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Research Output 1996 2019

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Conference contribution
2014

Characterization of silicon photovoltaic wafers using infrared photoelasticity

Lin, T. W., Horn, G. P. & Johnson, H. T., Jan 1 2014, Residual Stress, Thermomechanics and Infrared Imaging, Hybrid Techniques and Inverse Problems, - Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics. p. 303-308 6 p. (Conference Proceedings of the Society for Experimental Mechanics Series; vol. 8).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photoelasticity
Residual stresses
Infrared radiation
Silicon
Defects
2011

Control and quantification of residual stresses in anodically bonded MEMS structures

Inzinga, R., Lin, T., Yadav, M., Johnson, H. T. & Horn, G. P., Jul 19 2011, MEMS and Nanotechnology - Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics. p. 269-273 5 p. (Conference Proceedings of the Society for Experimental Mechanics Series; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

MEMS
Residual stresses
Silicon wafers
Compressive stress
Crack initiation
2010

Anisothermal anodic bonding: A method to control global curvature and residual stress

Yadav, M., Lin, T. W., Johnson, H. T. & Horn, G. P., Dec 1 2010, Semiconductor Wafer Bonding 11: Science, Technology, and Applications - In Honor of Ulrich Gosele. 4 ed. p. 563-572 10 p. (ECS Transactions; vol. 33, no. 4).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Residual stresses
Silicon
Substrates
Temperature
Process control

Control and quantification of residual stresses in anodically bonded MEMS structures

Inzinga, R., Lin, T., Yadav, M., Johnson, H. T. & Horn, G. P., Nov 9 2010, Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2010. p. 2366-2370 5 p. (Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2010; vol. 3).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

MEMS
Residual stresses
Silicon wafers
Compressive stress
Crack initiation

Development of nonuniform residual stresses during anodic bonding

Horn, G. P., Gerbach, R., Lin, T. W., Bernach, M., Brand, S. & Johnson, H. T., Dec 1 2010, Semiconductor Wafer Bonding 11: Science, Technology, and Applications - In Honor of Ulrich Gosele. 4 ed. p. 553-562 10 p. (ECS Transactions; vol. 33, no. 4).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Residual stresses
Defects
Substrates
Inspection

Process induced stresses in cavity SOI wafers

Elkhatib, O., Makinen, J., Palokangas, M., Lin, T. W., Johnson, H. T. & Horn, G. P., Dec 1 2010, Semiconductor Wafer Bonding 11: Science, Technology, and Applications - In Honor of Ulrich Gosele. 4 ed. p. 543-552 10 p. (ECS Transactions; vol. 33, no. 4).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Residual stresses
Polariscopes
Silicon
MOS devices
Tensile stress
2009

Experimental stress mapping of etched cavity semiconductor devices

Inzinga, R., Horn, G. P. & Johnson, H. T., Dec 1 2009, Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009. p. 779-785 7 p. (Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Semiconductor devices
Wafer bonding
Residual stresses
Microfluidics
Geometry
2008

Photonic crystal laser cavities optimized by the geometric projection method

Long, C. M., Frei, W. R., Giannopoulos, A. V., Johnson, H. T. & Choquette, K. D., Jan 1 2008, Conference on Lasers and Electro-Optics, CLEO 2008. Optical Society of America, (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Laser resonators
Photonic crystals
laser cavities
Q factors
projection

Photonic crystal laser cavities optimized by the geometric projection method

Long, C. M., Frei, W. R., Giannopoulos, A. V., Johnson, H. T. & Choquette, K. D., Sep 15 2008, 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS. 4551362. (2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Laser resonators
Photonic crystals
Geometry
2007

Field intensity and localized mode pattern symmetry in photonic crystals

Xiao, D. & Johnson, H. T., Jan 1 2007, Frontiers in Optics, FiO 2007. Optical Society of America, (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Crystal symmetry
Photonic crystals
Band structure
Photonics
photonics
2000

Modeling of acoustic-structural coupling in a MEMS hydrophone

Johnson, H. T. & Prevot, L., Dec 1 2000, 2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000. Laudon, M. & Romanowicz, B. (eds.). p. 261-264 4 p. (2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hydrophones
MEMS
Acoustics
Resonators
Cavity resonators