David N Ruzic

2023

Plasma Enhanced CO₂ Recombination in EUV Drive Lasers

Herschberg, A. C., Bartlett, N., Crouse, J. & Ruzic, D. N., 2023, Optical and EUV Nanolithography XXXVI. Lio, A. (ed.). SPIE, 124941D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12494).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Scattering Cross Sections of Tin Ions With Molecular Hydrogen

Bartlett, N., Herschberg, A., Crouse, J., Garza, R., Ganeson, R., Dallal, T. A., Nuttall, J., Ringstad, L. & Ruzic, D. N., 2023, Optical and EUV Nanolithography XXXVI. Lio, A. (ed.). SPIE, 124941F. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12494).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2022

Single electrode a.C. plasma anemometer in high speed h2 jet with background rf plasma

Matlis, E. H., Corke, T. C., Qerimi, D. & Ruzic, D., 2022, AIAA AVIATION 2022 Forum. American Institute of Aeronautics and Astronautics Inc, AIAA, AIAA 2022-3364. (AIAA AVIATION 2022 Forum).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2018

Amelioration of plasma-material interactions and ELMs, and improvement to plasma performance with lithium injection and conditioning in EAST

Maingi, R., Hu, J. S., Andruczyk, D., Canik, J. M., Diallo, A., Gan, K. F., Gilson, E. P., Gong, X. Z., Gray, T. K., Huang, M., Lunsford, R., Mansfield, D. K., Meng, X. C., Osborne, T. H., Ruzic, D. N., Sun, Z., Tritz, K., Xu, W., Zuo, G. Z. & Wang, Z. & 3 others, Wirth, B. D., Woller, K. & Zinkle, S. J., 2018, 45th EPS Conference on Plasma Physics, EPS 2018. Michaut, C., Berndt, J., Mantsinen, M., Coda, S., Lapenta, G. & Weber, S. (eds.). European Physical Society (EPS), p. 641-644 4 p. (45th EPS Conference on Plasma Physics, EPS 2018; vol. 2018-July).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Critical heat flux on laser-textured surface in vertical flow boiling

Bottini, J. L., Kumar, V., Hammouti, S., Ruzic, D. & Brooks, C. S., 2018, Proceedings of the 3rd Thermal and Fluid Engineering Summer Conference, TFESC 2018. Begell House Inc., p. 1007-1017 11 p. (Proceedings of the Thermal and Fluids Engineering Summer Conference; vol. 2018-March).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ion Cyclotron Resonance Heating on Proto-MPEX

Piotrowicz, P. A., Ruzic, D. N., Caneses, J. F., Caughman, J. B. O., Goulding, R. H., Green, D. L., Lore, J. D. & Rapp, J., Jun 24 2018, ICOPS 2018 - 45th IEEE International Conference on Plasma Science. Institute of Electrical and Electronics Engineers Inc., (IEEE International Conference on Plasma Science; vol. 2018-June).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2017

Study of Sn removal by surface wave plasma for source cleaning

Panici, G., Qerimi, D. & Ruzic, D. N., 2017, Extreme Ultraviolet (EUV) Lithography VIII. Goldberg, K. A. & Panning, E. M. (eds.). SPIE, 101432I. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10143).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2016

Study of Sn removal processes for in-situ collector cleaning

Elg, D. T., Panici, G. A., Srivastava, S. N. & Ruzic, D. N., 2016, Extreme Ultraviolet (EUV) Lithography VII. Panning, E. M. & Goldberg, K. A. (eds.). SPIE, 97760M. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9776).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Wetting of lithium on nanostructured surfaces for first wall components

Szott, M., Fiflis, P., Kalathiparambil, K., Shchelkanov, I., Ruzic, D. N., Jurczyk, B., Stubbers, R. & Foster, C. J., May 31 2016, 2015 IEEE 26th Symposium on Fusion Engineering, SOFE 2015. Institute of Electrical and Electronics Engineers Inc., 7482285. (Proceedings - Symposium on Fusion Engineering; vol. 2016-May).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2015

Collector optic cleaning by in-situ hydrogen plasma

Elg, D. T., Panici, G. A., Srivastava, S. N. & Ruzic, D. N., 2015, Extreme Ultraviolet (EUV) Lithography VI. Wood, O. R. & Panning, E. M. (eds.). SPIE, 94222H. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9422).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

HIDRA: Hybrid Illinois device for research and applications

HIDRA Team, Oct 1 2015, Fusion Science and Technology. 3 ed. Taylor and Francis Inc., Vol. 68. p. 497-500 4 p.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2014

Modeling of melt-pool formation and material removal in micro electro-discharge machining

Mujumdar, S. S., Curreli, D., Kapoor, S. G. & Ruzic, D. N., 2014, ASME 2014 International Manufacturing Science and Engineering Conference, MSEC 2014 Collocated with the JSME 2014 International Conference on Materials and Processing and the 42nd North American Manufacturing Research Conference. Web Portal ASME (American Society of Mechanical Engineers), (ASME 2014 International Manufacturing Science and Engineering Conference, MSEC 2014 Collocated with the JSME 2014 International Conference on Materials and Processing and the 42nd North American Manufacturing Research Conference; vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2013

A method to produce lithium pellets for fueling and ELM pacing in NSTX-U

Andruczyk, D., Roquemore, A. L., Fiflis, P., Mansfield, D. & Ruzic, D. N., 2013, 2013 IEEE 25th Symposium on Fusion Engineering, SOFE 2013. 6635370. (2013 IEEE 25th Symposium on Fusion Engineering, SOFE 2013).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Collector optic in-situ Sn removal using hydrogen plasma

Sporre, J. R., Elg, D., Ruzic, D. N., Srivastava, S. N., Fomenkov, I. V. & Brandt, D. C., 2013, Extreme Ultraviolet (EUV) Lithography IV. 86792H. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8679).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Contamination concerns at the intermediate focus of an extreme ultraviolet light source

Ruzic, D. N., Sporre, J., Elg, D. & Curreli, D., 2013, Extreme Ultraviolet (EUV) Lithography IV. 86790D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8679).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Magnetic mitigation of debris for EUV sources

Elg, D., Sporre, J., Curreli, D., Ruzic, D. N. & Umstadter, K. R., 2013, Extreme Ultraviolet (EUV) Lithography IV. 86792M. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8679).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2012

Energetic ion and neutral energy analyzer for extreme-ultraviolet light sources

Andruczyk, D., Sporre, J., Elg, D., Cho, T. & Ruzic, D. N., 2012, Extreme Ultraviolet (EUV) Lithography III. 832237. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

In-situ Sn contamination removal by hydrogen plasma

Sporre, J., Elg, D., Andruczyk, D., Cho, T., Ruzic, D. N., Srivastava, S. N. & Brandt, D. C., 2012, Extreme Ultraviolet (EUV) Lithography III. 83222L. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Modeling the ion beam-target interaction to reduce defects generated by ion beam deposition

Cardinal, T., Andruczyk, D., Yu, H., Jindal, V., Kearney, P. & Ruzic, D. N., 2012, Extreme Ultraviolet (EUV) Lithography III. 83222Q. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Origin of EUV mask blank defects from ion beam deposition

Yu, H., Andruczyk, D., Ruzic, D. N., Jindal, V., Kearney, P. & Jiang, Y., 2012, Extreme Ultraviolet (EUV) Lithography III. 83221T. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Understanding the ion beam in EUV mask blank production

Kearney, P., Jindal, V., Weaver, A., Teora, P., Sporre, J., Ruzic, D. N. & Goodwin, F., 2012, Extreme Ultraviolet (EUV) Lithography III. 83221U. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8322).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2011

Development of an in-situ Sn cleaning method for extreme ultraviolet light lithography

Sporre, J., Lofgren, R. E., Ruzic, D. N., Khodykin, O. V. & Myers, D. W., 2011, Extreme Ultraviolet (EUV) Lithography II. 796929. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7969).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Laboratory investigation of vapor shielding for lithium-coated molybdenum in DEVeX

Jung, S., Andruczyk, D. & Ruzic, D. N., 2011, 2011 IEEE/NPSS 24th Symposium on Fusion Engineering, SOFE 2011. 6052299. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Plasma-assisted cleaning by metastable-atom neutralization (PACMAN): A plasma approach to cleanliness in lithography

Lytle, W. M., Andruczyk, D., Jindal, V. & Ruzic, D. N., 2011, Extreme Ultraviolet (EUV) Lithography II. 796927. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7969).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2010

Debris measurement at the intermediate focus of a laser-assisted discharge-produced plasma light source

Sporre, J., Surla, V., Neumann, M. J., Ruzic, D. N., Ren, L. & Goodwin, F., 2010, Extreme Ultraviolet (EUV) Lithography. 763611. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7636).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Laboratory-scale lithium research's relevance to fusion devices

Surla, V., Xu, W., Jung, S., Raman, P. & Ruzic, D. N., 2010, 37th EPS Conference on Plasma Physics 2010, EPS 2010. p. 890-893 4 p. (37th EPS Conference on Plasma Physics 2010, EPS 2010; vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Removal of carbon and nanoparticles from lithographic materials by plasma assisted cleaning by metastable atom neutralization (PACMAN)

Lytle, W. M., Lofgren, R. E., Surla, V., Neumann, M. J. & Ruzic, D. N., 2010, Extreme Ultraviolet (EUV) Lithography. 76360O. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7636).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sn debris cleaning by plasma in DPP EUV source systems for HVM

Shin, H., Surla, V., Neumann, M. J. & Ruzic, D. N., 2010, Extreme Ultraviolet (EUV) Lithography. 76360B. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7636).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2009

Measurement of particle flux at the intermediate focus of a DPP source

Sporre, J., Raju, R., Ruzic, D. N., Surla, V. & Goodwin, F., 2009, Alternative Lithographic Technologies. 727137. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7271).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Reducing LER using a grazing incidence ion beam

Struck, C. R. M., Raju, R., Neumann, M. J. & Ruzic, D. N., 2009, Advances in Resist Materials and Processing Technology XXVI. 727346. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7273).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Remote plasma cleaning of Sn from an EUV collector mirror

Shin, H., Raju, R. & Ruzic, D. N., 2009, Alternative Lithographic Technologies. 727131. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7271).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Removal of contaminants by plasma assisted cleaning by metastable atom neutralization (PACMAN)

Lytle, W. M., Szybilski, D. S., Das, C. E., Raju, R. & Ruzic, D. N., 2009, Alternative Lithographic Technologies. 72713C. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7271).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sputtering studies of lithiated ATJ graphite by lithium ion bombardment

Ibano, K., Surla, V. & Ruzic, D. N., 2009, 2009 23rd IEEE/NPSS Symposium on Fusion Engineering, SOFE 2009. 5226432. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2008

Ionic debris assessment of various EUVL systems

Castano, C. H., Ruzic, D. N., Srivastava, S. N., Thompson, K. C. & Sporre, J., 2008, Emerging Lithographic Technologies XII. 692137. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6921).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Lithium debris removal by sputtering and evaporation for EUV optics and applications

Neumann, M. J., Cruce, M. J. & Ruzic, D. N., 2008, Emerging Lithographic Technologies XII. 69213D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6921).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Plasma cleaning of nanoparticles from EUV mask materials by electrostatics

Lytle, W. M., Raju, R., Shin, H., Das, C., Neumann, M. J. & Ruzic, D. N., 2008, Metrology, Inspection, and Process Control for Microlithography XXII. 69220D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6922).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Plasma properties in the magnetic nozzle of an electron cyclotron resonance plasma source

Rovey, J. L., Stubbers, R. A., Jurczyk, B. E., Williams, M. J., Manley, F. T. & Ruzic, D. N., 2008, 44th AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit. (44th AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Plasma Sn cleaning integrated in EUV source system

Shin, H., Raju, R. & Ruzic, D. N., 2008, Emerging Lithographic Technologies XII. 692132. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6921).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2007

Contamination removal from collector optics and masks: An essential step for next generation lithography

Shin, H., Srivastava, S. N. & Ruzic, D. N., 2007, Metrology, Inspection, and Process Control for Microlithography XXI. PART 3 ed. 65184N. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6518, no. PART 3).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Design of an experimental facility to study convection in liquid lithium

Jaworski, M. A. & Ruzic, D. N., 2007, Proceedings of the 22nd IEEE/NPSS Symposium on Fusion Engineering - SOFE 07. 4337874. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Overview and status of the Divertor Erosion and Vapor shielding eXperiment (DEVeX)

Gray, T. K., Williams, M. J. & Ruzic, D. N., 2007, Proceedings of the 22nd IEEE/NPSS Symposium on Fusion Engineering - SOFE 07. 4337925. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Physical and chemical erosion of Li treated ATJ graphite for NSTX

Racic, M. Z., Ruzic, D. N., Raju, R., Struck, C. & Castano, C. H., 2007, Proceedings of the 22nd IEEE/NPSS Symposium on Fusion Engineering - SOFE 07. 4337924. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Plasma-Assisted Cleaning by Electrostatics (PACE)

Lytle, W. M., Shin, H. & Ruzic, D. N., 2007, Metrology, Inspection, and Process Control for Microlithography XXI. PART 3 ed. 65183P. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6518, no. PART 3).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Study of RF breakdown mechanisms relevant to an ICH antenna environment

Caughman, J. B. O., Castano-Giraldo, C., Aghazarian, M., Baity, F. W., Rasmussen, D. A. & Ruzic, D. N., 2007, RADIO FREQUENCY POWER IN PLASMAS: 17th Topical Conference on Radio Frequency Power in Plasmas. p. 195-202 8 p. (AIP Conference Proceedings; vol. 933).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2006

Plasma-Assisted Cleaning by Electrostatics (PACE)

Lytle, W. M., Neumann, M. J. & Ruzic, D. N., 2006, Emerging Lithographic Technologies X. 61511B. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6151 I).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Study of the dynamic evolution and spectral properties of multi-component plasmas for EUV production

Spencer, J. B., Srivastava, S. N., Alman, D. A., Antonsen, E. L., Ruzic, D. N. & MacFarlane, J. J., 2006, Emerging Lithographic Technologies X. 615146. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6151 II).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2005

Density and temperature measurements in the ELM simulating plasma (ESP) gun

Gray, T. K., Masters, B. C., Stubbers, R. & Ruzic, D. N., 2005, 21st IEEE/NPS Symposium on Fusion Engineering, SOFE'05. Institute of Electrical and Electronics Engineers Inc., 4018998. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

ELM simulating plasma gun development and experiments

Gray, T. K., Ruzic, D. N., Stubbers, R. & Masters, B. C., 2005, 32nd EPS Conference on Plasma Physics 2005, EPS 2005, Held with the 8th International Workshop on Fast Ignition of Fusion Targets - Europhysics Conference Abstracts. p. 1442-1445 4 p. (32nd EPS Conference on Plasma Physics 2005, EPS 2005, Held with the 8th International Workshop on Fast Ignition of Fusion Targets - Europhysics Conference Abstracts; vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Magnetic and thermal characterization of an ELM Simulating Plasma (ESP) with helicon pre-ionization

Masters, B. C., Gray, T. K., Ruzic, D. N. & Stubbers, R., 2005, 21st IEEE/NPS Symposium on Fusion Engineering, SOFE'05. Institute of Electrical and Electronics Engineers Inc., 4019017. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Measurement of low energy sputtering of high temperature liquid tin for divertor applications

Coventry, M. D., Stubbers, R. A. & Ruzic, D. N., 2005, 21st IEEE/NPS Symposium on Fusion Engineering, SOFE'05. Institute of Electrical and Electronics Engineers Inc., 4018962. (Proceedings - Symposium on Fusion Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

David N Ruzic

Research output

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