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Research Output 1982 2019

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Conference contribution
2014

Defect engineering via surfaces for metal-oxide electronics

Seebauer, E. G., Jan 23 2014, Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014. Zhou, J. & Tang, T-A. (eds.). Institute of Electrical and Electronics Engineers Inc., 7021214. (Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Electronic equipment
Defects
Oxides
Metals
Chemical bonds
2012

Defect engineering at the nanoscale: Challenges and trends

Seebauer, E. G. & Gorai, P., Dec 1 2012, High Purity Silicon 12. 5 ed. p. 291-302 12 p. (ECS Transactions; vol. 50, no. 5).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Defects
Ion implantation
Chemical elements
Molecular dynamics
Annealing

Dependence of near-surface dopant pile-up on post-implant annealing conditions

Gorai, P., Kondratenko, Y. V. & Seebauer, E. G., Dec 1 2012, Ion Implantation Technology 2012 - Proceedings of the 19th International Conference on Ion Implantation Technology. p. 253-256 4 p. (AIP Conference Proceedings; vol. 1496).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

piles
annealing
ramps
point defects
continuums
2011

A novel approach to designing supported metal oxide catalysts

Nandakumar, N. K. & Seebauer, E. G., Dec 1 2011, 11AIChE - 2011 AIChE Annual Meeting, Conference Proceedings. (11AIChE - 2011 AIChE Annual Meeting, Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Catalyst supports
Oxides
Fermi level
Metals
Doping (additives)

Electrostatic coupling of surface charge to bulk defect behavior in metal oxides

Gorai, P., Hollister, A. G., Pangan-Okimoto, K. & Seebauer, E. G., Jan 1 2011, Materials Engineering and Sciences Division - Core Programming Topic at the 2011 AIChE Annual Meeting. AIChE, Vol. 1. 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Surface charge
Oxides
Electrostatics
Metals
Defects
2010

Defect engineering in semiconductors for nanoelectronic devices

Seebauer, E. G., May 5 2010, INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings. p. 58-59 2 p. 5424520. (INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nanoelectronics
Semiconductor materials
Defects
Point defects
Spatial distribution
2008

Characterization of metal oxide electrical properties for band engineered catalysis

Kratzer, M. C. & Seebauer, E., Dec 1 2008, AIChE100 - 2008 AIChE Annual Meeting, Conference Proceedings. (AIChE Annual Meeting, Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Oxides
Catalysis
Electric properties
Metals

Defect engineering for ultrashallow junctions using surfaces

Seebauer, E. G., Kwok, C. T. M., Vaidyanathan, R., Kondratenko, Y. V., Yeong, S. H., Srinivasan, M. P., Colombeau, B. & Chan, L., Nov 13 2008, ECS Transactions - Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 4: New Materials, Processes, and Equipment. 1 ed. p. 55-62 8 p. (ECS Transactions; vol. 13, no. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Point defects
Arsenic
Integrated circuits
Boron
Chemical activation

Defect engineering for ultra-shallow junctions using surfaces

Seebauer, E. G., Kwok, C. T. M., Vaidyanathan, R., Kondratenko, Y. V., Yeong, S. H., Srinivasan, M. P., Colombeau, B. & Chan, L., Jan 1 2008, Ion Implantation Technology 2008 - 17th International Conference on Ion Implantation Technology, IIT 2008. Seebauer, E. G., Jain, A., Kondratenko, Y. V. & Felch, S. B. (eds.). American Institute of Physics Inc., p. 34-37 4 p. (AIP Conference Proceedings; vol. 1066).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

engineering
defects
boron
silicon
arsenic

Optically stimulated diffusion in ultrashallow junction formation

Kondratenko, Y., Kwok, C. & Seebauer, E. G., 2008, AIChE100 - 2008 AIChE Annual Meeting, Conference Proceedings.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Optically stimulated diffusion in ultra-shallow junction formation

Kondratenko, Y., Kwok, C. T. M., Vaidyanathan, R. & Seebauer, E. G., Jan 1 2008, Ion Implantation Technology 2008 - 17th International Conference on Ion Implantation Technology, IIT 2008. Seebauer, E. G., Jain, A., Kondratenko, Y. V. & Felch, S. B. (eds.). American Institute of Physics Inc., p. 228-231 4 p. (AIP Conference Proceedings; vol. 1066).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

illumination
luminaires
heating
stimulation
arsenic

Surface effects on oxygen defects in TiO2 for nanoelectronic materials

Hollister, A. G. & Seebauer, E. G., 2008, AIChE100 - 2008 AIChE Annual Meeting, Conference Proceedings.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nanoelectronics
Oxygen
Defects

Surfaces and interfaces for controlled defect engineering

Seebauer, E. G., Dec 1 2008, Doping Engineering for Front-End Processing. p. 25-34 10 p. (Materials Research Society Symposium Proceedings; vol. 1070).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Silicon
Point defects
point defects
integrated circuits
Integrated circuits

Surfaces and interfaces for controlled defect engineering

Seebauer, E. G., Dec 1 2008, ICSICT 2008 - 2008 9th International Conference on Solid-State and Integrated-Circuit Technology Proceedings. p. 773-776 4 p. 4734658. (International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Silicon
Point defects
point defects
integrated circuits
Integrated circuits
2007

Defect engineering for ultrashallow junctions using surfaces

Seebauer, E. G., Yeong, S. H., Srinivasan, M. P., Kwok, C. T. M., Vaidyanathan, R., Colombeau, B. & Chan, L., Dec 1 2007, ECS Transactions - International Symposium on Advanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS: New Materials, Processes and Equipment, 3. 1 ed. p. 365-371 7 p. (ECS Transactions; vol. 6, no. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Point defects
Arsenic
Integrated circuits
Boron
Chemical activation

Defect engineering in semiconductors through adsorption and photoexcitation

Seebauer, E. G., Aug 2 2007, ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings. p. 450-453 4 p. 4098133. (ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photoexcitation
Point defects
Annealing
Semiconductor materials
Arsenic

Modeling and engineering of defects in TiO2 for catalysis

Hollister, A. G., Vaidyanathan, R. & Seebauer, E. G., Dec 1 2007, 2007 AIChE Annual Meeting. (2007 AIChE Annual Meeting).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Catalysis
Optical Phenomena
Equipment and Supplies
Defects
Sunlight
2006

Controlling dopant diffusion and activation through surface chemistry

Dev, K., Kwok, C. T. M., Vaidyanathan, R., Braatz, R. D. & Seebauer, E. G., 2006, ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology, IIT 2006. Vol. 866. p. 50-53 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

activation
chemistry
interstitials
annealing
laser annealing

Hydrogen generation by partial oxidation of propane over TiO2-Al2O3 supports

Subramanian, V., Choi, J. E., Seebauer, E. G. & Masel, R. I., Dec 1 2006, 2006 AIChE Annual Meeting. (AIChE Annual Meeting, Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Propane
Hydrogen
Oxidation
San Francisco
Oxides

Interdisciplinary laboratory course: "Chemistry and Transport in Semiconductor Materials Synthesis"

Seebauer, E. G., Hollister, A. & Kondratenko, Y., Nov 14 2006, NanoSingapore 2006: IEEE Conference on Emerging Technologies - Nanoelectronics - Proceedings. p. 232-234 3 p. 1609718. (NanoSingapore 2006: IEEE Conference on Emerging Technologies - Nanoelectronics - Proceedings; vol. 2006).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Semiconductor materials
Fabrication
Students
Semiconductor devices
Plasmas

Optically-stimulated surface diffusion exploited for directed self-assembly on amorphous semiconductors

Kondratenko, Y. & Seebauer, E. G., Dec 1 2006, 2006 AIChE Annual Meeting. (AIChE Annual Meeting, Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Amorphous semiconductors
Semiconductors
Surface diffusion
Self assembly
Optics and Photonics
2005

Controlling ultrashallow junction formation through surface chemistry

Seebauer, E. G., Vaidyanathan, R., Dev, K., Kwok, C. T. M. & Braatz, R. D., 2005, 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Conference Proceedings. 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Surface chemistry
Doping (additives)
Dangling bonds
Acoustic impedance
Secondary ion mass spectrometry

Hydrogen generation by propane reforming in a novel micro channel reactor

Subramanian, V. R., Seebauer, E. G. & Masel, R. I., Jan 1 2005, 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Conference Proceedings. American Institute of Chemical Engineers, (AIChE Annual Meeting Conference Proceedings; vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Reforming reactions
Propane
Hydrogen
Catalysts
Oxides

Maximum a posteriori estimation of energetics in silicon self-diffusion

Kwok, C. T., Dev, K., Seebauer, E. G. & Braatz, R. D., Dec 1 2005, Proceedings of the 44th IEEE Conference on Decision and Control, and the European Control Conference, CDC-ECC '05. p. 2058-2063 6 p. 1582464. (Proceedings of the 44th IEEE Conference on Decision and Control, and the European Control Conference, CDC-ECC '05; vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Silicon
Fluxes
Sensitivity analysis
Boundary conditions
Atoms

Microreactors for the production of hydrogen from ammonia

Seebauer, E., Ganley, J. & Masel, R., Jul 29 2005, 2005 AIChE Spring National Meeting, Conference Proceedings. 1 p. (2005 AIChE Spring National Meeting, Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ammonia
Hydrogen
Catalyst supports
Mobile devices
Catalyst activity

Nanostructured composites for energy generation from renewable hydrocarbons

Subramanian, V. R., Seebauer, E. G. & Masel, R. I., 2005, 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Conference Proceedings. p. 3464 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fuel cells
Hydrocarbons
Composite materials
Reforming reactions
Hydrogen

Nanostructured composites for energy generation from renewable hydrocarbons

Subramanian, V. R., Seebauer, E. G. & Masel, R. I., Jan 1 2005, 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Conference Proceedings. American Institute of Chemical Engineers, (AIChE Annual Meeting Conference Proceedings; vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fuel cells
Hydrocarbons
Composite materials
Catalytic reforming
Hydrogen

Semiconductor-metal core-shell nanocomposites as catalysts for methanol fuel cells

Subramanian, V. R., Seebauer, E. G. & Masel, R. I., Jan 1 2005, 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Conference Proceedings. American Institute of Chemical Engineers, (AIChE Annual Meeting Conference Proceedings; vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Methanol fuels
Fuel cells
Nanocomposites
Methanol
Semiconductor materials

Semiconductor-metal core-shell nanocomposites as catalysts for methanol fuel cells

Subramanian, V. R., Seebauer, E. G. & Masel, R. I., 2005, 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Conference Proceedings. p. 10949 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Methanol fuels
Fuel cells
Nanocomposites
Methanol
Semiconductor materials

The effect of microreactor geometry on performance

Masel, R. I., Seebauer, E. G., Subramanian, V. R. & Ni, Z., Jan 1 2005, 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Conference Proceedings. American Institute of Chemical Engineers, (AIChE Annual Meeting Conference Proceedings; vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Residence time distribution
Geometry
Flow visualization
Laminar flow
Smoke

The effects of microreactor geometry on the performance of anodized alumina microreactors

Seebauer, E., Mosel, R. & Ni, Z., Jul 29 2005, 2005 AIChE Spring National Meeting, Conference Proceedings. 1 p. (2005 AIChE Spring National Meeting, Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Alumina
Geometry
Ammonia
Hydrogen
Kinetics
2004

Measurement of nonthermal illumination-enhanced self-diffusion in silicon

Jung, M. Y. L. & Seebauer, E. G., Aug 16 2004, Extended Abstracts of the Fourth International Workshop on Junction Technology, IWJT 2004. Qu, X. P., Ru, G. P., Li, B. Z., Mizuno, B. & Iwai, H. (eds.). Institute of Electrical and Electronics Engineers Inc., Vol. 4. p. 87-89 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lighting
Doping (additives)
Electric lamps
Silicon
Heating

Surface control of interstitial behavior for improved ultrashallow junction formation

Seebauer, E. G., Aug 16 2004, Extended Abstracts of the Fourth International Workshop on Junction Technology, IWJT 2004. Qu, X. P., Ru, G. P., Li, B. Z., Mizuno, B. & Iwai, H. (eds.). Institute of Electrical and Electronics Engineers Inc., Vol. 4. p. 81-86 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Control surfaces
Simulators
Doping (additives)
Maximum likelihood estimation
Secondary ion mass spectrometry
2002

Measurement of nonthermal illumination-enhanced diffusion in silicon

Jung, M. Y. L. & Seebauer, E. G., Jan 1 2002, 10th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2002. Singh, R., Nenyei, Z., Lojek, B. & Gelpey, J. (eds.). Institute of Electrical and Electronics Engineers Inc., p. 133-135 3 p. 1039451. (10th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2002).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rapid thermal annealing
Lighting
Electric lamps
Silicon
Doping (additives)

Probing of Cu presence at Ta-SiO2 interfaces by second harmonic generation measurement

Tey, S. H., Seebauer, E. G., Prasad, K., Tee, K. C. & Chan, L. H., Jan 1 2002, 2002 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2002 - Proceedings. Gal, M. (ed.). Institute of Electrical and Electronics Engineers Inc., p. 523-526 4 p. 1237305. (Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD; vol. 2002-January).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Microanalysis
Harmonic generation

Systems analysis applied to modeling dopant activation and TED in rapid thermal annealing

Gunawan, R., Jung, M. Y. L., Braatz, R. D. & Seebauer, E. G., Jan 1 2002, 10th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2002. Singh, R., Nenyei, Z., Lojek, B. & Gelpey, J. (eds.). Institute of Electrical and Electronics Engineers Inc., p. 107-110 4 p. 1039447. (10th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2002).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rapid thermal annealing
Chemical activation
Systems analysis
Doping (additives)
Maximum likelihood estimation
1994

New physical picture for surface diffusion at high temperatures

Suni, I. I. & Seebauer, E. G., Jan 1 1994, Mechanisms of Thin Film Evolution. Desu, S. B., Beach, D. B., Wessels, B. W. & Gokoglu, S. (eds.). Publ by Materials Research Society, p. 21-26 6 p. (Materials Research Society Symposium Proceedings; vol. 317).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Surface diffusion
Vacancies
Temperature
Adatoms
Harmonic generation

Predictive surface kinetic analysis: the case of TiSi2 CVD

Mendicino, M. A., Southwell, R. P. & Seebauer, E. G., Jan 1 1994, Gas-Phase and Surface Chemistry in Electronic Materials Processing. Publ by Materials Research Society, p. 63-68 6 p. (Materials Research Society Symposium Proceedings; vol. 334).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chemical vapor deposition
Kinetics
Ultrahigh vacuum
Reaction products
Experiments