If you made any changes in Pure these will be visible here soon.

Research Output

17th international conference on ion implantation technology (IIT 2008)

Felch, S., Jain, A., Seebauer, E. & Kondratenko, Y., Jan 1 2008, In : AIP Conference Proceedings. 1066, p. xiii-xiv

Research output: Contribution to journalEditorial

Accurate methods for simulating electroreflectance and photoreflectance spectra of GaAs

Jackson, P. L. & Seebauer, E. G., Dec 1 1991, In : Journal of Applied Physics. 69, 2, p. 943-948 6 p.

Research output: Contribution to journalArticle

Adsorption/desorption kinetics of H2O on GaAs(100) measured by photoreflectance

Carlson, C. R., Buechter, W. F., Che-Ibrahim, F. & Seebauer, E. G., Jan 1 1993, In : The Journal of Chemical Physics. 99, 9, p. 7190-7197 8 p.

Research output: Contribution to journalArticle

Adsorption and desorption of CO and H2 on Rh(111): Laser-induced desorption

Seebauer, E. G., Kong, A. C. F. & Schmidt, L. D., Jan 1988, In : Applied Surface Science. 31, 1, p. 163-172 10 p.

Research output: Contribution to journalArticle

Adsorption and desorption of NO, CO and H2 on Pt(111): Laser-induced thermal desorption studies

Seebauer, E. G., Kong, A. C. F. & Schmidt, L. D., Oct 2 1986, In : Surface Science. 176, 1-2, p. 134-156 23 p.

Research output: Contribution to journalArticle

Adsorption of chlorine on Si(100)

Mendicino, M. A. & Seebauer, E. G., Jul 1993, In : Applied Surface Science. 68, 3, p. 285-290 6 p.

Research output: Contribution to journalArticle

Adsorption of chlorine on TiSi2: application to etching and deposition of silicide films

Ditchfield, R., Mendicino, M. A. & Seebauer, E. G., Jan 1 1996, In : Journal of the Electrochemical Society. 143, 1, p. 266-271 6 p.

Research output: Contribution to journalArticle

Adsorption of TiCl4, SiH4, and HCl on Si(100): Application to TiSi2 Chemical Vapor Deposition and Si Etching

Mendicino, M. A. & Seebauer, E. G., Jun 1993, In : Journal of the Electrochemical Society. 140, 6, p. 1786-1793 8 p.

Research output: Contribution to journalArticle

Adsorption of TiCl4 on Si(100)

Mendicino, M. A. & Seebauer, E. G., Oct 10 1992, In : Surface Science. 277, 1-2, p. 89-96 8 p.

Research output: Contribution to journalArticle

A method for quantifying annihilation rates of bulk point defects at surfaces

Kwok, C. T. M., Dev, K., Braatz, R. D. & Seebauer, E. G., Jul 1 2005, In : Journal of Applied Physics. 98, 1, 013524.

Research output: Contribution to journalArticle

A multiscale systems approach to microelectronic processes

Braatz, R. D., Alkire, R. C., Seebauer, E. G., Drews, T. O., Rusli, E., Karulkar, M., Xue, F., Qin, Y., Jung, M. Y. L. & Gunawan, R., Sep 12 2006, In : Computers and Chemical Engineering. 30, 10-12, p. 1643-1656 14 p.

Research output: Contribution to journalArticle

A new physical picture for surface diffusion at high temperatures

Suni, I. I. & Seebauer, E. G., Jan 10 1994, In : Surface Science. 301, 1-3, p. L235-L238

Research output: Contribution to journalArticle

An improved model for boron diffusion and activation in silicon

Kwok, C. T. M., Braatz, R. D., Paul, S., Lerch, W. & Seebauer, E. G., Feb 1 2010, In : AIChE Journal. 56, 2, p. 515-521 7 p.

Research output: Contribution to journalArticle

An improved theory for temperature-dependent Arrhenius parameters in mesoscale surface diffusion

Dalton, A. S. & Seebauer, E. G., Feb 1 2007, In : Surface Science. 601, 3, p. 728-734 7 p.

Research output: Contribution to journalArticle

A novel approach to designing supported metal oxide catalysts

Nandakumar, N. K. & Seebauer, E. G., Dec 1 2011, 11AIChE - 2011 AIChE Annual Meeting, Conference Proceedings. (11AIChE - 2011 AIChE Annual Meeting, Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

A predictive kinetic model for the chemical vapor deposition of TiSi2

Southwell, R. P. & Seebauer, E. G., May 1996, In : Journal of the Electrochemical Society. 143, 5, p. 1726-1736 11 p.

Research output: Contribution to journalArticle

A priori catalytic activity correlations: The difficult case of hydrogen production from ammonia

Ganley, J. C., Thomas, F. S., Seebauer, E. G. & Masel, R. I., Jul 1 2004, In : Catalysis Letters. 96, 3-4, p. 117-122 6 p.

Research output: Contribution to journalArticle

Arsenic Redistribution during Rapid Thermal Chemical Vapor Deposition of TiSi2 on Si

Fang, H., Öztürk, M. C., O'Neil, P. A. & Seebauer, E. G., Dec 1 2001, In : Journal of the Electrochemical Society. 148, 2

Research output: Contribution to journalArticle

A simplified picture for transient enhanced diffusion of boron in silicon

Jung, M. Y. L., Gunawan, R., Braatz, R. D. & Seebauer, E. G., Feb 16 2004, In : Journal of the Electrochemical Society. 151, 1, p. G1-G7

Research output: Contribution to journalArticle

Band bending at the Si(1 0 0)-Si3N4 interface studied by photoreflectance spectroscopy

Dev, K. & Seebauer, E. G., May 20 2005, In : Surface Science. 583, 1, p. 80-87 8 p.

Research output: Contribution to journalArticle

Band bending at the Si(1 1 1)-SiO2 interface induced by low-energy ion bombardment

Dev, K. & Seebauer, E. G., Feb 10 2004, In : Surface Science. 550, 1-3, p. 185-191 7 p.

Research output: Contribution to journalArticle

Beyond thermal budget: Using D·t in kinetic optimization of RTP

Ditchfield, R. & Seebauer, E. G., 1998, In : Materials Research Society Symposium - Proceedings. 525, p. 57-62 6 p.

Research output: Contribution to journalConference article

Characterization of metal oxide electrical properties for band engineered catalysis

Kratzer, M. C. & Seebauer, E., Dec 1 2008, AIChE100 - 2008 AIChE Annual Meeting, Conference Proceedings. (AIChE Annual Meeting, Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Charged point defects in semiconductors

Seebauer, E. G. & Kratzer, M. C., Dec 15 2006, In : Materials Science and Engineering R: Reports. 55, 3-6, p. 57-149 93 p.

Research output: Contribution to journalReview article

Charged semiconductor defects structure, thermodynamics and diffusion

Seebauer, E. G. & Kratzer, M. C., 2009, London: Springer.

Research output: Book/Report/Conference proceedingBook

Chemical engineering at... the university of illinois at urbana-champaign

Seebauer, E. G., Kenis, P. J. A. & Miletic, M., Jun 1 2009, In : Chemical Engineering Education. 43, 3, p. 179-185 7 p.

Research output: Contribution to journalArticle

Chemical engineering design projects across the curriculum at a large research-intensive public university

Trenshaw, K. F., Miletic, M., Schlude, J. W., Tillman, A. S., Vogel, T. J., Henderson, J. A. & Seebauer, E. G., 2015, In : International Journal of Engineering Education. 31, 5, p. 1352-1375 24 p.

Research output: Contribution to journalArticle

Chemical vapor deposition of TiSi2 using SiH4 and TiCl4

Mendicino, M. A., Southwell, R. P. & Seebauer, E. G., Dec 15 1994, In : Thin Solid Films. 253, 1-2, p. 473-478 6 p.

Research output: Contribution to journalArticle

Controlling dopant diffusion and activation through surface chemistry

Dev, K., Kwok, C. T. M., Vaidyanathan, R., Braatz, R. D. & Seebauer, E. G., 2006, ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology, IIT 2006. Vol. 866. p. 50-53 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Controlling the CO oxidation rate over Pt/TiO2 catalysts by defect engineering of the TiO2 support

Chua, Y. P. G., Gunasooriya, G. T. K. K., Saeys, M. & Seebauer, E. G., Mar 1 2014, In : Journal of Catalysis. 311, p. 306-313 8 p.

Research output: Contribution to journalArticle

Controlling ultrashallow junction formation through surface chemistry

Seebauer, E. G., Vaidyanathan, R., Dev, K., Kwok, C. T. M. & Braatz, R. D., 2005, 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Conference Proceedings. 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Control of defect concentrations in silicon through surface chemistry

Vaidyanathan, R., Dev, K., Braatz, R. D. & Seebauer, E. G., Dec 1 2005. 1 p.

Research output: Contribution to conferencePaper

Control of defect concentrations within a semiconductor through adsorption

Seebauer, E. G., Dev, K., Jung, M. Y. L., Vaidyanathan, R., Kwok, C. T. M., Ager, J. W., Haller, E. E. & Braatz, R. D., Aug 14 2006, In : Physical review letters. 97, 5, 055503.

Research output: Contribution to journalArticle

Control of methylene blue photo-oxidation rate over polycrystalline anatase TiO2 thin films via carrier concentration

Ong, S. W. D., Lin, J. & Seebauer, E. G., May 28 2015, In : Journal of Physical Chemistry C. 119, 21, p. 11662-11671 10 p.

Research output: Contribution to journalArticle

Control of Photoactivity over Polycrystalline Anatase TiO2 Thin Films via Surface Potential

Ong, S. W. D., Lin, J. & Seebauer, E. G., Nov 9 2015, In : Journal of Physical Chemistry C. 119, 48, p. 27060-27071 12 p.

Research output: Contribution to journalArticle

Coverage-dependent adsorption thermodynamics of oxygen on ZnO(0001)

Li, M. & Seebauer, E. G., Mar 1 2017, In : Applied Surface Science. 397, p. 220-225 6 p.

Research output: Contribution to journalArticle

Decomposition of CH3NH2 on Pt(111)

Hwang, S. Y., Seebauer, E. G. & Schmidt, L. D., Sep 2 1987, In : Surface Science. 188, 1-2, p. 219-234 16 p.

Research output: Contribution to journalArticle

Defect engineering at the nanoscale: Challenges and trends

Seebauer, E. G. & Gorai, P., Dec 1 2012, High Purity Silicon 12. 5 ed. p. 291-302 12 p. (ECS Transactions; vol. 50, no. 5).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Defect engineering by surface chemical state in boron-doped preamorphized silicon

Yeong, S. H., Srinivasan, M. P., Colombeau, B., Chan, L., Akkipeddi, R., Kwok, C. T. M., Vaidyanathan, R. & Seebauer, E. G., Sep 13 2007, In : Applied Physics Letters. 91, 10, 102112.

Research output: Contribution to journalArticle

Defect engineering for ultrashallow junctions using surfaces

Seebauer, E. G., Kwok, C. T. M., Vaidyanathan, R., Kondratenko, Y. V., Yeong, S. H., Srinivasan, M. P., Colombeau, B. & Chan, L., Nov 13 2008, ECS Transactions - Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 4: New Materials, Processes, and Equipment. 1 ed. p. 55-62 8 p. (ECS Transactions; vol. 13, no. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Defect engineering for ultrashallow junctions using surfaces

Seebauer, E. G., Yeong, S. H., Srinivasan, M. P., Kwok, C. T. M., Vaidyanathan, R., Colombeau, B. & Chan, L., Dec 1 2007, ECS Transactions - International Symposium on Advanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS: New Materials, Processes and Equipment, 3. 1 ed. p. 365-371 7 p. (ECS Transactions; vol. 6, no. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Defect engineering for ultra-shallow junctions using surfaces

Seebauer, E. G., Kwok, C. T. M., Vaidyanathan, R., Kondratenko, Y. V., Yeong, S. H., Srinivasan, M. P., Colombeau, B. & Chan, L., Jan 1 2008, Ion Implantation Technology 2008 - 17th International Conference on Ion Implantation Technology, IIT 2008. Seebauer, E. G., Jain, A., Kondratenko, Y. V. & Felch, S. B. (eds.). American Institute of Physics Inc., p. 34-37 4 p. (AIP Conference Proceedings; vol. 1066).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Defect engineering in semiconducting oxides: Control of ZnO surface potential via temperature and oxygen pressure

Li, M. & Seebauer, E. G., Feb 1 2016, In : AIChE Journal. 62, 2, p. 500-507 8 p.

Research output: Contribution to journalArticle

Defect engineering in semiconductors for nanoelectronic devices

Seebauer, E. G., May 5 2010, INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings. p. 58-59 2 p. 5424520. (INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Defect engineering in semiconductors through adsorption and photoexcitation

Seebauer, E. G., Aug 2 2007, ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings. p. 450-453 4 p. 4098133. (ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Defect engineering via surfaces for metal-oxide electronics

Seebauer, E. G., Jan 23 2014, Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014. Zhou, J. & Tang, T-A. (eds.). Institute of Electrical and Electronics Engineers Inc., 7021214. (Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Dependence of near-surface dopant pile-up on post-implant annealing conditions

Gorai, P., Kondratenko, Y. V. & Seebauer, E. G., Dec 1 2012, Ion Implantation Technology 2012 - Proceedings of the 19th International Conference on Ion Implantation Technology. p. 253-256 4 p. (AIP Conference Proceedings; vol. 1496).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Detailed in-situ monitoring of film growth: application to TiSi2 chemical vapor deposition

Mendicino, M. A. & Seebauer, E. G., Dec 1993, In : Journal of Crystal Growth. 134, 3-4, p. 377-385 9 p.

Research output: Contribution to journalArticle

Development of a microreactor for the production of hydrogen from ammonia

Ganley, J. C., Seebauer, E. G. & Masel, R. I., Oct 5 2004, In : Journal of Power Sources. 137, 1, p. 53-61 9 p.

Research output: Contribution to journalArticle