Gregory S Girolami - Research & Scholarship - Illinois Experts

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1999
Diffusion barrier characteristics of zirconium diboride films grown by remote plasma CVD
Sung, J., Goedde, D. M., Girolami, G. S. & Abelson, J. R., 1999, In: Materials Research Society Symposium - Proceedings. 563, p. 39-44 6 p.
Research output: Contribution to journal › Conference article › peer-review