, 11, p. 6255-6266 12 p.

Research output: Contribution to journalArticle

Polymers
Metals
insulators
proteins
Proteins

Selective area formation of arsenic oxide-rich octahedral microcrystals during photochemical etching of n-type GaAs

Udupa, A., Yu, X., Edwards, L. & Goddard, L. L., Feb 1 2018, In : Optical Materials Express. 8, 2, 313215.

Research output: Contribution to journalArticle

Microcrystals
Arsenic
Oxides
Etching
Lighting

Spectrometer-Free Plasmonic Biosensing with Metal-Insulator-Metal Nanocup Arrays

Hackett, L. P., Ameen, A., Li, W., Dar, F. K., Goddard, L. L. & Liu, G. L., Feb 23 2018, In : ACS Sensors. 3, 2, p. 290-298 9 p.

Research output: Contribution to journalArticle

Spectrometers
Metals
insulators
spectrometers
Gold
2017

A computational study of a hybrid plasmonic-microring for label-free detection

Braswell, S., Wenner, B., Allen, M., Allen, J., Ephrem, A. & Goddard, L. L., Jan 23 2017, 2016 IEEE Photonics Conference, IPC 2016. Institute of Electrical and Electronics Engineers Inc., 7831148. (2016 IEEE Photonics Conference, IPC 2016).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Labels
Resonators
Molecules
Sensors
resonators

Characterization of lithium niobate microdisk resonators with grating couplers

Kar, A., Gao, A., Goddard, L. L. & Gong, S., Nov 20 2017, 30th Annual Conference of the IEEE Photonics Society, IPC 2017. Institute of Electrical and Electronics Engineers Inc., p. 221-222 2 p. (30th Annual Conference of the IEEE Photonics Society, IPC 2017; vol. 2017-January).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

lithium niobates
couplers
Q factors
Resonators
Lithium

Diffraction phase microscopy imaging and multi-physics modeling of the nanoscale thermal expansion of a suspended resistor

Wang, X., Lu, T., Yu, X., Jin, J. M. & Goddard, L. L., Dec 1 2017, In : Scientific reports. 7, 1, 4602.

Research output: Contribution to journalArticle

Physics
Microscopy
Hot Temperature
Lighting
Temperature

Enhanced parallel bridge defect inspection using a metalens assisted off-focus scanning imaging

Zhu, J., Purandare, S. & Goddard, L. L., Oct 25 2017, 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 1-2 2 p. (2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings; vol. 2017-January).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

inspection
Signal to noise ratio
near fields
Microscopes
signal to noise ratios

Focusing properties of a cascaded asymmetric microstructure under Gaussian beam illumination

Zhu, J. & Goddard, L. L., Oct 25 2017, 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 1-2 2 p. (2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings; vol. 2017-January).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Gaussian beams
Lighting
illumination
microstructure
Microstructure

Label-free cell-substrate adhesion imaging on plasmonic nanocup arrays

Hackett, L. P., Seo, S., Kim, S., Goddard, L. L. & Liu, G. L., Feb 1 2017, In : Biomedical Optics Express. 8, 2, p. 1139-1151 13 p.

Research output: Contribution to journalArticle

Cell Adhesion
Refractometry
adhesion
cells
Equipment and Supplies

Low-cost electroluminescence imaging for automated defect characterization in photovoltaic modules

Bazzoli, M., Silverman, T. J. & Goddard, L. L., Nov 20 2017, 30th Annual Conference of the IEEE Photonics Society, IPC 2017. Institute of Electrical and Electronics Engineers Inc., p. 481-482 2 p. (30th Annual Conference of the IEEE Photonics Society, IPC 2017; vol. 2017-January).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Electroluminescence
electroluminescence
modules
Imaging techniques
Defects

Monolithic integration of vertical SiNx microrings on a ridge waveguide to achieve multi-channel photonic coupling

Yu, X., Goddard, L. L., Li, X. & Chen, X., Jan 1 2017, CLEO: Science and Innovations, CLEO_SI 2017. OSA - The Optical Society, (Optics InfoBase Conference Papers; vol. Part F41-CLEO_SI 2017).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ridge waveguides
Photonics

Monolithic integration of vertical SiNx microrings on a ridge waveguide to achieve multi-channel photonic coupling

Yu, X., Goddard, L. L., Li, X. & Chen, X., Oct 25 2017, 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 1-2 2 p. (2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings; vol. 2017-January).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ridge waveguides
Photonics
ridges
photonics
waveguides

Plasmonic nanocone arrays for rapid and detailed cell lysate surface enhanced Raman spectroscopy analysis

Hackett, L. P., Goddard, L. L. & Liu, G. L., Dec 7 2017, In : Analyst. 142, 23, p. 4422-4430 9 p.

Research output: Contribution to journalArticle

Raman Spectrum Analysis
Raman spectroscopy
substrate
Substrates
Guanine

Plasmonic Sensing of Oncoproteins without Resonance Shift Using 3D Periodic Nanocavity in Nanocup Arrays

Ameen, A., Hackett, L. P., Seo, S., Dar, F. K., Gartia, M. R., Goddard, L. L. & Liu, G. L., Jun 2 2017, In : Advanced Optical Materials. 5, 11, 1601051.

Research output: Contribution to journalArticle

Oncogene Proteins
shift
Carcinoembryonic Antigen
sensors
Sensors

Realization of palladium-based optomechanical cantilever hydrogen sensor

McKeown, S. J., Wang, X., Yu, X. & Goddard, L. L., Jan 1 2017, In : Microsystems and Nanoengineering. 3, 16087.

Research output: Contribution to journalArticle

Palladium
palladium
Hydrogen
sensors
Sensors

Reflective Palladium Nanoapertures on Fiber for Wide Dynamic Range Hydrogen Sensing

McKeown, S. J. & Goddard, L. L., Mar 1 2017, In : IEEE Journal on Selected Topics in Quantum Electronics. 23, 2, 7589070.

Research output: Contribution to journalArticle

Palladium
dynamic range
palladium
apertures
Hydrogen

Theorical and numerical analysis of an all-optical delta-sigma modulator

Davoudzadeh, N., Goddard, L. L. & Sayeh, M. R., May 1 2017, In : Microwave and Optical Technology Letters. 59, 5, p. 1168-1173 6 p.

Research output: Contribution to journalArticle

Delta sigma modulation
Modulators
numerical analysis
Numerical analysis
modulators
2016

Application of measurement configuration optimization for accurate metrology of sub-wavelength dimensions in multilayer gratings using optical scatterometry

Zhu, J., Shi, Y., Goddard, L. L. & Liu, S., Sep 1 2016, In : Applied Optics. 55, 25, p. 6844-6849 6 p.

Research output: Contribution to journalArticle

Diffraction gratings
metrology
Multilayers
gratings
Wavelength

Axial confinement in the monolithic integrated self-rolled-up vertical SiNx microring resonator on a ridge waveguide

Yu, X., Goddard, L. L., Li, X. & Chen, X., Dec 16 2016, 2016 Conference on Lasers and Electro-Optics, CLEO 2016. Institute of Electrical and Electronics Engineers Inc., 7788687. (2016 Conference on Lasers and Electro-Optics, CLEO 2016).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ridge waveguides
Silicon nitride
silicon nitrides
couplers
ridges

Electromagnetic field modeling for defect detection in 7 nm node patterned wafers

Zhu, J., Zhang, K., Davoudzadeh, N., Wang, X. & Goddard, L. L., Jan 1 2016, Metrology, Inspection, and Process Control for Microlithography XXX. Sanchez, M. I. & Ukraintsev, V. A. (eds.). SPIE, 97780P. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9778).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Defect Detection
Wafer
Electromagnetic fields
Electromagnetic Fields
electromagnetic fields

Enhanced axial confinement in a monolithically integrated self-rolled-up SiN x vertical microring photonic coupler

Yu, X., Goddard, L. L., Li, X. & Chen, X., Sep 12 2016, In : Applied Physics Letters. 109, 11, 111104.

Research output: Contribution to journalArticle

couplers
photonics
S band
C band
silicon nitrides

Far-field light scattering from sub-wavelength wafer patterns using a parallel FETI-DP algorithm

Zhang, K., Zhu, J., Goddard, L. L. & Jin, J., Oct 25 2016, 2016 IEEE Antennas and Propagation Society International Symposium, APSURSI 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 2009-2010 2 p. 7696711. (2016 IEEE Antennas and Propagation Society International Symposium, APSURSI 2016 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Light scattering
far fields
light scattering
wafers
Domain decomposition methods

Generalized measurement configuration optimization for accurate reconstruction of periodic nanostructures using optical scatterometry

Zhu, J., Shi, Y., Liu, S. & Goddard, L. L., Jan 1 2016, Metrology, Inspection, and Process Control for Microlithography XXX. Sanchez, M. I. & Ukraintsev, V. A. (eds.). SPIE, 977823. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9778).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Scatterometry
Nanostructures
Configuration
optimization
Optimization

Optical clock pulse generation using thermal nonlinearity in microring resonators

Davoudzadeh, N., Arbabi, A., Zhu, J. & Goddard, L. L., Dec 16 2016, 2016 Conference on Lasers and Electro-Optics, CLEO 2016. Institute of Electrical and Electronics Engineers Inc., 7788305. (2016 Conference on Lasers and Electro-Optics, CLEO 2016).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

nonlinear feedback
Nonlinear feedback
Ring lasers
ring lasers
Fiber lasers

Parallel FETI-DP algorithm for defect detection in large-area nanopatterned wafers

Zhang, K., Goddard, L. L. & Jin, J., May 4 2016, 2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 7465398. (2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

FETI-DP
Defect Detection
Wafer
communication
wafers

Quantitative phase imaging of weakly scattering objects using partially coherent illumination

Nguyen, T. H., Edwards, C., Goddard, L. L. & Popescu, G., May 30 2016, In : Optics Express. 24, 11, p. 11683-11693 11 p.

Research output: Contribution to journalArticle

illumination
defocusing
scattering
halos
condensers

Solving inverse scattering problems in biological samples by quantitative phase imaging

Kim, T., Zhou, R., Goddard, L. L. & Popescu, G., Jan 1 2016, In : Laser and Photonics Reviews. 10, 1, p. 13-39 27 p.

Research output: Contribution to journalReview article

inverse scattering
tomography
Scattering
Imaging techniques
Tomography

Spatial control of photonic nanojets

Zhu, J. & Goddard, L. L., Dec 26 2016, In : Optics Express. 24, 26, p. 30444-30464 21 p.

Research output: Contribution to journalArticle

photonics
cascades
spherical caps
microstructure
flexibility
2015

9nm node wafer defect inspection using three-dimensional scanning, a 405nm diode laser, and a broadband source

Zhou, R., Edwards, C., Bryniarski, C. A., Popescu, G. & Goddard, L. L., Jan 1 2015, Metrology, Inspection, and Process Control for Microlithography XXIX. Sanchez, M. I. & Cain, J. P. (eds.). SPIE, 942416. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9424).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Defect Inspection
Diode Laser
Wafer
Broadband
Semiconductor lasers

A zeroth-order modification of coupled mode theory for waveguide gratings

Kamali, S. M., Arbabi, E. & Goddard, L. L., Apr 1 2015, In : IEEE Photonics Technology Letters. 27, 7, p. 790-793 4 p., 7010020.

Research output: Contribution to journalArticle

coupled modes
Waveguides
gratings
waveguides
perturbation

Demonstration of the first monolithically integrated selfrolled-up tube based vertical photonic coupler

Yu, X., Arbabi, E., Goddard, L. L., Li, X. & Chen, X., May 4 2015, CLEO: Science and Innovations, CLEO-SI 2015. Optical Society of America (OSA), 1 p. (CLEO: Science and Innovations, CLEO-SI 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ridge waveguides
Planar waveguides
Photonics
couplers
ridges

Demonstration of the first monolithically integrated self-rolled-up tube based vertical photonic coupler

Yu, X., Arbabi, E., Goddard, L. L., Li, X. & Chen, X., Aug 10 2015, 2015 Conference on Lasers and Electro-Optics, CLEO 2015. Institute of Electrical and Electronics Engineers Inc., 7183720. (Conference on Lasers and Electro-Optics Europe - Technical Digest; vol. 2015-August).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ridge waveguides
Planar waveguides
Photonics
couplers
ridges

Fabrication of gray-scale semiconductor structures with dynamic digital projection photochemical etching

Wang, K., Edwards, C., Srivastava, S. N. & Goddard, L. L., May 4 2015, CLEO: Science and Innovations, CLEO-SI 2015. Optical Society of America (OSA), 1 p. (CLEO: Science and Innovations, CLEO-SI 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

gray scale
pyramids
Etching
projection
etching