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Research Output 1978 2019

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Conference contribution
2018

Amelioration of plasma-material interactions and ELMs, and improvement to plasma performance with lithium injection and conditioning in EAST

Maingi, R., Hu, J. S., Andruczyk, D., Canik, J. M., Diallo, A., Gan, K. F., Gilson, E. P., Gong, X. Z., Gray, T. K., Huang, M., Lunsford, R., Mansfield, D. K., Meng, X. C., Osborne, T. H., Ruzic, D. N., Sun, Z., Tritz, K., Xu, W., Zuo, G. Z., Wang, Z. & 3 others, Wirth, B. D., Woller, K. & Zinkle, S. J., Jan 1 2018, 45th EPS Conference on Plasma Physics, EPS 2018. Michaut, C., Berndt, J., Mantsinen, M., Coda, S., Lapenta, G. & Weber, S. (eds.). European Physical Society (EPS), p. 641-644 4 p. (45th EPS Conference on Plasma Physics, EPS 2018; vol. 2018-July).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

conditioning
lithium
injection
interactions
2017

Study of Sn removal by surface wave plasma for source cleaning

Panici, G., Qerimi, D. & Ruzic, D. N., Jan 1 2017, Extreme Ultraviolet (EUV) Lithography VIII. Goldberg, K. A. & Panning, E. M. (eds.). SPIE, 101432I. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10143).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cleaning
Surface Waves
Surface waves
cleaning
surface waves
2016

Study of Sn removal processes for in-situ collector cleaning

Elg, D. T., Panici, G. A., Srivastava, S. N. & Ruzic, D. N., Jan 1 2016, Extreme Ultraviolet (EUV) Lithography VII. Panning, E. M. & Goldberg, K. A. (eds.). SPIE, 97760M. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9776).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cleaning
accumulators
cleaning
Hydrogen
Etching

Wetting of lithium on nanostructured surfaces for first wall components

Szott, M., Fiflis, P., Kalathiparambil, K., Shchelkanov, I., Ruzic, D. N., Jurczyk, B., Stubbers, R. & Foster, C. J., May 31 2016, 2015 IEEE 26th Symposium on Fusion Engineering, SOFE 2015. Institute of Electrical and Electronics Engineers Inc., 7482285. (Proceedings - Symposium on Fusion Engineering; vol. 2016-May).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

liquid metals
Liquid metals
wetting
Wetting
Lithium
2015

Collector optic cleaning by in-situ hydrogen plasma

Elg, D. T., Panici, G. A., Srivastava, S. N. & Ruzic, D. N., Jan 1 2015, Extreme Ultraviolet (EUV) Lithography VI. Wood, O. R. & Panning, E. M. (eds.). SPIE, 94222H. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9422).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cleaning
hydrogen plasma
accumulators
cleaning
Hydrogen

HIDRA: Hybrid Illinois device for research and applications

HIDRA Team, Oct 1 2015, Fusion Science and Technology. 3 ed. Taylor and Francis Inc., Vol. 68. p. 497-500 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasmas
Beam plasma interactions
plasma physics
education
Fusion reactions
2014

Modeling of melt-pool formation and material removal in micro electro-discharge machining

Mujumdar, S. S., Curreli, D., Kapoor, S. G. & Ruzic, D. N., Jan 1 2014, ASME 2014 International Manufacturing Science and Engineering Conference, MSEC 2014 Collocated with the JSME 2014 International Conference on Materials and Processing and the 42nd North American Manufacturing Research Conference. Web Portal ASME (American Society of Mechanical Engineers), (ASME 2014 International Manufacturing Science and Engineering Conference, MSEC 2014 Collocated with the JSME 2014 International Conference on Materials and Processing and the 42nd North American Manufacturing Research Conference; vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Electric discharge machining
Plasmas
Heat flux
Electrodes
Electric potential
2013

A method to produce lithium pellets for fueling and ELM pacing in NSTX-U

Andruczyk, D., Roquemore, A. L., Fiflis, P., Mansfield, D. & Ruzic, D. N., Dec 23 2013, 2013 IEEE 25th Symposium on Fusion Engineering, SOFE 2013. 6635370. (2013 IEEE 25th Symposium on Fusion Engineering, SOFE 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fueling
Lithium
Plasmas
Wood
Drop formation

Collector optic in-situ Sn removal using hydrogen plasma

Sporre, J. R., Elg, D., Ruzic, D. N., Srivastava, S. N., Fomenkov, I. V. & Brandt, D. C., Jun 5 2013, Extreme Ultraviolet (EUV) Lithography IV. 86792H. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8679).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cleaning
hydrogen plasma
accumulators
cleaning
Hydrogen

Contamination concerns at the intermediate focus of an extreme ultraviolet light source

Ruzic, D. N., Sporre, J., Elg, D. & Curreli, D., Jun 5 2013, Extreme Ultraviolet (EUV) Lithography IV. 86790D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8679).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Contamination
Ultraviolet
ultraviolet radiation
Light sources
Buffer

Magnetic mitigation of debris for EUV sources

Elg, D., Sporre, J., Curreli, D., Ruzic, D. N. & Umstadter, K. R., 2013, Extreme Ultraviolet (EUV) Lithography IV. Vol. 8679. 86792M

Research output: Chapter in Book/Report/Conference proceedingConference contribution

debris
Debris
Ultraviolet
Deflection
deflection
2012

Energetic ion and neutral energy analyzer for extreme-ultraviolet light sources

Andruczyk, D., Sporre, J., Elg, D., Cho, T. & Ruzic, D. N., May 31 2012, Extreme Ultraviolet (EUV) Lithography III. 832237. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ultraviolet
ultraviolet radiation
Light sources
analyzers
light sources

In-situ Sn contamination removal by hydrogen plasma

Sporre, J., Elg, D., Andruczyk, D., Cho, T., Ruzic, D. N., Srivastava, S. N. & Brandt, D. C., May 31 2012, Extreme Ultraviolet (EUV) Lithography III. 83222L. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cleaning
hydrogen plasma
Contamination
cleaning
Hydrogen

Modeling the ion beam-target interaction to reduce defects generated by ion beam deposition

Cardinal, T., Andruczyk, D., Yu, H., Jindal, V., Kearney, P. & Ruzic, D. N., May 31 2012, Extreme Ultraviolet (EUV) Lithography III. 83222Q. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Beam plasma interactions
Ion beams
Defects
ion beams
Target

Origin of EUV mask blank defects from ion beam deposition

Yu, H., Andruczyk, D., Ruzic, D. N., Jindal, V., Kearney, P. & Jiang, Y., May 31 2012, Extreme Ultraviolet (EUV) Lithography III. 83221T. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

EUV Mask
blanks
Silicon
Ion beams
Masks

Understanding the ion beam in EUV mask blank production

Kearney, P., Jindal, V., Weaver, A., Teora, P., Sporre, J., Ruzic, D. N. & Goodwin, F., 2012, Extreme Ultraviolet (EUV) Lithography III. Vol. 8322. 83221U

Research output: Chapter in Book/Report/Conference proceedingConference contribution

EUV Mask
blanks
Ion beams
Masks
masks
2011

Development of an in-situ Sn cleaning method for extreme ultraviolet light lithography

Sporre, J., Lofgren, R. E., Ruzic, D. N., Khodykin, O. V. & Myers, D. W., Jun 8 2011, Extreme Ultraviolet (EUV) Lithography II. 796929. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7969).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cleaning
Lithography
Ultraviolet
ultraviolet radiation
cleaning

Laboratory investigation of vapor shielding for lithium-coated molybdenum in DEVeX

Jung, S., Andruczyk, D. & Ruzic, D. N., Nov 16 2011, 2011 IEEE/NPSS 24th Symposium on Fusion Engineering, SOFE 2011. 6052299. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shielding
Molybdenum
molybdenum
shielding
Langmuir probes

Plasma-assisted cleaning by metastable-atom neutralization (PACMAN): A plasma approach to cleanliness in lithography

Lytle, W. M., Andruczyk, D., Jindal, V. & Ruzic, D. N., Jun 8 2011, Extreme Ultraviolet (EUV) Lithography II. Vol. 7969. 796927

Research output: Chapter in Book/Report/Conference proceedingConference contribution

cleanliness
metastable atoms
Cleaning
Lithography
cleaning
2010

Debris measurement at the intermediate focus of a laser-assisted discharge-produced plasma light source

Sporre, J., Surla, V., Neumann, M. J., Ruzic, D. N., Ren, L. & Goodwin, F., Jun 17 2010, Extreme Ultraviolet (EUV) Lithography. 763611. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7636).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

debris
Debris
plasma jets
Light sources
light sources

Laboratory-scale lithium research's relevance to fusion devices

Surla, V., Xu, W., Jung, S., Raman, P. & Ruzic, D. N., Dec 1 2010, 37th EPS Conference on Plasma Physics 2010, EPS 2010. p. 890-893 4 p. (37th EPS Conference on Plasma Physics 2010, EPS 2010; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

erosion
lithium
fusion
liquid lithium
magnetohydrodynamics

Removal of carbon and nanoparticles from lithographic materials by plasma assisted cleaning by metastable atom neutralization (PACMAN)

Lytle, W. M., Lofgren, R. E., Surla, V., Neumann, M. J. & Ruzic, D. N., Jun 17 2010, Extreme Ultraviolet (EUV) Lithography. 76360O. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7636).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

metastable atoms
Cleaning
cleaning
Nanoparticles
Carbon

Sn debris cleaning by plasma in DPP EUV source systems for HVM

Shin, H., Surla, V., Neumann, M. J. & Ruzic, D. N., Jun 17 2010, Extreme Ultraviolet (EUV) Lithography. 76360B. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7636).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

EUV Source
Cleaning
debris
Debris
cleaning
2009

Measurement of particle flux at the intermediate focus of a DPP source

Sporre, J., Raju, R., Ruzic, D. N., Surla, V. & Goodwin, F., Jun 19 2009, Alternative Lithographic Technologies. 727137. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7271).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma sources
flux (rate)
plasma jets
Plasma
Detector

Reducing LER using a grazing incidence ion beam

Struck, C. R. M., Raju, R., Neumann, M. J. & Ruzic, D. N., May 29 2009, Advances in Resist Materials and Processing Technology XXVI. 727346. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7273).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

grazing incidence
Roughness
Ion beams
Incidence
roughness

Remote plasma cleaning of Sn from an EUV collector mirror

Shin, H., Raju, R. & Ruzic, D. N., Jun 19 2009, Alternative Lithographic Technologies. Vol. 7271. 727131

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cleaning
Ultraviolet
accumulators
cleaning
Mirror

Removal of contaminants by plasma assisted cleaning by metastable atom neutralization (PACMAN)

Lytle, W. M., Szybilski, D. S., Das, C. E., Raju, R. & Ruzic, D. N., Jun 19 2009, Alternative Lithographic Technologies. 72713C. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7271).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

metastable atoms
Cleaning
cleaning
contaminants
Plasma

Sputtering studies of lithiated ATJ graphite by lithium ion bombardment

Ibano, K., Surla, V. & Ruzic, D. N., Nov 10 2009, 2009 23rd IEEE/NPSS Symposium on Fusion Engineering, SOFE 2009. 5226432. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ion bombardment
Sputtering
bombardment
Graphite
Lithium
2008

Ionic debris assessment of various EUVL systems

Castano, C. H., Ruzic, D. N., Srivastava, S. N., Thompson, K. C. & Sporre, J., Dec 1 2008, Emerging Lithographic Technologies XII. 692137. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6921).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

EUV Source
Extreme ultraviolet lithography
Extreme Ultraviolet Lithography
debris
Debris

Lithium debris removal by sputtering and evaporation for EUV optics and applications

Neumann, M. J., Cruce, M. J. & Ruzic, D. N., Dec 1 2008, Emerging Lithographic Technologies XII. 69213D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6921).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sputtering
Evaporation
Lithium
debris
Debris

Plasma cleaning of nanoparticles from EUV mask materials by electrostatics

Lytle, W. M., Raju, R., Shin, H., Das, C., Neumann, M. J. & Ruzic, D. N., Dec 1 2008, Metrology, Inspection, and Process Control for Microlithography XXII. 69220D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6922).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cleaning
Ultraviolet
Electrostatics
cleaning
Mask

Plasma properties in the magnetic nozzle of an electron cyclotron resonance plasma source

Rovey, J. L., Stubbers, R. A., Jurczyk, B. E., Williams, M. J., Manley, F. T. & Ruzic, D. N., Dec 1 2008, 44th AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit. (44th AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Magnetic nozzles
magnetic nozzles
Electron cyclotron resonance
Plasma sources
electron cyclotron resonance

Plasma Sn cleaning integrated in EUV source system

Shin, H., Raju, R. & Ruzic, D. N., Dec 1 2008, Emerging Lithographic Technologies XII. 692132. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6921).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

EUV Source
Cleaning
cleaning
Plasma
Plasmas
2007

Contamination removal from collector optics and masks: An essential step for next generation lithography

Shin, H., Srivastava, S. N. & Ruzic, D. N., Oct 15 2007, Metrology, Inspection, and Process Control for Microlithography XXI. PART 3 ed. 65184N. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6518, no. PART 3).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Contamination
Lithography
accumulators
Mask
Tin

Design of an experimental facility to study convection in liquid lithium

Jaworski, M. A. & Ruzic, D. N., Dec 1 2007, Proceedings of the 22nd IEEE/NPSS Symposium on Fusion Engineering - SOFE 07. 4337874. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lithium
Liquids
Heat flux
Electron beams
Magnetic fields

Overview and status of the Divertor Erosion and Vapor shielding eXperiment (DEVeX)

Gray, T. K., Williams, M. J. & Ruzic, D. N., Dec 1 2007, Proceedings of the 22nd IEEE/NPSS Symposium on Fusion Engineering - SOFE 07. 4337925. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shielding
erosion
shielding
Erosion
Vapors

Physical and chemical erosion of Li treated ATJ graphite for NSTX

Racic, M. Z., Ruzic, D. N., Raju, R., Struck, C. & Castano, C. H., Dec 1 2007, Proceedings of the 22nd IEEE/NPSS Symposium on Fusion Engineering - SOFE 07. 4337924. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

erosion
Erosion
Graphite
Lithium
graphite

Plasma-Assisted Cleaning by Electrostatics (PACE)

Lytle, W. M., Shin, H. & Ruzic, D. N., Oct 15 2007, Metrology, Inspection, and Process Control for Microlithography XXI. PART 3 ed. 65183P. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6518, no. PART 3).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cleaning
Contamination
Electrostatics
cleaning
contamination

Study of RF breakdown mechanisms relevant to an ICH antenna environment

Caughman, J. B. O., Castano-Giraldo, C., Aghazarian, M., Baity, F. W., Rasmussen, D. A. & Ruzic, D. N., Dec 17 2007, RADIO FREQUENCY POWER IN PLASMAS: 17th Topical Conference on Radio Frequency Power in Plasmas. p. 195-202 8 p. (AIP Conference Proceedings; vol. 933).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

antennas
breakdown
electrodes
light emission
arcs
2006

Plasma-Assisted Cleaning by Electrostatics (PACE)

Lytle, W. M., Neumann, M. J. & Ruzic, D. N., Jul 10 2006, Emerging Lithographic Technologies X. Vol. 6151 I. 61511B

Research output: Chapter in Book/Report/Conference proceedingConference contribution

cleaning
Electrostatics
Cleaning
Plasma sheaths
electrostatics

Study of the dynamic evolution and spectral properties of multi-component plasmas for EUV production

Spencer, J. B., Srivastava, S. N., Alman, D. A., Antonsen, E. L., Ruzic, D. N. & MacFarlane, J. J., Jul 10 2006, Emerging Lithographic Technologies X. 615146. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6151 II).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Spectral Properties
Ultraviolet
Extremes
Plasma
Plasmas
2005

Density and temperature measurements in the ELM simulating plasma (ESP) gun

Gray, T. K., Masters, B. C., Stubbers, R. & Ruzic, D. N., Jan 1 2005, 21st IEEE/NPS Symposium on Fusion Engineering, SOFE'05. Institute of Electrical and Electronics Engineers Inc., 4018998. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma guns
plasma guns
Temperature measurement
temperature measurement
Experimental reactors

ELM simulating plasma gun development and experiments

Gray, T. K., Ruzic, D. N., Stubbers, R. & Masters, B. C., 2005, 32nd EPS Conference on Plasma Physics 2005, EPS 2005, Held with the 8th International Workshop on Fast Ignition of Fusion Targets - Europhysics Conference Abstracts. Vol. 2. p. 1442-1445 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

plasma guns

Magnetic and thermal characterization of an ELM Simulating Plasma (ESP) with helicon pre-ionization

Masters, B. C., Gray, T. K., Ruzic, D. N. & Stubbers, R., Jan 1 2005, 21st IEEE/NPS Symposium on Fusion Engineering, SOFE'05. Institute of Electrical and Electronics Engineers Inc., 4019017. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Helicons
Ionization
Magnetic fields
Plasmas
Heating

Measurement of low energy sputtering of high temperature liquid tin for divertor applications

Coventry, M. D., Stubbers, R. A. & Ruzic, D. N., Jan 1 2005, 21st IEEE/NPS Symposium on Fusion Engineering, SOFE'05. Institute of Electrical and Electronics Engineers Inc., 4018962. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tin
Sputtering
Ion bombardment
Heavy ions
Liquids
1993

TPX divertor design: neutral atom behavior and optimization for pumping

Ruzic, D. N., Juliano, D. R., Turkot, R. B., Werley, K. A., Ulrickson, M., Stotler, D. & Hill, D., Dec 1 1993, Proceedings - Symposium on Fusion Engineering. Publ by IEEE, p. 834-837 4 p. (Proceedings - Symposium on Fusion Engineering; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Throughput
Atoms
Plasmas
Fluids
Geometry
1983

LOW ENERGY NEUTRAL HYDROGEN ATOM EMISSION FROM TOKAMAKS.

Cohen, S. A. & Ruzic, D. N., 1983, Unknown Host Publication Title. de Segovia, J. L. (ed.). Asociacion Espanola de Vacio y sus Aplicaciones, p. 598 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasmas
Atoms
Hydrogen
Recycling
Ion exchange