Keyphrases
Chemical Vapor Deposition
75%
X-ray Crystal Structure
51%
Alkyl
41%
Rutile
27%
Ethane
24%
Stoichiometry
21%
Anions
20%
Hydrides
20%
Metal Center
17%
HfB2
17%
Ammonia
16%
Osmium
15%
Tetrahydrofuran
15%
Growth Rate
15%
Hydrogen Atom
15%
Low Temperature
15%
Manganese
15%
Cyclopentadienone
14%
Low Temperature Chemical Vapor Deposition
14%
Tetrahydroborate
14%
Dimethyl Ether
14%
Pt(111)
13%
Chelates
13%
Mechanistic Studies
13%
Higher Spin
12%
1,2-dimethoxyethane
12%
Methane
12%
HFACS
11%
Tert-butyl
11%
Bidentate
11%
Superconformal
10%
Thin Film Growth
10%
Phosphine
10%
Single-source Precursor
10%
Hafnium
10%
Tetrakis
10%
Ruthenium
10%
Substrate Temperature
10%
Hafnium Diboride
9%
Silica
9%
Chromium(II)
9%
Lanthanides
9%
Vanadium
9%
Hydrocarbons
9%
Zirconia
9%
Film Growth
9%
Aspect Ratio
9%
Hexafluoroacetylacetonate
9%
Osmium(II)
9%
Tetramethylethylenediamine
9%
Chemistry
Crystal Structure
100%
Chemical Vapor Deposition
30%
Titanium
30%
Reaction Stoichiometry
23%
Osmium
22%
Manganese
21%
Transition Metal
20%
Hydrogen Atom
17%
Tetrahydrofuran
16%
Crystal Phase Property
16%
NMR Spectroscopy
16%
Cyclopentadienyl
16%
Space Group
15%
Diethyl Ether
14%
Hydrogen
13%
Methane
13%
Table Salt
13%
Alkene
12%
Alkane
12%
Ethylene
12%
electronics
12%
Sodium
12%
Vanadium
12%
Hafnium
12%
dimer
12%
Lithium
11%
Mechanistic Study
11%
formation
11%
Coordination Compound
10%
Zirconium
10%
Chemistry
10%
Density Functional Theory
9%
Uranium
9%
Magnesium
8%
P21
8%
Thorium
8%
Lanthanoid Atom
8%
NMR Spectrum
8%
Ambient Reaction Temperature
8%
EPR Spectroscopy
8%
Borohydride
8%
1,2-dimethoxyethane
8%
Ruthenium
8%
Halide
8%
Carbon Atom
7%
Alkylation
7%
Electronic State
7%
Dihydrogen
7%
Methyl Group
7%
Triflate
7%