Keyphrases
Chemical Vapor Deposition
74%
X-ray Crystal Structure
51%
Alkyl
40%
Rutile
26%
Ethane
22%
Stoichiometry
21%
Hydrides
20%
Anions
19%
Metal Center
17%
HfB2
17%
Ammonia
16%
Tetrahydrofuran
15%
Growth Rate
15%
Osmium
15%
Manganese
14%
Hydrogen Atom
14%
Low Temperature
14%
Cyclopentadienone
14%
Low Temperature Chemical Vapor Deposition
14%
Tetrahydroborate
14%
Dimethyl Ether
13%
Pt(111)
13%
Mechanistic Studies
13%
Higher Spin
12%
Chelates
12%
1,2-dimethoxyethane
12%
Methane
12%
HFACS
11%
Tert-butyl
11%
Bidentate
11%
Superconformal
10%
Thin Film Growth
10%
Phosphine
10%
Single-source Precursor
10%
Hafnium
10%
Tetrakis
10%
Ruthenium
10%
Substrate Temperature
9%
Hafnium Diboride
9%
Silica
9%
Chromium(II)
9%
Lanthanides
9%
Vanadium
9%
Hydrocarbons
9%
Zirconia
9%
Film Growth
9%
Aspect Ratio
9%
Hexafluoroacetylacetonate
9%
Tetramethylethylenediamine
9%
Magnesium
9%
Chemistry
Crystal Structure
100%
Chemical Vapor Deposition
33%
Titanium
31%
Liquid Film
29%
Reaction Stoichiometry
23%
Osmium
20%
Manganese
20%
Hydrogen Atom
18%
NMR Spectroscopy
17%
Crystal Phase Property
17%
Tetrahydrofuran
17%
Cyclopentadienyl
16%
Transition Element
15%
Space Group
15%
Coordination Compound
15%
Density Functional Theory
14%
Diethyl Ether
14%
Ethylene
14%
Methane
14%
Alkene
13%
Hydrogen
13%
Mechanistic Study
13%
Vanadium
12%
Sodium
12%
Hafnium
12%
Lithium
11%
Cation
11%
Zirconium
10%
Structure
10%
Chemistry
9%
Ruthenium
9%
EPR Spectroscopy
9%
P21
8%
Magnesium
8%
Uranium
8%
Spectroscopy
8%
Dihydrogen
8%
Lanthanoid Atom
8%
1,2-dimethoxyethane
8%
Ambient Reaction Temperature
8%
Borohydride
8%
Halide
8%
Alkylation
7%
Carbon Atom
7%
NMR Spectrum
7%
Blue
7%
Single Crystal X-Ray Diffraction
7%
Palladium
7%
Monoclinic Space Group
7%
Electronic State
7%