Fingerprint Fingerprint is based on mining the text of the expert's scholarly documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 4 Similar Profiles
Plasmas Engineering & Materials Science
Lithium Engineering & Materials Science
Ions Chemical Compounds
Sputtering Engineering & Materials Science
accumulators Physics & Astronomy
lithium Physics & Astronomy
sputtering Physics & Astronomy
debris Physics & Astronomy

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Research Output 1978 2018

Cu films prepared by bipolar pulsed high power impulse magnetron sputtering

Wu, B., Haehnlein, I., Shchelkanov, I., McLain, J., Patel, D., Uhlig, J., Jurczyk, B., Leng, Y. & Ruzic, D. N. Apr 1 2018 In : Vacuum. 150, p. 216-221 6 p.

Research output: Contribution to journalArticle

Magnetron sputtering
magnetron sputtering
pulse duration

Removal of Tin from Extreme Ultraviolet Collector Optics by In-Situ Hydrogen Plasma Etching

Elg, D. T., Panici, G. A., Liu, S., Girolami, G., Srivastava, S. N. & Ruzic, D. N. Jan 1 2018 In : Plasma Chemistry and Plasma Processing. 38, 1, p. 223-245 23 p.

Research output: Contribution to journalArticle

Plasma etching
hydrogen plasma
plasma etching
Thermal desorption
Plasma etching
plasma etching
yield point

Tailoring of titanium thin film properties in high power pulsed magnetron sputtering

Wu, B., Yu, Y., Wu, J., Shchelkanov, I., Ruzic, D. N., Huang, N. & Leng, Y. X. Apr 1 2018 In : Vacuum. 150, p. 144-154 11 p.

Research output: Contribution to journalArticle

Magnetron sputtering
magnetron sputtering
Thin films

Determining the ion temperature and energy distribution in a lithium-plasma interaction test stand with a retarding field energy analyzer

Christenson, M., Stemmley, S., Jung, S., Mettler, J., Sang, X., Martin, D., Kalathiparambil, K. & Ruzic, D. N. Aug 1 2017 In : Review of Scientific Instruments. 88, 8, 083501

Research output: Contribution to journalArticle

Plasma interactions
plasma interactions
test stands
ion temperature