Keyphrases
Lithium
42%
Liquid Lithium
35%
Optics
28%
Extreme Ultraviolet
23%
Debris
22%
Plasma-facing Components
20%
Liquid Metal
19%
Extreme Ultraviolet Source
17%
Divertor
17%
Sputtering Yield
15%
Flowing Liquid
14%
Extreme Ultraviolet Lithography
14%
Tokamak
14%
Plasma Sources
13%
Electron Temperature
12%
In Situ
11%
Low Energy
11%
Plasma-assisted
10%
Ion Energy
9%
Antenna
9%
Ion Beam
9%
Reflectivity
9%
Debris Mitigation
9%
Heavy Ions
8%
Plasma-material Interactions
8%
Graphite
8%
Energy Distribution
8%
EUV Source
8%
Angular Distribution
8%
Neutral Atoms
8%
Fusion Devices
8%
Ion Bombardment
8%
Tritium
7%
Energy Analyzer
7%
Ion Flux
7%
Magnetron
7%
Electron Density
7%
Atmospheric Pressure
7%
Cleaning Methods
7%
Secondary Plasma
7%
Helium
7%
Deposition Rate
7%
Beryllium
7%
Ionization Fraction
7%
Metal Plasma
6%
HiPIMS
6%
Illinois
6%
Heat Flux
6%
Surface Roughness
6%
Quartz Crystal Microbalance with Dissipation (QCM-D)
6%
Engineering
Magnetron
23%
Reflectance
22%
Plasma Facing Component
21%
Plasma Source
19%
Extreme-Ultraviolet Lithography
18%
Ultraviolet Light
17%
Lithography
17%
Liquid Metal
16%
Light Source
14%
Electron Energy
14%
Ion Energy
11%
Sputtering Yield
11%
Antenna
10%
Heat Flux
10%
Carrier Concentration
10%
Plasma-Materials Interaction
10%
Physical Vapor Deposition
10%
Radio Frequency
10%
Energy Distribution
10%
Ion Implantation
9%
Magnetic Field
9%
Etch Rate
8%
Atmospheric Pressure
7%
Angular Distribution
7%
Deposition Rate
7%
Thin Films
6%
Experimental Result
6%
Energetics
6%
High Power Impulse Magnetron Sputtering
6%
Removal Rate
6%
Quartz Crystal Microbalance
5%
Limiters
5%
Time-of-Flight
5%
Melting Point
5%
Plasma Applications
5%
Redeposition
5%
Nanoparticle
5%
Physics
Blood Plasma
100%
Liquid Lithium
28%
Tokamak Device
18%
Optics
14%
Electron Energy
13%
Plasma Facing Component
12%
Liquid Metal
11%
Thermoelectricity
10%
Energy Distribution
9%
Physics
9%
Magnetic Field
9%
Ultraviolet Sources
8%
Deuterium
8%
Energetics
8%
Hydrogen Plasma
7%
Electrostatic Probe
7%
Plasma-Materials Interaction
7%
Reflectance
7%
Antenna
7%
Surface Reaction
7%
Neutral Atom
6%
Magnetohydrodynamics
6%
Light Source
6%
Electron Density
6%
Tritium
6%
Ion Current
5%
Plasma Density
5%
Atmospheric Pressure
5%
Angular Distribution
5%
Magnetron
5%