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Research Output

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Conference contribution
1983

LOW ENERGY NEUTRAL HYDROGEN ATOM EMISSION FROM TOKAMAKS.

Cohen, S. A. & Ruzic, D., Dec 1 1983, Unknown Host Publication Title. de Segovia, J. L. (ed.). Asociacion Espanola de Vacio y sus Aplicaciones, 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1993

TPX divertor design: neutral atom behavior and optimization for pumping

Ruzic, D. N., Juliano, D. R., Turkot, R. B., Werley, K. A., Ulrickson, M., Stotler, D. & Hill, D., Dec 1 1993, Proceedings - Symposium on Fusion Engineering. Publ by IEEE, p. 834-837 4 p. (Proceedings - Symposium on Fusion Engineering; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2005

Density and temperature measurements in the ELM simulating plasma (ESP) gun

Gray, T. K., Masters, B. C., Stubbers, R. & Ruzic, D. N., Jan 1 2005, 21st IEEE/NPS Symposium on Fusion Engineering, SOFE'05. Institute of Electrical and Electronics Engineers Inc., 4018998. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

ELM simulating plasma gun development and experiments

Gray, T. K., Ruzic, D. N., Stubbers, R. & Masters, B. C., 2005, 32nd EPS Conference on Plasma Physics 2005, EPS 2005, Held with the 8th International Workshop on Fast Ignition of Fusion Targets - Europhysics Conference Abstracts. Vol. 2. p. 1442-1445 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Magnetic and thermal characterization of an ELM Simulating Plasma (ESP) with helicon pre-ionization

Masters, B. C., Gray, T. K., Ruzic, D. N. & Stubbers, R., Jan 1 2005, 21st IEEE/NPS Symposium on Fusion Engineering, SOFE'05. Institute of Electrical and Electronics Engineers Inc., 4019017. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Measurement of low energy sputtering of high temperature liquid tin for divertor applications

Coventry, M. D., Stubbers, R. A. & Ruzic, D. N., Jan 1 2005, 21st IEEE/NPS Symposium on Fusion Engineering, SOFE'05. Institute of Electrical and Electronics Engineers Inc., 4018962. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2006

Plasma-Assisted Cleaning by Electrostatics (PACE)

Lytle, W. M., Neumann, M. J. & Ruzic, D. N., Jul 10 2006, Emerging Lithographic Technologies X. Vol. 6151 I. 61511B

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Study of the dynamic evolution and spectral properties of multi-component plasmas for EUV production

Spencer, J. B., Srivastava, S. N., Alman, D. A., Antonsen, E. L., Ruzic, D. N. & MacFarlane, J. J., Jul 10 2006, Emerging Lithographic Technologies X. 615146. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6151 II).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2007

Contamination removal from collector optics and masks: An essential step for next generation lithography

Shin, H., Srivastava, S. N. & Ruzic, D. N., Oct 15 2007, Metrology, Inspection, and Process Control for Microlithography XXI. PART 3 ed. 65184N. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6518, no. PART 3).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Design of an experimental facility to study convection in liquid lithium

Jaworski, M. A. & Ruzic, D. N., Dec 1 2007, Proceedings of the 22nd IEEE/NPSS Symposium on Fusion Engineering - SOFE 07. 4337874. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Overview and status of the Divertor Erosion and Vapor shielding eXperiment (DEVeX)

Gray, T. K., Williams, M. J. & Ruzic, D. N., Dec 1 2007, Proceedings of the 22nd IEEE/NPSS Symposium on Fusion Engineering - SOFE 07. 4337925. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Physical and chemical erosion of Li treated ATJ graphite for NSTX

Racic, M. Z., Ruzic, D. N., Raju, R., Struck, C. & Castano, C. H., Dec 1 2007, Proceedings of the 22nd IEEE/NPSS Symposium on Fusion Engineering - SOFE 07. 4337924. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma-Assisted Cleaning by Electrostatics (PACE)

Lytle, W. M., Shin, H. & Ruzic, D. N., Oct 15 2007, Metrology, Inspection, and Process Control for Microlithography XXI. PART 3 ed. 65183P. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6518, no. PART 3).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Study of RF breakdown mechanisms relevant to an ICH antenna environment

Caughman, J. B. O., Castano-Giraldo, C., Aghazarian, M., Baity, F. W., Rasmussen, D. A. & Ruzic, D. N., Dec 17 2007, RADIO FREQUENCY POWER IN PLASMAS: 17th Topical Conference on Radio Frequency Power in Plasmas. p. 195-202 8 p. (AIP Conference Proceedings; vol. 933).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2008

Ionic debris assessment of various EUVL systems

Castano, C. H., Ruzic, D. N., Srivastava, S. N., Thompson, K. C. & Sporre, J., Dec 1 2008, Emerging Lithographic Technologies XII. 692137. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6921).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lithium debris removal by sputtering and evaporation for EUV optics and applications

Neumann, M. J., Cruce, M. J. & Ruzic, D. N., Dec 1 2008, Emerging Lithographic Technologies XII. 69213D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6921).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma cleaning of nanoparticles from EUV mask materials by electrostatics

Lytle, W. M., Raju, R., Shin, H., Das, C., Neumann, M. J. & Ruzic, D. N., Dec 1 2008, Metrology, Inspection, and Process Control for Microlithography XXII. 69220D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6922).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma properties in the magnetic nozzle of an electron cyclotron resonance plasma source

Rovey, J. L., Stubbers, R. A., Jurczyk, B. E., Williams, M. J., Manley, F. T. & Ruzic, D. N., Dec 1 2008, 44th AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit. (44th AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma Sn cleaning integrated in EUV source system

Shin, H., Raju, R. & Ruzic, D. N., Dec 1 2008, Emerging Lithographic Technologies XII. 692132. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6921).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2009

Measurement of particle flux at the intermediate focus of a DPP source

Sporre, J., Raju, R., Ruzic, D. N., Surla, V. & Goodwin, F., Jun 19 2009, Alternative Lithographic Technologies. 727137. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7271).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Reducing LER using a grazing incidence ion beam

Struck, C. R. M., Raju, R., Neumann, M. J. & Ruzic, D. N., May 29 2009, Advances in Resist Materials and Processing Technology XXVI. 727346. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7273).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Remote plasma cleaning of Sn from an EUV collector mirror

Shin, H., Raju, R. & Ruzic, D. N., Jun 19 2009, Alternative Lithographic Technologies. Vol. 7271. 727131

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Removal of contaminants by plasma assisted cleaning by metastable atom neutralization (PACMAN)

Lytle, W. M., Szybilski, D. S., Das, C. E., Raju, R. & Ruzic, D. N., Jun 19 2009, Alternative Lithographic Technologies. 72713C. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7271).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sputtering studies of lithiated ATJ graphite by lithium ion bombardment

Ibano, K., Surla, V. & Ruzic, D. N., Nov 10 2009, 2009 23rd IEEE/NPSS Symposium on Fusion Engineering, SOFE 2009. 5226432. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2010

Debris measurement at the intermediate focus of a laser-assisted discharge-produced plasma light source

Sporre, J., Surla, V., Neumann, M. J., Ruzic, D. N., Ren, L. & Goodwin, F., Jun 17 2010, Extreme Ultraviolet (EUV) Lithography. 763611. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7636).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Laboratory-scale lithium research's relevance to fusion devices

Surla, V., Xu, W., Jung, S., Raman, P. & Ruzic, D. N., Dec 1 2010, 37th EPS Conference on Plasma Physics 2010, EPS 2010. p. 890-893 4 p. (37th EPS Conference on Plasma Physics 2010, EPS 2010; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Removal of carbon and nanoparticles from lithographic materials by plasma assisted cleaning by metastable atom neutralization (PACMAN)

Lytle, W. M., Lofgren, R. E., Surla, V., Neumann, M. J. & Ruzic, D. N., Jun 17 2010, Extreme Ultraviolet (EUV) Lithography. 76360O. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7636).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sn debris cleaning by plasma in DPP EUV source systems for HVM

Shin, H., Surla, V., Neumann, M. J. & Ruzic, D. N., Jun 17 2010, Extreme Ultraviolet (EUV) Lithography. 76360B. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7636).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2011

Development of an in-situ Sn cleaning method for extreme ultraviolet light lithography

Sporre, J., Lofgren, R. E., Ruzic, D. N., Khodykin, O. V. & Myers, D. W., Jun 8 2011, Extreme Ultraviolet (EUV) Lithography II. 796929. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7969).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Laboratory investigation of vapor shielding for lithium-coated molybdenum in DEVeX

Jung, S., Andruczyk, D. & Ruzic, D. N., Nov 16 2011, 2011 IEEE/NPSS 24th Symposium on Fusion Engineering, SOFE 2011. 6052299. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma-assisted cleaning by metastable-atom neutralization (PACMAN): A plasma approach to cleanliness in lithography

Lytle, W. M., Andruczyk, D., Jindal, V. & Ruzic, D. N., Jun 8 2011, Extreme Ultraviolet (EUV) Lithography II. Vol. 7969. 796927

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2012

Energetic ion and neutral energy analyzer for extreme-ultraviolet light sources

Andruczyk, D., Sporre, J., Elg, D., Cho, T. & Ruzic, D. N., May 31 2012, Extreme Ultraviolet (EUV) Lithography III. 832237. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

In-situ Sn contamination removal by hydrogen plasma

Sporre, J., Elg, D., Andruczyk, D., Cho, T., Ruzic, D. N., Srivastava, S. N. & Brandt, D. C., May 31 2012, Extreme Ultraviolet (EUV) Lithography III. 83222L. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Modeling the ion beam-target interaction to reduce defects generated by ion beam deposition

Cardinal, T., Andruczyk, D., Yu, H., Jindal, V., Kearney, P. & Ruzic, D. N., May 31 2012, Extreme Ultraviolet (EUV) Lithography III. 83222Q. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Origin of EUV mask blank defects from ion beam deposition

Yu, H., Andruczyk, D., Ruzic, D. N., Jindal, V., Kearney, P. & Jiang, Y., May 31 2012, Extreme Ultraviolet (EUV) Lithography III. 83221T. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Understanding the ion beam in EUV mask blank production

Kearney, P., Jindal, V., Weaver, A., Teora, P., Sporre, J., Ruzic, D. N. & Goodwin, F., 2012, Extreme Ultraviolet (EUV) Lithography III. Vol. 8322. 83221U

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2013

A method to produce lithium pellets for fueling and ELM pacing in NSTX-U

Andruczyk, D., Roquemore, A. L., Fiflis, P., Mansfield, D. & Ruzic, D. N., Dec 23 2013, 2013 IEEE 25th Symposium on Fusion Engineering, SOFE 2013. 6635370. (2013 IEEE 25th Symposium on Fusion Engineering, SOFE 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Collector optic in-situ Sn removal using hydrogen plasma

Sporre, J. R., Elg, D., Ruzic, D. N., Srivastava, S. N., Fomenkov, I. V. & Brandt, D. C., Jun 5 2013, Extreme Ultraviolet (EUV) Lithography IV. 86792H. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8679).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Contamination concerns at the intermediate focus of an extreme ultraviolet light source

Ruzic, D. N., Sporre, J., Elg, D. & Curreli, D., Jun 5 2013, Extreme Ultraviolet (EUV) Lithography IV. 86790D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8679).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Magnetic mitigation of debris for EUV sources

Elg, D., Sporre, J., Curreli, D., Ruzic, D. N. & Umstadter, K. R., Jun 5 2013, Extreme Ultraviolet (EUV) Lithography IV. 86792M. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8679).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2014

Modeling of melt-pool formation and material removal in micro electro-discharge machining

Mujumdar, S. S., Curreli, D., Kapoor, S. G. & Ruzic, D. N., Jan 1 2014, ASME 2014 International Manufacturing Science and Engineering Conference, MSEC 2014 Collocated with the JSME 2014 International Conference on Materials and Processing and the 42nd North American Manufacturing Research Conference. Web Portal ASME (American Society of Mechanical Engineers), (ASME 2014 International Manufacturing Science and Engineering Conference, MSEC 2014 Collocated with the JSME 2014 International Conference on Materials and Processing and the 42nd North American Manufacturing Research Conference; vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2015

Collector optic cleaning by in-situ hydrogen plasma

Elg, D. T., Panici, G. A., Srivastava, S. N. & Ruzic, D. N., Jan 1 2015, Extreme Ultraviolet (EUV) Lithography VI. Wood, O. R. & Panning, E. M. (eds.). SPIE, 94222H. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9422).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

HIDRA: Hybrid Illinois device for research and applications

HIDRA Team, Oct 1 2015, Fusion Science and Technology. 3 ed. Taylor and Francis Inc., Vol. 68. p. 497-500 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2016

Study of Sn removal processes for in-situ collector cleaning

Elg, D. T., Panici, G. A., Srivastava, S. N. & Ruzic, D. N., Jan 1 2016, Extreme Ultraviolet (EUV) Lithography VII. Panning, E. M. & Goldberg, K. A. (eds.). SPIE, 97760M. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9776).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Wetting of lithium on nanostructured surfaces for first wall components

Szott, M., Fiflis, P., Kalathiparambil, K., Shchelkanov, I., Ruzic, D. N., Jurczyk, B., Stubbers, R. & Foster, C. J., May 31 2016, 2015 IEEE 26th Symposium on Fusion Engineering, SOFE 2015. Institute of Electrical and Electronics Engineers Inc., 7482285. (Proceedings - Symposium on Fusion Engineering; vol. 2016-May).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2017

Study of Sn removal by surface wave plasma for source cleaning

Panici, G., Qerimi, D. & Ruzic, D. N., Jan 1 2017, Extreme Ultraviolet (EUV) Lithography VIII. Goldberg, K. A. & Panning, E. M. (eds.). SPIE, 101432I. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10143).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2018

Amelioration of plasma-material interactions and ELMs, and improvement to plasma performance with lithium injection and conditioning in EAST

Maingi, R., Hu, J. S., Andruczyk, D., Canik, J. M., Diallo, A., Gan, K. F., Gilson, E. P., Gong, X. Z., Gray, T. K., Huang, M., Lunsford, R., Mansfield, D. K., Meng, X. C., Osborne, T. H., Ruzic, D. N., Sun, Z., Tritz, K., Xu, W., Zuo, G. Z., Wang, Z. & 3 others, Wirth, B. D., Woller, K. & Zinkle, S. J., Jan 1 2018, 45th EPS Conference on Plasma Physics, EPS 2018. Michaut, C., Berndt, J., Mantsinen, M., Coda, S., Lapenta, G. & Weber, S. (eds.). European Physical Society (EPS), p. 641-644 4 p. (45th EPS Conference on Plasma Physics, EPS 2018; vol. 2018-July).

Research output: Chapter in Book/Report/Conference proceedingConference contribution