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Nuclear, Plasma, and Radiological Engineering
University of Illinois Urbana-Champaign
Grainger College of Engineering
Email
[email protected]
Website
https://npre.illinois.edu/
Overview
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Profiles
(26)
Research & Scholarship
(2769)
Datasets
(6)
Honors
(48)
Press/Media
(4)
Activities
(1)
Research output
Research output per year
1973
2005
2006
2007
2008
2009
2010
2011
2012
2013
2014
2015
2016
2017
2018
2019
2020
2021
2022
2023
2024
2025
1735
Article
458
Conference contribution
276
Conference article
81
Patent
219
More
64
Paper
48
Review article
44
Chapter
20
Editorial
9
Book
7
Technical report
6
Letter
5
Commissioned report
3
Other chapter/report contribution
3
Abstract
3
Comment/debate
2
Conference proceeding
2
Working paper
1
Other
1
Short survey
1
Special issue
Research output per year
Research output per year
1 results
Publication Year, Title
(descending)
Publication Year, Title
(ascending)
Title
Type
Filter
Short survey
Search results
2008
Growth inhibition to enhance conformal coverage in thin film chemical vapor deposition
Kumar, N., Yanguas-Gil, A., Daly, S. R.,
Girolami, G. S.
&
Abelson, J. R.
,
Dec 31 2008
,
In:
Journal of the American Chemical Society.
130
,
52
,
p. 17660-17661
2 p.
Research output
:
Contribution to journal
›
Short survey
›
peer-review
Chemical Vapor Deposition
100%
Film Growth
100%
Growth Inhibition
100%
Conformal Coverage
100%
1,2-dimethoxyethane
100%