Gregory S Girolami – Research & Scholarship — University of Illinois Urbana-Champaign

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2008
Growth inhibition to enhance conformal coverage in thin film chemical vapor deposition
Kumar, N., Yanguas-Gil, A., Daly, S. R., Girolami, G. S. & Abelson, J. R., Dec 31 2008, In: Journal of the American Chemical Society. 130, 52, p. 17660-17661 2 p.
Research output: Contribution to journal › Short survey › peer-review