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Research Output 1982 2019

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Paper
2005

Control of defect concentrations in silicon through surface chemistry

Vaidyanathan, R., Dev, K., Braatz, R. D. & Seebauer, E. G., Dec 1 2005. 1 p.

Research output: Contribution to conferencePaper

Surface chemistry
Silicon
Defects
Semiconductor materials
Adsorption

Hydrogen generation by propane reforming in a novel micro channel reactor

Subramanian, V. R., Seebauer, E. G. & Masel, R. I., Dec 1 2005. 1 p.

Research output: Contribution to conferencePaper

Reforming reactions
Propane
Hydrogen
Catalysts
Catalyst activity

Role of binder in sol-gel synthesis of Ta 2O 5 films for photonic crystal fabrication

Ndiege, N., Wilhoite, T., Subramanian, V., Seebauer, E. G., Shannon, M. A. & Masel, R. I., Dec 1 2005, p. 5363-5383. 21 p.

Research output: Contribution to conferencePaper

Photonic crystals
Sol-gels
Binders
Sols
Fabrication

Synthesis of Tantalum Pentoxide films for high temperature applications

Subramanian, V. R., Ndiege, N., Shannon, M. A., Seebauer, E. G. & Masel, R. I., Dec 1 2005. 1 p.

Research output: Contribution to conferencePaper

High temperature applications
Tantalum
Spin coating
Sols
Sol-gels

The effect of microreactor geometry on performance

Masel, R. I., Seebauer, E. G., Subramanian, V. R. & Ni, Z., Dec 1 2005. 1 p.

Research output: Contribution to conferencePaper

Residence time distribution
Geometry
Flow visualization
Laminar flow
Smoke

Using surface chemistry for defect engineering in ultrashallow junction formation

Seebauer, E. G., Dec 1 2005, p. 33-42. 10 p.

Research output: Contribution to conferencePaper

Surface chemistry
Defects
Chemical activation
Doping (additives)
Electrostatics
2004

Influence of surface chemistry on ultrashallow junction formation

Dev, K. & Seebauer, E. G., Oct 28 2004, p. 66-70. 5 p.

Research output: Contribution to conferencePaper

Surface chemistry
Labeling
Chemical activation
Doping (additives)
Annealing

New mechanisms governing diffusion in silicon for transistor manufacture

Seebauer, E. G., Dec 1 2004, p. 1032-1037. 6 p.

Research output: Contribution to conferencePaper

Transistors
Silicon
Electrostatics
Simulators
Chemical activation
1982

EFFECT OF CATALYST MORPHOLOGY ON SELF SUSTAINED THERMAL OSCILLATIONS DURING HYDROGEN OXIDATION ON NICKEL.

Seebauer, E., Sault, A. G., Kudelka, M. & Masel, R. I., Dec 1 1982.

Research output: Contribution to conferencePaper

Nickel
Oxidation
Hydrogen
Catalysts
Hot Temperature