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David N Ruzic

Professor, Nuclear, Plasma, and Radiological Engineering
Abel Bliss Professor, Nuclear, Plasma, and Radiological Engineering
Professor, Micro and Nanotechnology Lab
Campus Honors Faculty, Office of the Provost
Professor, Electrical and Computer Engineering

Emaildruzic@illinois.edu

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Research Output 1978 2019

202 Article
47 Conference contribution
28 Conference article
5 Review article
15 More

2 results
Publication Year, Title (descending)

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2018

Correction to: Removal of Tin from Extreme Ultraviolet Collector Optics by In-Situ Hydrogen Plasma Etching (Plasma Chemistry and Plasma Processing, (2018), 38, 1, (223-245), 10.1007/s11090-017-9852-4)

Elg, D. T., Panici, G. A., Liu, S., Girolami, G. S., Srivastava, S. N. & Ruzic, D. N., Jul 1 2018, In : Plasma Chemistry and Plasma Processing. 38, 4, p. 917-918 2 p.

Research output: Contribution to journal › Comment/debate

Plasma applications

plasma chemistry

Tin

Plasma etching

hydrogen plasma

2002

Erratum: A hydrocarbon reaction model for low temperature hydrogen plasmas and an application to the joint european torus (Physics of Plasmas (2000) 7 (1421))

Alman, D. A., Ruzic, D. N. & Brooks, J. N., Feb 1 2002, In : Physics of Plasmas. 9, 2, 1 p.

Research output: Contribution to journal › Comment/debate

Joint European Torus

hydrogen plasma

cold plasmas

hydrocarbons

physics

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