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  • 2023

    Plasma Enhanced CO2 Recombination in EUV Drive Lasers

    Herschberg, A. C., Bartlett, N., Crouse, J. & Ruzic, D. N., 2023, Optical and EUV Nanolithography XXXVI. Lio, A. (ed.). SPIE, 124941D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12494).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Scattering Cross Sections of Tin Ions With Molecular Hydrogen

    Bartlett, N., Herschberg, A., Crouse, J., Garza, R., Ganeson, R., Dallal, T. A., Nuttall, J., Ringstad, L. & Ruzic, D. N., 2023, Optical and EUV Nanolithography XXXVI. Lio, A. (ed.). SPIE, 124941F. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12494).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 2022

    Single electrode a.C. plasma anemometer in high speed h2 jet with background rf plasma

    Matlis, E. H., Corke, T. C., Qerimi, D. & Ruzic, D., 2022, AIAA AVIATION 2022 Forum. American Institute of Aeronautics and Astronautics Inc, AIAA, AIAA 2022-3364. (AIAA AVIATION 2022 Forum).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 2018

    Amelioration of plasma-material interactions and ELMs, and improvement to plasma performance with lithium injection and conditioning in EAST

    Maingi, R., Hu, J. S., Andruczyk, D., Canik, J. M., Diallo, A., Gan, K. F., Gilson, E. P., Gong, X. Z., Gray, T. K., Huang, M., Lunsford, R., Mansfield, D. K., Meng, X. C., Osborne, T. H., Ruzic, D. N., Sun, Z., Tritz, K., Xu, W., Zuo, G. Z., Wang, Z., & 3 othersWirth, B. D., Woller, K. & Zinkle, S. J., 2018, 45th EPS Conference on Plasma Physics, EPS 2018. Michaut, C., Berndt, J., Mantsinen, M., Coda, S., Lapenta, G. & Weber, S. (eds.). European Physical Society (EPS), p. 641-644 4 p. (45th EPS Conference on Plasma Physics, EPS 2018; vol. 2018-July).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Critical heat flux on laser-textured surface in vertical flow boiling

    Bottini, J. L., Kumar, V., Hammouti, S., Ruzic, D. & Brooks, C. S., 2018, Proceedings of the 3rd Thermal and Fluid Engineering Summer Conference, TFESC 2018. Begell House Inc., p. 1007-1017 11 p. (Proceedings of the Thermal and Fluids Engineering Summer Conference; vol. 2018-March).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Ion Cyclotron Resonance Heating on Proto-MPEX

    Piotrowicz, P. A., Ruzic, D. N., Caneses, J. F., Caughman, J. B. O., Goulding, R. H., Green, D. L., Lore, J. D. & Rapp, J., Jun 24 2018, ICOPS 2018 - 45th IEEE International Conference on Plasma Science. Institute of Electrical and Electronics Engineers Inc., (IEEE International Conference on Plasma Science; vol. 2018-June).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 2017

    Study of Sn removal by surface wave plasma for source cleaning

    Panici, G., Qerimi, D. & Ruzic, D. N., 2017, Extreme Ultraviolet (EUV) Lithography VIII. Goldberg, K. A. & Panning, E. M. (eds.). SPIE, 101432I. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10143).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 2016

    Study of Sn removal processes for in-situ collector cleaning

    Elg, D. T., Panici, G. A., Srivastava, S. N. & Ruzic, D. N., 2016, Extreme Ultraviolet (EUV) Lithography VII. Panning, E. M. & Goldberg, K. A. (eds.). SPIE, 97760M. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9776).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Wetting of lithium on nanostructured surfaces for first wall components

    Szott, M., Fiflis, P., Kalathiparambil, K., Shchelkanov, I., Ruzic, D. N., Jurczyk, B., Stubbers, R. & Foster, C. J., May 31 2016, 2015 IEEE 26th Symposium on Fusion Engineering, SOFE 2015. Institute of Electrical and Electronics Engineers Inc., 7482285. (Proceedings - Symposium on Fusion Engineering; vol. 2016-May).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 2015

    Collector optic cleaning by in-situ hydrogen plasma

    Elg, D. T., Panici, G. A., Srivastava, S. N. & Ruzic, D. N., 2015, Extreme Ultraviolet (EUV) Lithography VI. Wood, O. R. & Panning, E. M. (eds.). SPIE, 94222H. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9422).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • HIDRA: Hybrid Illinois device for research and applications

    HIDRA Team, Oct 1 2015, Fusion Science and Technology. 3 ed. Taylor and Francis Inc., Vol. 68. p. 497-500 4 p.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 2014

    Modeling of melt-pool formation and material removal in micro electro-discharge machining

    Mujumdar, S. S., Curreli, D., Kapoor, S. G. & Ruzic, D. N., 2014, ASME 2014 International Manufacturing Science and Engineering Conference, MSEC 2014 Collocated with the JSME 2014 International Conference on Materials and Processing and the 42nd North American Manufacturing Research Conference. Web Portal ASME (American Society of Mechanical Engineers), (ASME 2014 International Manufacturing Science and Engineering Conference, MSEC 2014 Collocated with the JSME 2014 International Conference on Materials and Processing and the 42nd North American Manufacturing Research Conference; vol. 1).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 2013

    A method to produce lithium pellets for fueling and ELM pacing in NSTX-U

    Andruczyk, D., Roquemore, A. L., Fiflis, P., Mansfield, D. & Ruzic, D. N., 2013, 2013 IEEE 25th Symposium on Fusion Engineering, SOFE 2013. 6635370. (2013 IEEE 25th Symposium on Fusion Engineering, SOFE 2013).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Collector optic in-situ Sn removal using hydrogen plasma

    Sporre, J. R., Elg, D., Ruzic, D. N., Srivastava, S. N., Fomenkov, I. V. & Brandt, D. C., 2013, Extreme Ultraviolet (EUV) Lithography IV. 86792H. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8679).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Contamination concerns at the intermediate focus of an extreme ultraviolet light source

    Ruzic, D. N., Sporre, J., Elg, D. & Curreli, D., 2013, Extreme Ultraviolet (EUV) Lithography IV. 86790D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8679).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Magnetic mitigation of debris for EUV sources

    Elg, D., Sporre, J., Curreli, D., Ruzic, D. N. & Umstadter, K. R., 2013, Extreme Ultraviolet (EUV) Lithography IV. 86792M. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8679).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 2012

    Energetic ion and neutral energy analyzer for extreme-ultraviolet light sources

    Andruczyk, D., Sporre, J., Elg, D., Cho, T. & Ruzic, D. N., 2012, Extreme Ultraviolet (EUV) Lithography III. 832237. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • In-situ Sn contamination removal by hydrogen plasma

    Sporre, J., Elg, D., Andruczyk, D., Cho, T., Ruzic, D. N., Srivastava, S. N. & Brandt, D. C., 2012, Extreme Ultraviolet (EUV) Lithography III. 83222L. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Modeling the ion beam-target interaction to reduce defects generated by ion beam deposition

    Cardinal, T., Andruczyk, D., Yu, H., Jindal, V., Kearney, P. & Ruzic, D. N., 2012, Extreme Ultraviolet (EUV) Lithography III. 83222Q. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Origin of EUV mask blank defects from ion beam deposition

    Yu, H., Andruczyk, D., Ruzic, D. N., Jindal, V., Kearney, P. & Jiang, Y., 2012, Extreme Ultraviolet (EUV) Lithography III. 83221T. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Understanding the ion beam in EUV mask blank production

    Kearney, P., Jindal, V., Weaver, A., Teora, P., Sporre, J., Ruzic, D. N. & Goodwin, F., 2012, Extreme Ultraviolet (EUV) Lithography III. 83221U. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 2011

    Development of an in-situ Sn cleaning method for extreme ultraviolet light lithography

    Sporre, J., Lofgren, R. E., Ruzic, D. N., Khodykin, O. V. & Myers, D. W., 2011, Extreme Ultraviolet (EUV) Lithography II. 796929. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7969).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Laboratory investigation of vapor shielding for lithium-coated molybdenum in DEVeX

    Jung, S., Andruczyk, D. & Ruzic, D. N., 2011, 2011 IEEE/NPSS 24th Symposium on Fusion Engineering, SOFE 2011. 6052299. (Proceedings - Symposium on Fusion Engineering).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Plasma-assisted cleaning by metastable-atom neutralization (PACMAN): A plasma approach to cleanliness in lithography

    Lytle, W. M., Andruczyk, D., Jindal, V. & Ruzic, D. N., 2011, Extreme Ultraviolet (EUV) Lithography II. 796927. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7969).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 2010

    Debris measurement at the intermediate focus of a laser-assisted discharge-produced plasma light source

    Sporre, J., Surla, V., Neumann, M. J., Ruzic, D. N., Ren, L. & Goodwin, F., 2010, Extreme Ultraviolet (EUV) Lithography. 763611. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7636).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Laboratory-scale lithium research's relevance to fusion devices

    Surla, V., Xu, W., Jung, S., Raman, P. & Ruzic, D. N., 2010, 37th EPS Conference on Plasma Physics 2010, EPS 2010. p. 890-893 4 p. (37th EPS Conference on Plasma Physics 2010, EPS 2010; vol. 2).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Removal of carbon and nanoparticles from lithographic materials by plasma assisted cleaning by metastable atom neutralization (PACMAN)

    Lytle, W. M., Lofgren, R. E., Surla, V., Neumann, M. J. & Ruzic, D. N., 2010, Extreme Ultraviolet (EUV) Lithography. 76360O. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7636).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Sn debris cleaning by plasma in DPP EUV source systems for HVM

    Shin, H., Surla, V., Neumann, M. J. & Ruzic, D. N., 2010, Extreme Ultraviolet (EUV) Lithography. 76360B. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7636).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 2009

    Measurement of particle flux at the intermediate focus of a DPP source

    Sporre, J., Raju, R., Ruzic, D. N., Surla, V. & Goodwin, F., 2009, Alternative Lithographic Technologies. 727137. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7271).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Reducing LER using a grazing incidence ion beam

    Struck, C. R. M., Raju, R., Neumann, M. J. & Ruzic, D. N., 2009, Advances in Resist Materials and Processing Technology XXVI. 727346. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7273).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Remote plasma cleaning of Sn from an EUV collector mirror

    Shin, H., Raju, R. & Ruzic, D. N., 2009, Alternative Lithographic Technologies. 727131. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7271).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Removal of contaminants by plasma assisted cleaning by metastable atom neutralization (PACMAN)

    Lytle, W. M., Szybilski, D. S., Das, C. E., Raju, R. & Ruzic, D. N., 2009, Alternative Lithographic Technologies. 72713C. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7271).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Sputtering studies of lithiated ATJ graphite by lithium ion bombardment

    Ibano, K., Surla, V. & Ruzic, D. N., 2009, 2009 23rd IEEE/NPSS Symposium on Fusion Engineering, SOFE 2009. 5226432. (Proceedings - Symposium on Fusion Engineering).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 2008

    Ionic debris assessment of various EUVL systems

    Castano, C. H., Ruzic, D. N., Srivastava, S. N., Thompson, K. C. & Sporre, J., 2008, Emerging Lithographic Technologies XII. 692137. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6921).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Lithium debris removal by sputtering and evaporation for EUV optics and applications

    Neumann, M. J., Cruce, M. J. & Ruzic, D. N., 2008, Emerging Lithographic Technologies XII. 69213D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6921).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Plasma cleaning of nanoparticles from EUV mask materials by electrostatics

    Lytle, W. M., Raju, R., Shin, H., Das, C., Neumann, M. J. & Ruzic, D. N., 2008, Metrology, Inspection, and Process Control for Microlithography XXII. 69220D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6922).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Plasma properties in the magnetic nozzle of an electron cyclotron resonance plasma source

    Rovey, J. L., Stubbers, R. A., Jurczyk, B. E., Williams, M. J., Manley, F. T. & Ruzic, D. N., 2008, 44th AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit. (44th AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Plasma Sn cleaning integrated in EUV source system

    Shin, H., Raju, R. & Ruzic, D. N., 2008, Emerging Lithographic Technologies XII. 692132. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6921).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 2007

    Contamination removal from collector optics and masks: An essential step for next generation lithography

    Shin, H., Srivastava, S. N. & Ruzic, D. N., 2007, Metrology, Inspection, and Process Control for Microlithography XXI. PART 3 ed. 65184N. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6518, no. PART 3).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Design of an experimental facility to study convection in liquid lithium

    Jaworski, M. A. & Ruzic, D. N., 2007, Proceedings of the 22nd IEEE/NPSS Symposium on Fusion Engineering - SOFE 07. 4337874. (Proceedings - Symposium on Fusion Engineering).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Overview and status of the Divertor Erosion and Vapor shielding eXperiment (DEVeX)

    Gray, T. K., Williams, M. J. & Ruzic, D. N., 2007, Proceedings of the 22nd IEEE/NPSS Symposium on Fusion Engineering - SOFE 07. 4337925. (Proceedings - Symposium on Fusion Engineering).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Physical and chemical erosion of Li treated ATJ graphite for NSTX

    Racic, M. Z., Ruzic, D. N., Raju, R., Struck, C. & Castano, C. H., 2007, Proceedings of the 22nd IEEE/NPSS Symposium on Fusion Engineering - SOFE 07. 4337924. (Proceedings - Symposium on Fusion Engineering).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Plasma-Assisted Cleaning by Electrostatics (PACE)

    Lytle, W. M., Shin, H. & Ruzic, D. N., 2007, Metrology, Inspection, and Process Control for Microlithography XXI. PART 3 ed. 65183P. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6518, no. PART 3).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Study of RF breakdown mechanisms relevant to an ICH antenna environment

    Caughman, J. B. O., Castano-Giraldo, C., Aghazarian, M., Baity, F. W., Rasmussen, D. A. & Ruzic, D. N., 2007, RADIO FREQUENCY POWER IN PLASMAS: 17th Topical Conference on Radio Frequency Power in Plasmas. p. 195-202 8 p. (AIP Conference Proceedings; vol. 933).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 2006

    Plasma-Assisted Cleaning by Electrostatics (PACE)

    Lytle, W. M., Neumann, M. J. & Ruzic, D. N., 2006, Emerging Lithographic Technologies X. 61511B. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6151 I).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Study of the dynamic evolution and spectral properties of multi-component plasmas for EUV production

    Spencer, J. B., Srivastava, S. N., Alman, D. A., Antonsen, E. L., Ruzic, D. N. & MacFarlane, J. J., 2006, Emerging Lithographic Technologies X. 615146. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6151 II).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • 2005

    Density and temperature measurements in the ELM simulating plasma (ESP) gun

    Gray, T. K., Masters, B. C., Stubbers, R. & Ruzic, D. N., 2005, 21st IEEE/NPS Symposium on Fusion Engineering, SOFE'05. Institute of Electrical and Electronics Engineers Inc., 4018998. (Proceedings - Symposium on Fusion Engineering).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • ELM simulating plasma gun development and experiments

    Gray, T. K., Ruzic, D. N., Stubbers, R. & Masters, B. C., 2005, 32nd EPS Conference on Plasma Physics 2005, EPS 2005, Held with the 8th International Workshop on Fast Ignition of Fusion Targets - Europhysics Conference Abstracts. p. 1442-1445 4 p. (32nd EPS Conference on Plasma Physics 2005, EPS 2005, Held with the 8th International Workshop on Fast Ignition of Fusion Targets - Europhysics Conference Abstracts; vol. 2).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Magnetic and thermal characterization of an ELM Simulating Plasma (ESP) with helicon pre-ionization

    Masters, B. C., Gray, T. K., Ruzic, D. N. & Stubbers, R., 2005, 21st IEEE/NPS Symposium on Fusion Engineering, SOFE'05. Institute of Electrical and Electronics Engineers Inc., 4019017. (Proceedings - Symposium on Fusion Engineering).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  • Measurement of low energy sputtering of high temperature liquid tin for divertor applications

    Coventry, M. D., Stubbers, R. A. & Ruzic, D. N., 2005, 21st IEEE/NPS Symposium on Fusion Engineering, SOFE'05. Institute of Electrical and Electronics Engineers Inc., 4018962. (Proceedings - Symposium on Fusion Engineering).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution