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David N Ruzic
Director, Illinois Plasma Institute
,
Nuclear, Plasma, and Radiological Engineering
Abel Bliss Professor
,
Nuclear, Plasma, and Radiological Engineering
Professor
,
Nuclear, Plasma, and Radiological Engineering
Campus Honors Faculty
,
Office of the Provost
Professor
,
Electrical and Computer Engineering
Professor
,
Micro and Nanotechnology Lab
Professor, Health Care Engineering Systems Center
,
Coordinated Science Lab
Professor
,
Biomedical and Translational Sciences
Email
druzic
illinois
edu
Overview
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Research & Scholarship
(325)
Honors
(6)
Similar Profiles
(6)
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Research output
217
Article
52
Conference contribution
32
Conference article
7
Patent
17
More
5
Review article
3
Paper
3
Editorial
2
Book
2
Chapter
1
Other chapter/report contribution
1
Working paper
Research output per year
Research output per year
7 results
Publication Year, Title
(descending)
Publication Year, Title
(ascending)
Title
Type
Filter
Patent
Search results
2020
Apparatus and method for depositing a coating on a substrate at atmospheric pressure
Shchelkanov, I. A.
,
Hong, J.
,
Cho, T. S.
,
Wu, Y.
,
Ruzic, D. N.
&
Ouyang, Z.
,
Aug 25 2020
, U.S. Patent No. 10752994,
Nov 21 2018
Research output
:
Patent
atmospheric pressure
100%
antennas
97%
coatings
75%
chambers
67%
plasma torches
36%
2019
Apparatus and method for depositing a coating on a substrate at atmospheric pressure
Shchelkanov, I. A.
,
Hong, J.
,
Cho, T. S.
,
Wu, Y.
,
Ruzic, D. N.
&
Ouyang, Z.
,
Jan 1 2019
, U.S. Patent No. 10167556,
Mar 13 2015
Research output
:
Patent
atmospheric pressure
100%
antennas
97%
coatings
75%
chambers
67%
plasma torches
36%
Method of and magnet assembly for high power pulsed magnetron sputtering
Shchelkanov, I. A.
,
Raman, P.
&
Ruzic, D. N.
,
Jun 25 2019
, U.S. Patent No. 10332731,
Oct 8 2015
Research output
:
Patent
assembly
100%
magnetron sputtering
98%
magnets
95%
magnetic fields
58%
rings
48%
Polarization-dependent laser-assisted plasma etching
Ruzic, D. N.
&
Peck, J. A.
,
Dec 17 2019
, U.S. Patent No. 10510550,
Sep 25 2018
Research output
:
Patent
plasma etching
100%
polarization
47%
lasers
38%
polarized light
17%
pulsed lasers
15%
2015
Method of selectively etching a three-dimensional structure
Ruzic, D. N.
&
Sporre, J. R.
,
Oct 27 2015
, U.S. Patent No. 9171733,
Jan 24 2012
Research output
:
Patent
etching
100%
illuminating
32%
laser beams
23%
2013
Method of forming nanoscale three-dimensional patterns in a porous material
Flauta, R. E.
,
Ruzic, D. N.
,
Chow, K.
,
Li, X.
&
Chun, I. S.
,
Jul 16 2013
, U.S. Patent No. 8486843,
Sep 1 2009
Research output
:
Patent
porous materials
100%
metals
27%
porous silicon
19%
packaging
18%
aspect ratio
16%
2009
Submicron particle removal
Neumann, M. J.
,
Ruzic, D. N.
,
Jurczyk, B. E.
,
Qiu, H.
&
Alman, D.
,
May 5 2009
, U.S. Patent No. 7528386,
Dec 5 2005
Research output
:
Patent
particle
94%
microelectronics
48%
manufacturing
31%
contamination
25%