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Edmund G Seebauer
James W. Westwater Professor Emeritus
,
Chemical and Biomolecular Engineering
Email
eseebaue
illinois
edu
Overview
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Network
Research & Scholarship
(225)
Honors
(4)
Similar Profiles
(5)
Research output
156
Article
34
Conference contribution
12
Paper
7
Conference article
16
More
6
Patent
4
Review article
2
Book
2
Chapter
1
Conference proceeding
1
Editorial
Research output per year
Research output per year
6 results
Publication Year, Title
(descending)
Publication Year, Title
(ascending)
Title
Type
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Patent
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2024
Method Of Controlling Oxygen Vacancy Concentration In A Semiconducting Metal Oxide
Seebauer, E. G.
(Inventor),
Sep 3 2024
, U.S. Patent No. 12080801
Research output
:
Patent
2018
Composition comprising an engineered defect concentration
Gorai, P. (Inventor) &
Seebauer, E. G.
(Inventor),
Dec 25 2018
, U.S. Patent No. 10161062,
Apr 21 2016
Research output
:
Patent
Single Crystal
100%
Defect Concentration
100%
Engineered Defects
100%
Defects
100%
Polar Surface
100%
2014
Defect engineering in metal oxides via surfaces
Seebauer, E. G.
(Inventor),
Oct 28 2014
, U.S. Patent No. 8871670,
Jan 4 2012
Research output
:
Patent
Crystalline Materials
100%
Dislocation
100%
Metal Oxide
100%
Electronic Properties
100%
Vacancy Defects
100%
2011
Preparation of ultra-shallow semiconductor junctions using intermediate temperature ramp rates and solid interfaces for defect engineering
Seebauer, E. G.
(Inventor),
Jun 28 2011
, U.S. Patent No. 7968440
Research output
:
Patent
Intermediate Temperature
100%
Solid-solid Interface
100%
Temperature Ramp
100%
Ramp Rate
100%
Defect Engineering
100%
2010
Methods for controlling dopant concentration and activation in semiconductor structures
Braatz, R. D. (Inventor),
Seebauer, E. G.
(Inventor), Jung, M. Y. L. (Inventor) & Gunawan, R. (Inventor),
Dec 7 2010
, U.S. Patent No. 7846822,
Jul 28 2005
Research output
:
Patent
Doping Concentration
100%
Semiconductor Structures
100%
Dopant Activation
100%
Dopant Concentration
100%
Semiconductor Structure
100%
1997
Selective low temperature chemical vapor deposition of titanium disilicide onto silicon regions
Mendicino, M. A. (Inventor) &
Seebauer, E. G.
(Inventor),
May 27 1997
, U.S. Patent No. 5633036,
Apr 21 1995
Research output
:
Patent
Low Temperature Chemical Vapor Deposition
100%
Titanium Disilicide
100%
Vapor Deposition
100%
Chemical Vapor Deposition
100%
Silica
100%