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2006

Electrode and condenser materials for plasma pinch sources

Hassanein, A., Allain, J. P., Burtseva, T., Insepov, Z., Brooks, J. N., Konkashbaev, I., Morozov, V., Sizyuk, V., Tolkach, V., Sizyuk, T., Rice, B., Safronov, V. & Bakshi, V. Feb 23 2006 EUV Sources for Lithography. SPIE, p. 915-956 42 p.

Research output: ResearchChapter