Keyphrases
Lithium
100%
Liquid Lithium
80%
Optics
65%
Extreme Ultraviolet
55%
Debris
51%
Plasma-facing Components
45%
Liquid Metal
43%
Extreme Ultraviolet Source
41%
Divertor
39%
Sputtering Yield
36%
Flowing Liquid
34%
Extreme Ultraviolet Lithography
34%
Tokamak
34%
Plasma Sources
31%
Electron Temperature
29%
In Situ
27%
Low Energy
26%
Plasma-assisted
25%
Ion Energy
22%
Antenna
22%
Ion Beam
22%
Reflectivity
21%
Debris Mitigation
21%
Heavy Ions
20%
Graphite
20%
Energy Distribution
20%
Plasma-material Interactions
20%
EUV Source
19%
Angular Distribution
19%
Neutral Atoms
19%
Fusion Devices
19%
Ion Bombardment
19%
Tritium
18%
Energy Analyzer
18%
Ion Flux
18%
Magnetron
18%
Electron Density
17%
Atmospheric Pressure
17%
Cleaning Methods
16%
Secondary Plasma
16%
Helium
16%
Deposition Rate
16%
Beryllium
16%
Ionization Fraction
16%
HiPIMS
16%
Illinois
16%
Quartz Crystal Microbalance with Dissipation (QCM-D)
16%
Metal Plasma
15%
Spherical Torus
15%
Heat Flux
15%
Engineering
Energy Engineering
80%
Magnetron
58%
Extreme-Ultraviolet Lithography
46%
Plasma Source
44%
Plasma Facing Component
44%
Ultraviolet Light
42%
Lithography
38%
Light Source
35%
Liquid Metal
33%
Ion Energy
30%
Electron Temperature
30%
Antenna
27%
Sputtering Yield
27%
Plasma-Materials Interaction
24%
Physical Vapor Deposition
23%
Radio Frequency
23%
Etch Rate
22%
Ion Implantation
21%
Magnetic Field
21%
Atmospheric Pressure
20%
Energy Distribution
20%
Heat Flux
18%
Removal Rate
18%
Deposition Rate
16%
Angular Distribution
16%
Experimental Result
16%
Energetics
15%
Thin Films
14%
High Power Impulse Magnetron Sputtering
14%
Quartz Crystal Microbalance
13%
Limiters
12%
Stainless Steel
12%
Defects
12%
Electrostatics
12%
Redeposition
11%
Surface Morphology
11%
Thermoelectrics
11%
Cleaning Method
10%
Nanoparticle
10%
Liquid Surface
10%
Reflection Coefficient
10%
Bombardment
10%
Plasma Density
10%
High Deposition Rate
10%
Nitride
10%
Time-of-Flight
9%
Plasma Applications
9%
Plasma System
9%
Reflective Material
9%
Tritium
9%