Research output per year
Research output per year
Search results
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2023
Area selective CVD of metallic films using precursor gases and inhibitors
Abelson, J. R. (Inventor), Girolami, G. S. (Inventor), Liu, S. (Inventor), Mohimi, E. (Inventor) & Zhang, Z. (Inventor), Feb 21 2023, U.S. Patent No. 11584986, Nov 1 2018Research output: Patent
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2022
Metal complexes for depositing films and method of making and using the same
Girolami, G. S. (Inventor) & Liu, S. (Inventor), Feb 22 2022, U.S. Patent No. 11253846, Mar 13 2020Research output: Patent
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2021
Metal complexes for depositing films and method of making and using the same
Girolami, G. S. (Inventor) & Liu, S. (Inventor), May 18 2021, U.S. Patent No. 11008353, Jul 13 2018Research output: Patent
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2018
Use of an inhibitor molecule in chemical vapor deposition to afford deposition of copper on a metal substrate with no deposition on adjacent SIO2 substrate
Babar, S. (Inventor), Abelson, J. R. (Inventor), Mohimi, E. (Inventor) & Girolami, G. S. (Inventor), Oct 16 2018, U.S. Patent No. 10103057, Nov 10 2015Research output: Patent
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2014
Smoothing agents to enhance nucleation density in thin film chemical vapor deposition
Abelson, J. R. (Inventor), Girolami, G. S. (Inventor), Babar, S. (Inventor) & Kumar, N. (Inventor), Sep 30 2014, U.S. Patent No. 8846146, Oct 31 2011Research output: Patent
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2013
Metal complex compositions and methods for making metal-containing films
Girolami, G. S. (Inventor), Kim, D. Y. (Inventor), Abelson, J. R. (Inventor), Kumar, N. (Inventor), Yang, Y. (Inventor) & Daly, S. (Inventor), Jan 29 2013, U.S. Patent No. 8362220, Apr 9 2008Research output: Patent
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2012
Surface preparation for thin film growth by enhanced nucleation
Abelson, J. R. (Inventor), Yanguas-Gil, A. (Inventor), Girolami, G. S. (Inventor) & Kumar, N. (Inventor), Feb 7 2012, U.S. Patent No. 8110503Research output: Patent
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2011
Surface preparation for thin film growth by enhanced nucleation
Abelson, J. R. (Inventor), Yanguas-Gil, A. (Inventor), Girolami, G. S. (Inventor) & Kumar, N. (Inventor), May 17 2011, U.S. Patent No. 7943527Research output: Patent
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2009
Methods for coating and filling high aspect ratio recessed features
Jayaraman, S. (Inventor), Abelson, J. R. (Inventor), Girolami, G. S. (Inventor), Yang, Y. (Inventor) & Kim, D. Y. (Inventor), Sep 22 2009, U.S. Patent No. 7592254, Oct 31 2006Research output: Patent