If you made any changes in Pure these will be visible here soon.

Research Output

2010

Diffusion mechanisms on amorphous silicon surfaces

Dalton, A. S., Kondratenko, Y. V. & Seebauer, E. G., Jan 18 2010, In : Chemical Engineering Science. 65, 6, p. 2172-2176 5 p.

Research output: Contribution to journalArticle

Directed self-assembly by photostimulation of an amorphous semiconductor surface

Kondratenko, Y. V. & Seebauer, E. G., Dec 1 2010, In : AIChE Journal. 56, 12, p. 3206-3211 6 p.

Research output: Contribution to journalArticle

General expression for effective diffusivity of foreign atoms migrating via a fast intermediate

Chen, K., Vaidyanathan, R., Seebauer, E. G. & Braatz, R. D., Feb 8 2010, In : Journal of Applied Physics. 107, 2, 026101.

Research output: Contribution to journalArticle

Temperature and time dependence study of single-walled carbon nanotube growth by catalytic chemical vapor deposition

Kwok, C. T. M., Reizman, B. J., Agnew, D. E., Sandhu, G. S., Weistroffer, J., Strano, M. S. & Seebauer, E. G., Apr 1 2010, In : Carbon. 48, 4, p. 1279-1288 10 p.

Research output: Contribution to journalArticle

Trends in semiconductor defect engineering at the nanoscale

Seebauer, E. G. & Noh, K. W., Nov 22 2010, In : Materials Science and Engineering R: Reports. 70, 3-6, p. 151-168 18 p.

Research output: Contribution to journalArticle

2009

Charged semiconductor defects structure, thermodynamics and diffusion

Seebauer, E. G. & Kratzer, M. C., 2009, London: Springer.

Research output: Book/ReportBook

Chemical engineering at... the university of illinois at urbana-champaign

Seebauer, E. G., Kenis, P. J. A. & Miletic, M., Jun 1 2009, In : Chemical Engineering Education. 43, 3, p. 179-185 7 p.

Research output: Contribution to journalArticle

Mechanistic benefits of millisecond annealing for diffusion and activation of boron in silicon

Kwok, C. T. M., Braatz, R. D., Paul, S., Lerch, W. & Seebauer, E. G., Apr 9 2009, In : Journal of Applied Physics. 105, 6, 063514.

Research output: Contribution to journalArticle

2008

17th international conference on ion implantation technology (IIT 2008)

Felch, S., Jain, A., Seebauer, E. & Kondratenko, Y., Jan 1 2008, In : AIP Conference Proceedings. 1066, p. xiii-xiv

Research output: Contribution to journalEditorial

Characterization of metal oxide electrical properties for band engineered catalysis

Kratzer, M. C. & Seebauer, E., Dec 1 2008, AIChE100 - 2008 AIChE Annual Meeting, Conference Proceedings. (AIChE Annual Meeting, Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Defect engineering for ultrashallow junctions using surfaces

Seebauer, E. G., Kwok, C. T. M., Vaidyanathan, R., Kondratenko, Y. V., Yeong, S. H., Srinivasan, M. P., Colombeau, B. & Chan, L., Nov 13 2008, ECS Transactions - Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 4: New Materials, Processes, and Equipment. 1 ed. p. 55-62 8 p. (ECS Transactions; vol. 13, no. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Defect engineering for ultra-shallow junctions using surfaces

Seebauer, E. G., Kwok, C. T. M., Vaidyanathan, R., Kondratenko, Y. V., Yeong, S. H., Srinivasan, M. P., Colombeau, B. & Chan, L., Jan 1 2008, Ion Implantation Technology 2008 - 17th International Conference on Ion Implantation Technology, IIT 2008. Seebauer, E. G., Jain, A., Kondratenko, Y. V. & Felch, S. B. (eds.). American Institute of Physics Inc., p. 34-37 4 p. (AIP Conference Proceedings; vol. 1066).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Maximum a posteriori estimation of activation energies that control silicon self-diffusion

Kwok, C. T. M., Dev, K., Seebauer, E. G. & Braatz, R. D., Sep 1 2008, In : Automatica. 44, 9, p. 2241-2247 7 p.

Research output: Contribution to journalArticle

Multiscale Modeling and Design of Electrochemical Systems

Braatz, R. D., Seebauer, E. G. & Alkire, R. C., Oct 30 2008, Electrochemical Surface Modification Thin Films, Functionalization and Characterization. Wiley, Vol. 10. p. 289-334 46 p.

Research output: Chapter in Book/Report/Conference proceedingChapter

Optically stimulated diffusion in ultrashallow junction formation

Kondratenko, Y., Kwok, C. & Seebauer, E. G., 2008, AIChE100 - 2008 AIChE Annual Meeting, Conference Proceedings.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Optically stimulated diffusion in ultra-shallow junction formation

Kondratenko, Y., Kwok, C. T. M., Vaidyanathan, R. & Seebauer, E. G., Jan 1 2008, Ion Implantation Technology 2008 - 17th International Conference on Ion Implantation Technology, IIT 2008. Seebauer, E. G., Jain, A., Kondratenko, Y. V. & Felch, S. B. (eds.). American Institute of Physics Inc., p. 228-231 4 p. (AIP Conference Proceedings; vol. 1066).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Surface effects on oxygen defects in TiO2 for nanoelectronic materials

Hollister, A. G. & Seebauer, E. G., 2008, AIChE100 - 2008 AIChE Annual Meeting, Conference Proceedings.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Surfaces and interfaces for controlled defect engineering

Seebauer, E. G., Dec 1 2008, Doping Engineering for Front-End Processing. p. 25-34 10 p. (Materials Research Society Symposium Proceedings; vol. 1070).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Surfaces and interfaces for controlled defect engineering

Seebauer, E. G., Dec 1 2008, ICSICT 2008 - 2008 9th International Conference on Solid-State and Integrated-Circuit Technology Proceedings. p. 773-776 4 p. 4734658. (International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Synthesis and characterization of polyvinylpyrrolidine assisted tantalum pentoxide films

Subramanian, V., Ndiege, N., Seebauer, E. G., Shannon, M. A. & Masel, R. I., Jun 2 2008, In : Thin Solid Films. 516, 15, p. 4784-4792 9 p.

Research output: Contribution to journalArticle

2007

An improved theory for temperature-dependent Arrhenius parameters in mesoscale surface diffusion

Dalton, A. S. & Seebauer, E. G., Feb 1 2007, In : Surface Science. 601, 3, p. 728-734 7 p.

Research output: Contribution to journalArticle

Defect engineering by surface chemical state in boron-doped preamorphized silicon

Yeong, S. H., Srinivasan, M. P., Colombeau, B., Chan, L., Akkipeddi, R., Kwok, C. T. M., Vaidyanathan, R. & Seebauer, E. G., Sep 13 2007, In : Applied Physics Letters. 91, 10, 102112.

Research output: Contribution to journalArticle

Defect engineering for ultrashallow junctions using surfaces

Seebauer, E. G., Yeong, S. H., Srinivasan, M. P., Kwok, C. T. M., Vaidyanathan, R., Colombeau, B. & Chan, L., Dec 1 2007, ECS Transactions - International Symposium on Advanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS: New Materials, Processes and Equipment, 3. 1 ed. p. 365-371 7 p. (ECS Transactions; vol. 6, no. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Defect engineering in semiconductors through adsorption and photoexcitation

Seebauer, E. G., Aug 2 2007, ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings. p. 450-453 4 p. 4098133. (ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mechanism and energetics of self-interstitial formation and diffusion in silicon

Vaidyanathan, R., Jung, M. Y. L. & Seebauer, E. G., May 17 2007, In : Physical Review B - Condensed Matter and Materials Physics. 75, 19, 195209.

Research output: Contribution to journalArticle

Modeling and engineering of defects in TiO2 for catalysis

Hollister, A. G., Vaidyanathan, R. & Seebauer, E. G., Dec 1 2007, 2007 AIChE Annual Meeting. (2007 AIChE Annual Meeting).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TiO2-Al2O3 as a support for propane partial oxidation over Rh

Subramanian, V., Choi, J., Seebauer, E. G. & Masel, R. I., Jan 1 2007, In : Catalysis Letters. 113, 1-2, p. 13-18 6 p.

Research output: Contribution to journalArticle

2006

A multiscale systems approach to microelectronic processes

Braatz, R. D., Alkire, R. C., Seebauer, E. G., Drews, T. O., Rusli, E., Karulkar, M., Xue, F., Qin, Y., Jung, M. Y. L. & Gunawan, R., Sep 12 2006, In : Computers and Chemical Engineering. 30, 10-12, p. 1643-1656 14 p.

Research output: Contribution to journalArticle

Charged point defects in semiconductors

Seebauer, E. G. & Kratzer, M. C., Dec 15 2006, In : Materials Science and Engineering R: Reports. 55, 3-6, p. 57-149 93 p.

Research output: Contribution to journalReview article

Controlling dopant diffusion and activation through surface chemistry

Dev, K., Kwok, C. T. M., Vaidyanathan, R., Braatz, R. D. & Seebauer, E. G., 2006, ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology, IIT 2006. Vol. 866. p. 50-53 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Control of defect concentrations within a semiconductor through adsorption

Seebauer, E. G., Dev, K., Jung, M. Y. L., Vaidyanathan, R., Kwok, C. T. M., Ager, J. W., Haller, E. E. & Braatz, R. D., Aug 14 2006, In : Physical review letters. 97, 5, 055503.

Research output: Contribution to journalArticle

Hydrogen generation by partial oxidation of propane over TiO2-Al2O3 supports

Subramanian, V., Choi, J. E., Seebauer, E. G. & Masel, R. I., Dec 1 2006, 2006 AIChE Annual Meeting. (AIChE Annual Meeting, Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Influence of surface adsorption in improving ultrashallow junction formation

Vaidyanathan, R., Seebauer, E. G., Graoui, H. & Foad, M. A., Oct 20 2006, In : Applied Physics Letters. 89, 15, 152114.

Research output: Contribution to journalArticle

Interdisciplinary laboratory course: "Chemistry and Transport in Semiconductor Materials Synthesis"

Seebauer, E. G., Hollister, A. & Kondratenko, Y., Nov 14 2006, NanoSingapore 2006: IEEE Conference on Emerging Technologies - Nanoelectronics - Proceedings. p. 232-234 3 p. 1609718. (NanoSingapore 2006: IEEE Conference on Emerging Technologies - Nanoelectronics - Proceedings; vol. 2006).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Measurement of defect-mediated diffusion: The case of silicon self-diffusion

Vaidyanathan, R., Jung, M. Y. L., Braatz, R. D. & Seebauer, E. G., Jan 1 2006, In : AIChE Journal. 52, 1, p. 366-370 5 p.

Research output: Contribution to journalArticle

Optically-stimulated surface diffusion exploited for directed self-assembly on amorphous semiconductors

Kondratenko, Y. & Seebauer, E. G., Dec 1 2006, 2006 AIChE Annual Meeting. (AIChE Annual Meeting, Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Perspectives on the design and control of multiscale systems

Braatz, R. D., Alkire, R. C., Seebauer, E., Rusli, E., Gunawan, R., Drews, T. O., Li, X. & He, Y., Mar 1 2006, In : Journal of Process Control. 16, 3, p. 193-204 12 p.

Research output: Contribution to journalArticle

Precursor mechanism for interaction of bulk interstitial atoms with Si(100)

Zhang, X., Yu, M., Kwok, C. T. M., Vaidyanathan, R., Braatz, R. D. & Seebauer, E. G., Dec 11 2006, In : Physical Review B - Condensed Matter and Materials Physics. 74, 23, 235301.

Research output: Contribution to journalArticle

Semiconductor-metal core-shell nanocomposites as catalysts for methanol fuel cells

Subrmanian, V., Parker, M., Masel, R. I. & Seebauer, E. G., Jun 28 2006, In : ACS National Meeting Book of Abstracts. 231

Research output: Contribution to journalConference article

Synthesis of high-temperature titania-alumina supports

Subramanian, V., Ni, Z., Seebauer, E. G. & Masel, R. I., May 24 2006, In : Industrial and Engineering Chemistry Research. 45, 11, p. 3815-3820 6 p.

Research output: Contribution to journalArticle

2005

A method for quantifying annihilation rates of bulk point defects at surfaces

Kwok, C. T. M., Dev, K., Braatz, R. D. & Seebauer, E. G., Jul 1 2005, In : Journal of Applied Physics. 98, 1, 013524.

Research output: Contribution to journalArticle

Band bending at the Si(1 0 0)-Si3N4 interface studied by photoreflectance spectroscopy

Dev, K. & Seebauer, E. G., May 20 2005, In : Surface Science. 583, 1, p. 80-87 8 p.

Research output: Contribution to journalArticle

Controlling ultrashallow junction formation through surface chemistry

Seebauer, E. G., Vaidyanathan, R., Dev, K., Kwok, C. T. M. & Braatz, R. D., 2005, 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Conference Proceedings. 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Control of defect concentrations in silicon through surface chemistry

Vaidyanathan, R., Dev, K., Braatz, R. D. & Seebauer, E. G., Dec 1 2005. 1 p.

Research output: Contribution to conferencePaper

Effects of microreactor geometry on performance: Differences between posted reactors and channel reactors

Ni, Z., Seebauer, E. G. & Masel, R. I., Jun 8 2005, In : Industrial and Engineering Chemistry Research. 44, 12, p. 4267-4271 5 p.

Research output: Contribution to journalArticle

Hydrogen generation by propane reforming in a novel micro channel reactor

Subramanian, V. R., Seebauer, E. G. & Masel, R. I., Dec 1 2005. 1 p.

Research output: Contribution to conferencePaper

Hydrogen generation by propane reforming in a novel micro channel reactor

Subramanian, V. R., Seebauer, E. G. & Masel, R. I., Jan 1 2005, 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Conference Proceedings. American Institute of Chemical Engineers, (AIChE Annual Meeting Conference Proceedings; vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Interstitial charge states in boron-implanted silicon

Jung, M. Y. L., Kwok, C. T. M., Braatz, R. D. & Seebauer, E. G., Jun 27 2005, In : Journal of Applied Physics. 97, 6, 063520.

Research output: Contribution to journalArticle