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Research Output

2000

Reactions of ethanol over metal oxides

Idriss, H. & Seebauer, E. G., Mar 1 2000, In : Journal of Molecular Catalysis A: Chemical. 152, 1-2, p. 201-212 12 p.

Research output: Contribution to journalArticle

Semiconductor surface diffusion: Nonthermal effects of photon illumination

Ditchfield, R., Llera-Rodríguez, D. & Seebauer, E., Jan 1 2000, In : Physical Review B - Condensed Matter and Materials Physics. 61, 20, p. 13710-13720 11 p.

Research output: Contribution to journalArticle

1999

Direct measurement of ion-influenced surface diffusion

Ditchfield, R. & Seebauer, E. G., Jan 1 1999, In : Physical review letters. 82, 6, p. 1185-1188 4 p.

Research output: Contribution to journalArticle

Effects of arsenic doping on chemical vapor deposition of titanium silicide

Fang, H., Öztürk, M. C., Seebauer, E. G. & Batchelor, D. E., Nov 1 1999, In : Journal of the Electrochemical Society. 146, 11, p. 4240-4245 6 p.

Research output: Contribution to journalArticle

Manipulating photoadsorption kinetics: NO on Cl-treated Fe2O3

Blomiley, E. R. & Seebauer, E. G., Jun 17 1999, In : Journal of Physical Chemistry B. 103, 24, p. 5035-5041 7 p.

Research output: Contribution to journalArticle

New approach to manipulating and characterizing powdered photoadsorbents: NO on Cl-treated Fe2O3

Blomiley, E. R. & Seebauer, E. G., Jan 1 1999, In : Langmuir. 15, 18, p. 5970-5976 7 p.

Research output: Contribution to journalArticle

1998

Beyond thermal budget: Using D·t in kinetic optimization of RTP

Ditchfield, R. & Seebauer, E. G., Jan 1 1998, In : Materials Research Society Symposium - Proceedings. 525, p. 57-62 6 p.

Research output: Contribution to journalConference article

Nonthermal Effects of Photon Illumination on Surface Diffusion

Ditchfield, R., Llera-Rodríguez, D. & Seebauer, E. G., Jan 1 1998, In : Physical review letters. 81, 6, p. 1259-1262 4 p.

Research output: Contribution to journalArticle

Photooxidation of ethanol on Fe-Ti oxide particulates

Idriss, H. & Seebauer, E. G., Oct 13 1998, In : Langmuir. 14, 21, p. 6146-6150 5 p.

Research output: Contribution to journalArticle

Selective rapid thermal chemical vapor deposition of titanium silicide on arsenic implanted silicon

Fang, H., Ozturk, M. C. & Seebauer, E. G., Dec 1 1998, In : Materials Research Society Symposium - Proceedings. 514, p. 231-236 6 p.

Research output: Contribution to journalConference article

1997

Fixing hidden problems with thermal budget

Seebauer, E. G. & Ditchfield, R., Oct 1 1997, Solid State Technology, 40, 10, p. 111-120 10 p.

Research output: Contribution to specialist publicationArticle

Kinetics of TiSi2 formation and silicon consumption during chemical vapor deposition

Southwell, R. P. & Seebauer, E. G., Jun 1997, In : Journal of the Electrochemical Society. 144, 6, p. 2122-2137 16 p.

Research output: Contribution to journalArticle

Photoreactions of ethanol and MTBE on metal oxide particles in the troposphere

Idriss, H., Miller, A. & Seebauer, E. G., Jan 17 1997, In : Catalysis Today. 33, 1-3, p. 215-225 11 p.

Research output: Contribution to journalArticle

Practical processing issues in titanium suicide CVD

Southwell, R. P. & Seebauer, E. G., Sep 1997, In : Applied Surface Science. 119, 1-2, p. 41-49 9 p.

Research output: Contribution to journalArticle

Problems with the concept of thermal budget: Experimental demonstrations

Ditchfield, R. & Seebauer, E. G., 1997, In : Materials Research Society Symposium - Proceedings. 470, p. 313-318 6 p.

Research output: Contribution to journalArticle

Rapid thermal processing: Fixing problems with the concept of thermal budget

Ditchfield, R. & Seebauer, E. G., May 1997, In : Journal of the Electrochemical Society. 144, 5, p. 1842-1849 8 p.

Research output: Contribution to journalArticle

Surface diffusion of Ge on Si(111): Experiment and simulation

Allen, C., Ditchfield, R. & Seebauer, E., Jan 1 1997, In : Physical Review B - Condensed Matter and Materials Physics. 55, 19, p. 13304-13313 10 p.

Research output: Contribution to journalArticle

1996

Adsorption of chlorine on TiSi2: application to etching and deposition of silicide films

Ditchfield, R., Mendicino, M. A. & Seebauer, E. G., Jan 1 1996, In : Journal of the Electrochemical Society. 143, 1, p. 266-271 6 p.

Research output: Contribution to journalArticle

A predictive kinetic model for the chemical vapor deposition of TiSi2

Southwell, R. P. & Seebauer, E. G., May 1996, In : Journal of the Electrochemical Society. 143, 5, p. 1726-1736 11 p.

Research output: Contribution to journalArticle

General kinetic rules for rapid thermal processing

Ditchfield, R. & Seebauer, E. G., Jan 1 1996, In : Materials Research Society Symposium - Proceedings. 429, p. 133-138 6 p.

Research output: Contribution to journalConference article

Optimization of selective TiSi2 chemical vapor deposition by mechanistic chemical kinetics

Southwell, R. P., Mendicino, M. A. & Seebauer, E. G., Jan 1 1996, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 14, 3, p. 928-934 7 p.

Research output: Contribution to journalArticle

Surface diffusion of in on Si(111): Evidence for surface ionization effects

Allen, C. E., Ditchfield, R. & Seebauer, E. G., Jan 1 1996, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 14, 1, p. 22-29 8 p.

Research output: Contribution to journalArticle

Surface diffusivities and reaction rate constants: Making a quantitative experimental connection

Allen, C. E. & Seebauer, E. G., Jan 1 1996, In : Journal of Chemical Physics. 104, 7, p. 2557-2565 9 p.

Research output: Contribution to journalArticle

Surface self diffusion at high temperatures: New simulational insights

Suni, I. I. & Seebauer, E. G., Jan 15 1996, In : Thin Solid Films. 272, 2, p. 229-234 6 p.

Research output: Contribution to journalArticle

1995

Differential-conversion temperature programmed desorption: a new method for obtaining bimolecular surface rate constants

Southwell, R. P. & Seebauer, E. G., Oct 20 1995, In : Surface Science. 340, 3, p. 281-292 12 p.

Research output: Contribution to journalArticle

Estimating surface diffusion coefficients

Seebauer, E. G. & Allen, C. E., Jul 1995, In : Progress in Surface Science. 49, 3, p. 265-330 66 p.

Research output: Contribution to journalReview article

Kinetics of salicide contact formation for thin-film soi transistors

Mendicino, M. A. & Seebauer, E. G., Feb 1995, In : Journal of the Electrochemical Society. 142, 2, p. L28-L30

Research output: Contribution to journalArticle

SiH4 on TiSi2: an investigation of gas adsorption on metal-like compounds

Southwell, R. P. & Seebauer, E. G., May 10 1995, In : Surface Science. 329, 1-2, p. 107-114 8 p.

Research output: Contribution to journalArticle

Structure and Morphology of Microprotrusions Grown on Ar-Sputtered InP

Southwell, R. P. & Seebauer, E. G., Mar 1995, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 13, 2, p. 221-229 9 p.

Research output: Contribution to journalArticle

Surface Diffusion of Sb on Si(111) Measured by Second Harmonic Microscopy

Allen, C. E. & Seebauer, E. G., Jan 1 1995, In : Langmuir. 11, 1, p. 186-190 5 p.

Research output: Contribution to journalArticle

1994

A new physical picture for surface diffusion at high temperatures

Suni, I. I. & Seebauer, E. G., Jan 10 1994, In : Surface Science. 301, 1-3, p. L235-L238

Research output: Contribution to journalArticle

Chemical vapor deposition of TiSi2 using SiH4 and TiCl4

Mendicino, M. A., Southwell, R. P. & Seebauer, E. G., Dec 15 1994, In : Thin Solid Films. 253, 1-2, p. 473-478 6 p.

Research output: Contribution to journalArticle

New physical picture for surface diffusion at high temperatures

Suni, I. I. & Seebauer, E. G., Jan 1 1994, Mechanisms of Thin Film Evolution. Desu, S. B., Beach, D. B., Wessels, B. W. & Gokoglu, S. (eds.). Publ by Materials Research Society, p. 21-26 6 p. (Materials Research Society Symposium Proceedings; vol. 317).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Predictive surface kinetic analysis: the case of TiSi2 CVD

Mendicino, M. A., Southwell, R. P. & Seebauer, E. G., Jan 1 1994, Gas-Phase and Surface Chemistry in Electronic Materials Processing. Publ by Materials Research Society, p. 63-68 6 p. (Materials Research Society Symposium Proceedings; vol. 334).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Surface diffusion of in on Ge(111) studied by optical second harmonic microscopy

Suni, I. I. & Seebauer, E. G., Jan 1 1994, In : The Journal of Chemical Physics. 100, 9, p. 6772-6777 6 p.

Research output: Contribution to journalArticle

1993

Adsorption/desorption kinetics of H2O on GaAs(100) measured by photoreflectance

Carlson, C. R., Buechter, W. F., Che-Ibrahim, F. & Seebauer, E. G., Jan 1 1993, In : The Journal of Chemical Physics. 99, 9, p. 7190-7197 8 p.

Research output: Contribution to journalArticle

Adsorption of chlorine on Si(100)

Mendicino, M. A. & Seebauer, E. G., Jul 1993, In : Applied Surface Science. 68, 3, p. 285-290 6 p.

Research output: Contribution to journalArticle

Adsorption of TiCl4, SiH4, and HCl on Si(100): Application to TiSi2 Chemical Vapor Deposition and Si Etching

Mendicino, M. A. & Seebauer, E. G., Jun 1993, In : Journal of the Electrochemical Society. 140, 6, p. 1786-1793 8 p.

Research output: Contribution to journalArticle

Detailed in-situ monitoring of film growth: application to TiSi2 chemical vapor deposition

Mendicino, M. A. & Seebauer, E. G., Dec 1993, In : Journal of Crystal Growth. 134, 3-4, p. 377-385 9 p.

Research output: Contribution to journalArticle

Microscopy of adsorbates by surface second-harmonic generation

Schultz, K. A., Suni, I. I. & Seebauer, E. G., Mar 1993, In : Journal of the Optical Society of America B: Optical Physics. 10, 3, p. 546-550 5 p.

Research output: Contribution to journalArticle

1992

Adsorption of TiCl4 on Si(100)

Mendicino, M. A. & Seebauer, E. G., Oct 10 1992, In : Surface Science. 277, 1-2, p. 89-96 8 p.

Research output: Contribution to journalArticle

Low-stress, coolable sample mount for ultrahigh vacuum studies of fragile semiconductors

Schultz, K. A. & Seebauer, E. G., Dec 1 1992, In : Review of Scientific Instruments. 63, 1, p. 218-219 2 p.

Research output: Contribution to journalArticle

Optical second harmonic study of Sb adsorption on Ge(111)

Schultz, K. A., Suni, I. I., Allen, C. E. & Seebauer, E. G., Oct 1 1992, In : Surface Science. 276, 1-3, p. 40-49 10 p.

Research output: Contribution to journalArticle

Surface diffusion of Sb on Ge(111) monitored quantitatively with optical second harmonic microscopy

Schultz, K. A. & Seebauer, E. G., Jan 1 1992, In : The Journal of Chemical Physics. 97, 9, p. 6958-6967 10 p.

Research output: Contribution to journalArticle

1991

Accurate methods for simulating electroreflectance and photoreflectance spectra of GaAs

Jackson, P. L. & Seebauer, E. G., Dec 1 1991, In : Journal of Applied Physics. 69, 2, p. 943-948 6 p.

Research output: Contribution to journalArticle

1989

Oxidation and annealing of GaAs (100) studied by photoreflectance

Seebauer, E. G., Dec 1 1989, In : Journal of Applied Physics. 66, 10, p. 4963-4972 10 p.

Research output: Contribution to journalArticle

1988

Adsorption and desorption of CO and H2 on Rh(111): Laser-induced desorption

Seebauer, E. G., Kong, A. C. F. & Schmidt, L. D., Jan 1988, In : Applied Surface Science. 31, 1, p. 163-172 10 p.

Research output: Contribution to journalArticle

Experimental measurements of hydrogen and CO surface diffusion on rhodium

Seebauer, E. G. & Schmidt, L. D., Dec 1 1988, In : AIChE Symposium Series. 84, 266, p. 1-9 9 p.

Research output: Contribution to journalArticle